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Class Information
Number: 156/345.19
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With mechanical mask or shield or shutter for shielding workpiece
Description: Apparatus including a mask, shield, or shutter for preventing the liquid etchant from contacting a particular portion of the workpiece.










Patents under this class:

Patent Number Title Of Patent Date Issued
8702901 Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Apr. 22, 2014
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8591697 Transmission electron microscopy sample etching fixture Nov. 26, 2013
8557044 Shadow mask, method of manufacturing the same and method of forming thin film using the same Oct. 15, 2013
8500907 Masking system for the masking of a cylinder bore Aug. 6, 2013
8486195 Atomic layer deposition apparatus and method of fabricating atomic layer using the same Jul. 16, 2013
8361230 Magnetic mask holder Jan. 29, 2013
8206549 Etching apparatus Jun. 26, 2012
8187432 Anodizing apparatus May. 29, 2012
8058186 Components for substrate processing apparatus and manufacturing method thereof Nov. 15, 2011
8038836 Plasma processing apparatus Oct. 18, 2011
7938907 Device for fabricating a mask by plasma etching a semiconductor substrate May. 10, 2011
7803229 Apparatus and method for compensating uniformity of film thickness Sep. 28, 2010
7794545 Mask, film forming method, light-emitting device, and electronic apparatus Sep. 14, 2010
7568489 Method of and apparatus for eluting impurities Aug. 4, 2009
7204911 Process and apparatus for forming discrete microcavities in a filament wire using a polymer etching mask Apr. 17, 2007
7172674 Device for liquid treatment of wafer-shaped articles Feb. 6, 2007
6949174 Milling apparatus Sep. 27, 2005
6863769 Configuration and method for making contact with the back surface of a semiconductor substrate Mar. 8, 2005
6746503 Precision gap particle separator Jun. 8, 2004
6733616 Surface isolation device May. 11, 2004
6682629 Substrate processing unit Jan. 27, 2004
6649077 Method and apparatus for removing coating layers from alignment marks on a wafer Nov. 18, 2003
6589385 Resist mask for measuring the accuracy of overlaid layers Jul. 8, 2003
6579408 Apparatus and method for etching wafer backside Jun. 17, 2003
6485655 Method and apparatus for retaining an internal coating during article repair Nov. 26, 2002
6028010 Style gas ring with a guard extension Feb. 22, 2000
5688359 Muffle etch injector assembly Nov. 18, 1997
5433821 Direct patternization device and method Jul. 18, 1995
5286343 Method for protecting chip corners in wet chemical etching of wafers Feb. 15, 1994
5009742 Method and apparatus for making sealing rings of the radial type with sealing lip of fluoroplastic Apr. 23, 1991
4689114 Method for manufacturing a shadow mask Aug. 25, 1987
4652337 Vehicle identification system Mar. 24, 1987
4613394 Staged chemical pipe cutter Sep. 23, 1986
4339296 Apparatus for adjustably forming pattern in a strip Jul. 13, 1982
4124437 System for etching patterns of small openings on a continuous strip of metal Nov. 7, 1978
4069085 Apparatus for forming apertures in a thin metal tape such as a shadow mask for a color television display tube Jan. 17, 1978
4013498 Etching apparatus for accurately making small holes in thick materials Mar. 22, 1977











 
 
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