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Class Information
Number: 156/345.21
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > Liquid etchant spray type
Description: Apparatus including means to spray a liquid etchant upon the workpiece.










Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8685202 Etching device and method for manufacturing printed circuit board using same Apr. 1, 2014
8597461 Reduced isotropic etchant material consumption and waste generation Dec. 3, 2013
8500949 Apparatus and method for wet processing substrate Aug. 6, 2013
8439481 Liquid dispenser including sloped outlet opening wall May. 14, 2013
8419891 Semiconductor development apparatus and method using same Apr. 16, 2013
8398817 Chemical-liquid processing apparatus and chemical-liquid processing method Mar. 19, 2013
8394228 Apparatus for removing material from one or more substrates Mar. 12, 2013
8388800 Apparatus for wet processing substrate Mar. 5, 2013
8377252 Apparatus for spraying etchant onto printed circuit board Feb. 19, 2013
8337659 Substrate processing method and substrate processing apparatus Dec. 25, 2012
8324105 Stacking method and stacking carrier Dec. 4, 2012
8293065 Apparatus for etching substrate and fabrication line for fabricating liquid crystal display using the same Oct. 23, 2012
8282771 Method of processing a substrate, spin unit for supplying processing materials to a substrate, and apparatus for processing a substrate having the same Oct. 9, 2012
8277602 Apparatus and method for the wet chemical treatment of a product and method for installing a flow member into the apparatus Oct. 2, 2012
8216417 Substrate treating apparatus and substrate treating method Jul. 10, 2012
8206549 Etching apparatus Jun. 26, 2012
8043469 Substrate processing method, substrate processing apparatus, and storage medium Oct. 25, 2011
8043468 Apparatus for and method of processing substrate Oct. 25, 2011
7988818 Device for liquid treatment of wafer-shaped articles Aug. 2, 2011
7931775 Surface treatment device Apr. 26, 2011
7862680 Substrate processing apparatus Jan. 4, 2011
7862658 Etching and cleaning methods and etching and cleaning apparatuses used therefor Jan. 4, 2011
7850818 Method of manufacturing semiconductor device and cleaning apparatus Dec. 14, 2010
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7758716 Apparatus for spraying etchant solution onto preformed printed circuit board Jul. 20, 2010
7635417 Semiconductor apparatus and cleaning unit thereof Dec. 22, 2009
7632376 Method and apparatus for atomic layer deposition (ALD) in a proximity system Dec. 15, 2009
7556711 Semiconductor device manufacturing apparatus and operating method thereof Jul. 7, 2009
7427333 Resist removing method and resist removing apparatus Sep. 23, 2008
7412981 Liquid processing apparatus and method Aug. 19, 2008
7323655 Inductively coupled plasma reactor for producing nano-powder Jan. 29, 2008
7323080 Apparatus for treating substrate Jan. 29, 2008
7314054 Liquid processing apparatus with nozzle having planar ejecting orifices Jan. 1, 2008
7189305 Gas-assist systems for applying and moving ozonated resist stripper to resist-bearing surfaces of substrates Mar. 13, 2007
7105074 Substrate treating method and apparatus Sep. 12, 2006
7001086 Developing method, substrate treating method, and substrate treating apparatus Feb. 21, 2006
6964724 Etching and cleaning methods and etching and cleaning apparatuses used therefor Nov. 15, 2005
6918989 Apparatus for manufacturing printed wiring board and method for manufacturing printed wiring board using the same Jul. 19, 2005
6878232 Method and apparatus for improving a temperature controlled solution delivery process Apr. 12, 2005
6837943 Method and apparatus for cleaning a semiconductor substrate Jan. 4, 2005
6805754 Device and method for processing substrates Oct. 19, 2004
6786996 Apparatus and method for edge bead removal Sep. 7, 2004
6764573 Wafer thinning techniques Jul. 20, 2004
6758938 Delivery of dissolved ozone Jul. 6, 2004
6699356 Method and apparatus for chemical-mechanical jet etching of semiconductor structures Mar. 2, 2004
6630052 Apparatus for etching glass substrate Oct. 7, 2003
6586342 Edge bevel removal of copper from silicon wafers Jul. 1, 2003
6569282 Etching apparatus May. 27, 2003
6537416 Wafer chuck for use in edge bevel removal of copper from silicon wafers Mar. 25, 2003
6524429 Method of forming buried wiring, and apparatus for processing substratum Feb. 25, 2003

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