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Class Information
Number: 156/345.18
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With means to supply, remove, or recycle liquid etchant outside of etching tank or chamber (e.g., supply tanks or pipe network)
Description: Apparatus including means located outside an etching tank or chamber to supply etchant to the tank or chamber, to remove used etchant from the tank or chamber, or to recycle used etchant.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
6503363 System for reducing wafer contamination using freshly, conditioned alkaline etching solution Jan. 7, 2003
6497238 Method of manufacturing electronic devices and apparatus for carrying out such a method Dec. 24, 2002
6472331 Method and apparatus for measuring and dispensing a wafer etchant Oct. 29, 2002
6398904 Wet etching system for manufacturing semiconductor devices Jun. 4, 2002
6333275 Etchant mixing system for edge bevel removal of copper from silicon wafers Dec. 25, 2001
6299723 Anti-airlock apparatus for filters Oct. 9, 2001
6235641 Method and system to control the concentration of dissolved gas in a liquid May. 22, 2001
6207068 Silicon nitride etch bath system Mar. 27, 2001
6200414 Circulation system for supplying chemical for manufacturing semiconductor devices and circulating method thereof Mar. 13, 2001
6086778 Muffle etch injector assembly Jul. 11, 2000
6071374 Apparatus for etching glass substrate Jun. 6, 2000
6039835 Etching apparatus and method of etching a substrate Mar. 21, 2000
6033989 Device for and method of concentrating chemical substances for semiconductor fabrication Mar. 7, 2000
6017827 System and method for mixing a gas into a solvent used in semiconductor processing Jan. 25, 2000
6001215 Semiconductor nitride film etching system Dec. 14, 1999
6001216 Apparatus and methods for rerecirculating etching solution during semiconductor wafer processing Dec. 14, 1999
5932061 Board Level Decapsulator Aug. 3, 1999
5916824 Etching method of silicon wafer surface and etching apparatus of the same Jun. 29, 1999
5888344 Method of and an apparatus for processing a substrate Mar. 30, 1999
5885403 System for cleaning and etching Mar. 23, 1999
5868898 Fluid dispensing device for wet chemical process tank and method of using Feb. 9, 1999
5855727 Decapsulator for decapsulating small plastic encapsulated device packages Jan. 5, 1999
5804516 Wet processing tank equipped with rapid drain and rinse system Sep. 8, 1998
5783098 Decapsulator and method for decapsulating plastic encapsulated device Jul. 21, 1998
5766496 Decapsulator and method for decapsulating plastic encapsulated device Jun. 16, 1998
5753135 Apparatus and method for recovering photoresist developers and strippers May. 19, 1998
5674410 Chemical agent producing device and method thereof Oct. 7, 1997
5665200 Substrate processing method and substrate processing apparatus Sep. 9, 1997
5560838 Process and apparatus for converting spent etchants Oct. 1, 1996
5435885 Apparatus and method for fluid processing of electronic packaging with flow pattern change Jul. 25, 1995
5376214 Etching device Dec. 27, 1994
5364494 Metal die acid etch apparatus and process Nov. 15, 1994
5282923 Liquid agitation and purification system Feb. 1, 1994
5275691 Method for treating a surface of an aluminum substrate for a printing plate Jan. 4, 1994
5275690 Method and apparatus for wet chemical processing of semiconductor wafers and other objects Jan. 4, 1994
5227010 Regeneration of ferric chloride etchants Jul. 13, 1993
5221421 Controlled etching process for forming fine-geometry circuit lines on a substrate Jun. 22, 1993
5188703 Method and apparatus for recovering copper and regenerating ammoniacal etchant from spent ammoniacal etchant Feb. 23, 1993
5188701 Method of fabricating semiconductor device Feb. 23, 1993
5167747 Apparatus for manufacturing interconnects with fine lines and fine spacing Dec. 1, 1992
5082523 Process of regenerating spent HF-HNO.sub.3 pickle acid containing (ZrF.sub.6.sup.-2 Jan. 21, 1992
5076886 Incremental tune etch apparatus and method Dec. 31, 1991
5076885 Process for etching workpieces Dec. 31, 1991
5049233 Recovery of sodium hydroxide and aluminum hydroxide from etching waste Sep. 17, 1991
5032218 Sulfuric acid reprocessor Jul. 16, 1991
5032204 Installation for etching objects Jul. 16, 1991
5030320 Chemical surface treatment apparatus and process Jul. 9, 1991
5021151 Plastic impeller pump and filtration unit for semi-conductor etching system Jun. 4, 1991
5019205 Apparatus for wet etching of thin films May. 28, 1991
5002649 Selective stripping apparatus Mar. 26, 1991

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