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Class Information
Number: 156/345.22
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With plural etching zones for a single discrete workpiece in apparatus
Description: Apparatus including means to carry out plural discrete etchings of the workpiece in separately located zones within the apparatus.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8632854 Substrate centering device and organic material deposition system Jan. 21, 2014
8512473 Substrate centering device and organic material deposition system Aug. 20, 2013
8460468 Device for doping, deposition or oxidation of semiconductor material at low pressure Jun. 11, 2013
8435350 Supply device May. 7, 2013
8398812 Apparatus and method for treating substrates Mar. 19, 2013
8377252 Apparatus for spraying etchant onto printed circuit board Feb. 19, 2013
8267041 Plasma treating apparatus Sep. 18, 2012
8257498 Substrate transfer module and substrate processing system Sep. 4, 2012
8173451 Etch stage measurement system May. 8, 2012
8070909 Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles Dec. 6, 2011
8021512 Method of preventing premature drying Sep. 20, 2011
8011317 Advanced mixing system for integrated tool having site-isolated reactors Sep. 6, 2011
7976635 Dual substrate loadlock process equipment Jul. 12, 2011
7857939 Apparatus for treating wafers using supercritical fluid Dec. 28, 2010
7850817 Polishing device and substrate processing device Dec. 14, 2010
7837799 Arrangement for transporting a flat substrate in a vacuum chamber Nov. 23, 2010
7794546 Sealing device and method for a processing system Sep. 14, 2010
7771563 Systems and methods for achieving isothermal batch processing of substrates used for the production of micro-electro-mechanical-systems Aug. 10, 2010
7674350 Feature dimension control in a manufacturing process Mar. 9, 2010
7655092 Tandem process chamber Feb. 2, 2010
7632376 Method and apparatus for atomic layer deposition (ALD) in a proximity system Dec. 15, 2009
7427333 Resist removing method and resist removing apparatus Sep. 23, 2008
7371306 Integrated tool with interchangeable wet processing components for processing microfeature workpieces May. 13, 2008
7329115 Patterning nanoline arrays with spatially varying pitch Feb. 12, 2008
7198694 Integrated tool with interchangeable wet processing components for processing microfeature workpieces and automated calibration systems Apr. 3, 2007
7166184 Multi-stage type processing apparatus Jan. 23, 2007
7105100 System and method for gas distribution in a dry etch process Sep. 12, 2006
7052575 System and method for active control of etch process May. 30, 2006
7018504 Loadlock with integrated pre-clean chamber Mar. 28, 2006
6921466 Revolution member supporting apparatus and semiconductor substrate processing apparatus Jul. 26, 2005
6841031 Substrate processing apparatus equipping with high-pressure processing unit Jan. 11, 2005
6689691 Method of simultaneously polishing a plurality of objects of a similar type, in particular silicon wafers, on a polishing installation Feb. 10, 2004
6666948 Silicon wafer polisher Dec. 23, 2003
6578588 Unified strip/cleaning apparatus Jun. 17, 2003
6572730 System and method for chemical mechanical planarization Jun. 3, 2003
6537416 Wafer chuck for use in edge bevel removal of copper from silicon wafers Mar. 25, 2003
6497785 Wet chemical process tank with improved fluid circulation Dec. 24, 2002
6461437 Apparatus used for fabricating liquid crystal device and method of fabricating the same Oct. 8, 2002
6391113 Semiconductor wafer processing apparatus and method of controlling the same May. 21, 2002
6309981 Edge bevel removal of copper from silicon wafers Oct. 30, 2001
6270619 Treatment device, laser annealing device, manufacturing apparatus, and manufacturing apparatus for flat display device Aug. 7, 2001
6254721 Method and apparatus for processing samples Jul. 3, 2001
6225235 Method and device for cleaning and etching individual wafers using wet chemistry May. 1, 2001
6221204 Stackable chamber apparatus Apr. 24, 2001
6143126 Process and manufacturing tool architecture for use in the manufacture of one or more metallization levels on an integrated circuit Nov. 7, 2000
6120641 Process architecture and manufacturing tool sets employing hard mask patterning for use in the manufacture of one or more metallization levels on a workpiece Sep. 19, 2000
6071376 Method and apparatus for cleaning photomask Jun. 6, 2000
6036816 Apparatus for processing a sample having a metal laminate Mar. 14, 2000
5925213 Wet processing apparatus with movable partitioning plate between two processing chambers Jul. 20, 1999
5919378 Process for automatically making printing sleeves Jul. 6, 1999

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