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Class Information
Number: 156/345.15
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With measuring, sensing, detection or process control means
Description: Apparatus including means to measure, sense, or detect a process condition, or to automatically control the operation of the apparatus.










Sub-classes under this class:

Class Number Class Name Patents
156/345.17 Liquid etchant spray means 52
156/345.16 With endpoint detection means 41


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8651135 Mass flow controller, mass flow controller system, substrate processing device, and gas flow rate adjusting method Feb. 18, 2014
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8597461 Reduced isotropic etchant material consumption and waste generation Dec. 3, 2013
8464734 Apparatus for wet processing substrate Jun. 18, 2013
8460507 CMP sensor and control system Jun. 11, 2013
8430991 Apparatus for producing near field optical head Apr. 30, 2013
8398811 Polishing apparatus and polishing method Mar. 19, 2013
8298369 Liquid supply method, liquid supply apparatus, substrate polishing apparatus, and method of measuring supply flow rate of liquid Oct. 30, 2012
8282766 Etch apparatus and method of etching silicon nitride Oct. 9, 2012
8262845 Processing systems and methods for semiconductor devices Sep. 11, 2012
8216417 Substrate treating apparatus and substrate treating method Jul. 10, 2012
8070972 Etching method and etching apparatus Dec. 6, 2011
8070909 Feedback control of chemical mechanical polishing device providing manipulation of removal rate profiles Dec. 6, 2011
8052834 Substrate treating system, substrate treating device, program, and recording medium Nov. 8, 2011
7959816 Wet-processing apparatus and method of fabricating display panel Jun. 14, 2011
7935217 Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate May. 3, 2011
7867355 Adjustable height PIF probe Jan. 11, 2011
7850818 Method of manufacturing semiconductor device and cleaning apparatus Dec. 14, 2010
7829852 Device having etched feature with shrinkage carryover Nov. 9, 2010
7799166 Wafer edge expose alignment method Sep. 21, 2010
7666479 Apparatus and method of gas injection sequencing Feb. 23, 2010
7659212 Process control method in spin etching and spin etching apparatus Feb. 9, 2010
7647886 Systems for depositing material onto workpieces in reaction chambers and methods for removing byproducts from reaction chambers Jan. 19, 2010
7632376 Method and apparatus for atomic layer deposition (ALD) in a proximity system Dec. 15, 2009
7628860 Pulsed mass flow delivery system and method Dec. 8, 2009
7628861 Pulsed mass flow delivery system and method Dec. 8, 2009
7615120 Pulsed mass flow delivery system and method Nov. 10, 2009
7541094 Firepolished quartz parts for use in semiconductor processing Jun. 2, 2009
7520956 On-wafer monitoring system Apr. 21, 2009
7427333 Resist removing method and resist removing apparatus Sep. 23, 2008
7341502 Methods and systems for planarizing workpieces, e.g., microelectronic workpieces Mar. 11, 2008
7267742 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Sep. 11, 2007
7169253 Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing Jan. 30, 2007
7128803 Integration of sensor based metrology into semiconductor processing tools Oct. 31, 2006
7102763 Methods and apparatus for processing microelectronic workpieces using metrology Sep. 5, 2006
7081182 Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process Jul. 25, 2006
7052575 System and method for active control of etch process May. 30, 2006
7014732 Etching apparatus Mar. 21, 2006
6955764 Method and apparatus for preparing slurry for CMP apparatus Oct. 18, 2005
6932884 Substrate processing apparatus Aug. 23, 2005
6884149 Method and system for in-situ monitoring of mixing ratio of high selectivity slurry Apr. 26, 2005
6878232 Method and apparatus for improving a temperature controlled solution delivery process Apr. 12, 2005
6878303 Substrate processing apparatus and substrate processing method Apr. 12, 2005
6875306 Vacuum processing device Apr. 5, 2005
6869498 Chemical mechanical polishing with shear force measurement Mar. 22, 2005
6863772 Dual-port end point window for plasma etcher Mar. 8, 2005
6821792 Method and apparatus for determining a sampling plan based on process and equipment state information Nov. 23, 2004
6817369 Device and method for cleaning substrates Nov. 16, 2004
6805754 Device and method for processing substrates Oct. 19, 2004
6790287 Substrate processing apparatus, substrate inspection method and substrate processing system Sep. 14, 2004

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