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Class Information
Number: 156/345.17
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With measuring, sensing, detection or process control means > Liquid etchant spray means
Description: Apparatus including means to spray a liquid etchant upon the workpiece.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8685202 Etching device and method for manufacturing printed circuit board using same Apr. 1, 2014
8464734 Apparatus for wet processing substrate Jun. 18, 2013
8419891 Semiconductor development apparatus and method using same Apr. 16, 2013
8377252 Apparatus for spraying etchant onto printed circuit board Feb. 19, 2013
8277675 Method of damaged low-k dielectric film layer removal Oct. 2, 2012
8062471 Proximity head heating method and apparatus Nov. 22, 2011
8020570 Substrate processing apparatus and substrate processing method Sep. 20, 2011
7935217 Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate May. 3, 2011
7862680 Substrate processing apparatus Jan. 4, 2011
7862658 Etching and cleaning methods and etching and cleaning apparatuses used therefor Jan. 4, 2011
7850818 Method of manufacturing semiconductor device and cleaning apparatus Dec. 14, 2010
7767271 Method for producing a metallized image on a sheet material and device for carrying out said method Aug. 3, 2010
7758716 Apparatus for spraying etchant solution onto preformed printed circuit board Jul. 20, 2010
7722736 Apparatus for and method of processing a substrate with processing liquid May. 25, 2010
7635417 Semiconductor apparatus and cleaning unit thereof Dec. 22, 2009
7556711 Semiconductor device manufacturing apparatus and operating method thereof Jul. 7, 2009
7524396 Object processing apparatus and processing method Apr. 28, 2009
7488400 Apparatus for etching wafer by single-wafer process Feb. 10, 2009
7427333 Resist removing method and resist removing apparatus Sep. 23, 2008
7410908 Manufacturing method for a semiconductor device Aug. 12, 2008
7332055 Substrate processing apparatus Feb. 19, 2008
7332056 Thin film removing device and thin film removing method Feb. 19, 2008
7267742 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Sep. 11, 2007
7169253 Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing Jan. 30, 2007
7104476 Multi-sectored flat board type showerhead used in CVD apparatus Sep. 12, 2006
7105074 Substrate treating method and apparatus Sep. 12, 2006
7083700 Methods and apparatuses for planarizing microelectronic substrate assemblies Aug. 1, 2006
6932884 Substrate processing apparatus Aug. 23, 2005
6851435 Method and apparatus for localized liquid treatment of the surface of a substrate Feb. 8, 2005
6817369 Device and method for cleaning substrates Nov. 16, 2004
6805754 Device and method for processing substrates Oct. 19, 2004
6793764 Chemical dispensing system for semiconductor wafer processing Sep. 21, 2004
6706139 Method and apparatus for cleaning a web-based chemical mechanical planarization system Mar. 16, 2004
6592708 Filter apparatus and method therefor Jul. 15, 2003
6586342 Edge bevel removal of copper from silicon wafers Jul. 1, 2003
6537416 Wafer chuck for use in edge bevel removal of copper from silicon wafers Mar. 25, 2003
6503362 Atomizing nozzle an filter and spray generating device Jan. 7, 2003
6322626 Apparatus for controlling a temperature of a microelectronics substrate Nov. 27, 2001
5993681 Method and apparatus for aiming a spray etcher nozzle Nov. 30, 1999
5591299 System for providing integrated monitoring, control and diagnostics functions for semiconductor spray process tools Jan. 7, 1997
5456788 Method and apparatus for contactless real-time in-situ monitoring of a chemical etching process Oct. 10, 1995
5387313 Etchant control system Feb. 7, 1995
5290384 Apparatus for controlled spray etching Mar. 1, 1994
5244527 Manufacturing unit for semiconductor devices Sep. 14, 1993
5032217 System for treating a surface of a rotating wafer Jul. 16, 1991
5002627 Spray etching apparatus with automatic individually controllable etching jets Mar. 26, 1991
4741798 Installation for etching material May. 3, 1988
4397708 Etching and etchant removal apparatus Aug. 9, 1983
4344809 Jet etch apparatus for decapsulation of molded devices Aug. 17, 1982
4126510 Etching a succession of articles from a strip of sheet metal Nov. 21, 1978

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