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Class Information
Number: 156/345.14
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With mechanical polishing (i.e., cmp-chemical mechanical polishing) > With wafer retaining ring
Description: Apparatus including a ring-shaped member for securing a disk-shaped workpiece against movement while the workpiece is etched.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8486220 Method of assembly of retaining ring for CMP Jul. 16, 2013
8470125 Multilayer retaining ring for chemical mechanical polishing Jun. 25, 2013
8342119 Self aligning non contact shadow ring process kit Jan. 1, 2013
8276604 Peripherally engaging electrode carriers and assemblies incorporating the same Oct. 2, 2012
8029640 Multilayer retaining ring for chemical mechanical polishing Oct. 4, 2011
7632378 Polishing apparatus Dec. 15, 2009
7622016 Retainer ring of chemical mechanical polishing device Nov. 24, 2009
7527694 Substrate gripping apparatus May. 5, 2009
7520955 Carrier head with a multilayer retaining ring for chemical mechanical polishing Apr. 21, 2009
7459057 Substrate retainer Dec. 2, 2008
7326103 Vertically adjustable chemical mechanical polishing head and method for use thereof Feb. 5, 2008
7258595 Polishing apparatus Aug. 21, 2007
7104476 Multi-sectored flat board type showerhead used in CVD apparatus Sep. 12, 2006
7055535 Holding unit, processing apparatus and holding method of substrates Jun. 6, 2006
6913669 Retaining ring for holding semiconductor wafers in a chemical mechanical polishing apparatus Jul. 5, 2005
6890402 Substrate holding apparatus and substrate polishing apparatus May. 10, 2005
6886442 Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same May. 3, 2005
6863771 Differential pressure application apparatus for use in polishing layers of semiconductor device structures and methods Mar. 8, 2005
6828243 Apparatus and method for plasma treatment Dec. 7, 2004
6786996 Apparatus and method for edge bead removal Sep. 7, 2004
6776870 Ditch type floating ring for chemical mechanical polishing Aug. 17, 2004
6758939 Laminated wear ring Jul. 6, 2004
6746565 Semiconductor processor with wafer face protection Jun. 8, 2004
6733615 Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool May. 11, 2004
6733616 Surface isolation device May. 11, 2004
6719874 Active retaining ring support Apr. 13, 2004
6716299 Profiled retaining ring for chemical mechanical planarization Apr. 6, 2004
6712111 Bonding method and apparatus Mar. 30, 2004
6627098 Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies Sep. 30, 2003
6602116 Substrate retaining ring Aug. 5, 2003
6565705 Wafer carrier used for chemical mechanic polishing May. 20, 2003
6554954 Conductive collar surrounding semiconductor workpiece in plasma chamber Apr. 29, 2003
6514424 Process for the double-side polishing of semiconductor wafers and carrier for carrying out the process Feb. 4, 2003
6432258 Apparatus for and method of polishing workpiece Aug. 13, 2002
6350346 Apparatus for polishing workpiece Feb. 26, 2002
6251215 Carrier head with a multilayer retaining ring for chemical mechanical polishing Jun. 26, 2001
6245193 Chemical mechanical polishing apparatus improved substrate carrier head and method of use Jun. 12, 2001
6242353 Wafer holding head and wafer polishing apparatus, and method for manufacturing wafers Jun. 5, 2001
6227955 Carrier heads, planarizing machines and methods for mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies May. 8, 2001
6224712 Polishing apparatus May. 1, 2001
6179956 Method and apparatus for using across wafer back pressure differentials to influence the performance of chemical mechanical polishing Jan. 30, 2001
6168684 Wafer polishing apparatus and polishing method Jan. 2, 2001
6143127 Carrier head with a retaining ring for a chemical mechanical polishing system Nov. 7, 2000
6116992 Substrate retaining ring Sep. 12, 2000
6106379 Semiconductor wafer carrier with automatic ring extension Aug. 22, 2000
6077385 Polishing apparatus Jun. 20, 2000
6042688 Carrier for double-side polishing Mar. 28, 2000
6033520 Apparatus for and method of polishing workpiece Mar. 7, 2000
6030488 Chemical and mechanical polishing apparatus Feb. 29, 2000
6030487 Wafer carrier assembly Feb. 29, 2000

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