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Class Information
Number: 156/345.18
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With means to supply, remove, or recycle liquid etchant outside of etching tank or chamber (e.g., supply tanks or pipe network)
Description: Apparatus including means located outside an etching tank or chamber to supply etchant to the tank or chamber, to remove used etchant from the tank or chamber, or to recycle used etchant.










Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8607730 Method of replacing liquid of circulation line in substrate liquid processing apparatus of single-wafer type Dec. 17, 2013
8597461 Reduced isotropic etchant material consumption and waste generation Dec. 3, 2013
8545668 Substrate processing apparatus and substrate processing method Oct. 1, 2013
8541309 Processing assembly for semiconductor workpiece and methods of processing same Sep. 24, 2013
8419891 Semiconductor development apparatus and method using same Apr. 16, 2013
8419960 Plasma processing apparatus and method Apr. 16, 2013
8382902 Single disc vapor lubrication Feb. 26, 2013
8377251 Spin processing apparatus and spin processing method Feb. 19, 2013
8349725 Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and storage medium Jan. 8, 2013
8313609 Substrate processing apparatus and substrate processing method Nov. 20, 2012
8282766 Etch apparatus and method of etching silicon nitride Oct. 9, 2012
8206548 Substrate processing apparatus and substrate processing method Jun. 26, 2012
8052833 Chemical treatment apparatus Nov. 8, 2011
8043466 Etching apparatus Oct. 25, 2011
8043468 Apparatus for and method of processing substrate Oct. 25, 2011
8011317 Advanced mixing system for integrated tool having site-isolated reactors Sep. 6, 2011
7981286 Substrate processing apparatus and method of removing particles Jul. 19, 2011
7958898 Substrate processing apparatus Jun. 14, 2011
7959816 Wet-processing apparatus and method of fabricating display panel Jun. 14, 2011
7935642 Replenishment method for an advanced coating removal stripping solution May. 3, 2011
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7632376 Method and apparatus for atomic layer deposition (ALD) in a proximity system Dec. 15, 2009
7591922 Substrate processing apparatus and substrate processing method Sep. 22, 2009
7582181 Method and system for controlling a velocity field of a supercritical fluid in a processing system Sep. 1, 2009
7479205 Substrate processing apparatus Jan. 20, 2009
7476290 Substrate processing apparatus and substrate processing method Jan. 13, 2009
7387701 Etchant fume exhaust apparatus Jun. 17, 2008
7377991 Ultrasonic assisted etch using corrosive liquids May. 27, 2008
7332054 Etch apparatus Feb. 19, 2008
7267742 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Sep. 11, 2007
7169253 Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing Jan. 30, 2007
7156948 Wet etching apparatus Jan. 2, 2007
7001086 Developing method, substrate treating method, and substrate treating apparatus Feb. 21, 2006
6899111 Configurable single substrate wet-dry integrated cluster cleaner May. 31, 2005
6878232 Method and apparatus for improving a temperature controlled solution delivery process Apr. 12, 2005
6878303 Substrate processing apparatus and substrate processing method Apr. 12, 2005
6851435 Method and apparatus for localized liquid treatment of the surface of a substrate Feb. 8, 2005
6848457 Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment Feb. 1, 2005
6837943 Method and apparatus for cleaning a semiconductor substrate Jan. 4, 2005
6814835 Apparatus and method for supplying chemicals in chemical mechanical polishing systems Nov. 9, 2004
6780277 Etching method and etching apparatus Aug. 24, 2004
6758938 Delivery of dissolved ozone Jul. 6, 2004
6744212 Plasma processing apparatus and method for confining an RF plasma under very high gas flow and RF power density conditions Jun. 1, 2004
6733615 Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool May. 11, 2004
6712926 Recycling apparatus Mar. 30, 2004
6683009 Method for local etching Jan. 27, 2004
6660098 System for processing a workpiece Dec. 9, 2003
6649018 System for removal of photoresist using sparger Nov. 18, 2003
6630052 Apparatus for etching glass substrate Oct. 7, 2003
6592708 Filter apparatus and method therefor Jul. 15, 2003

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