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Class Information
Number: 156/345.12
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant > With mechanical polishing (i.e., cmp-chemical mechanical polishing)
Description: Apparatus including means for carrying out combined chemical etching and mechanical abrading to polish a workpiece.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7622016 |
Retainer ring of chemical mechanical polishing device |
Nov. 24, 2009 |
| 7585425 |
Apparatus and method for reducing removal forces for CMP pads |
Sep. 8, 2009 |
| 7541094 |
Firepolished quartz parts for use in semiconductor processing |
Jun. 2, 2009 |
| 7527694 |
Substrate gripping apparatus |
May. 5, 2009 |
| 7479206 |
Apparatus for in-situ optical endpointing on web-format planarizing machines in mechanical or chemical-mechanical planarization of microelectronic-device substrate assemblies |
Jan. 20, 2009 |
| 7459056 |
Pad conditioning head for CMP process |
Dec. 2, 2008 |
| 7452814 |
Method of polishing GaN substrate |
Nov. 18, 2008 |
| 7435162 |
Polishing fluids and methods for CMP |
Oct. 14, 2008 |
| 7402521 |
Method for chemically mechanically polishing organic film, method of manufacturing semiconductor device, and program therefor |
Jul. 22, 2008 |
| 7396430 |
Apparatus and method for confined area planarization |
Jul. 8, 2008 |
| 7288165 |
Pad conditioning head for CMP process |
Oct. 30, 2007 |
| 7270597 |
Method and system for chemical mechanical polishing pad cleaning |
Sep. 18, 2007 |
| 7255771 |
Multiple zone carrier head with flexible membrane |
Aug. 14, 2007 |
| 7252736 |
Compliant grinding wheel |
Aug. 7, 2007 |
| 7198560 |
Wafer planarization composition and method of use |
Apr. 3, 2007 |
| 7166017 |
Slurry for CMP, polishing method and method of manufacturing semiconductor device |
Jan. 23, 2007 |
| 7156947 |
Energy enhanced surface planarization |
Jan. 2, 2007 |
| 7156946 |
Wafer carrier pivot mechanism |
Jan. 2, 2007 |
| 7153197 |
Method for achieving uniform CU CMP polishing |
Dec. 26, 2006 |
| 7139641 |
Wafer protection system |
Nov. 21, 2006 |
| 7132035 |
Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes |
Nov. 7, 2006 |
| 7101259 |
Polishing method and apparatus |
Sep. 5, 2006 |
| 7083700 |
Methods and apparatuses for planarizing microelectronic substrate assemblies |
Aug. 1, 2006 |
| 7081182 |
Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing process |
Jul. 25, 2006 |
| 7077727 |
Process for chemical-mechanical polishing of metal substrates |
Jul. 18, 2006 |
| 7077725 |
Advanced electrolytic polish (AEP) assisted metal wafer planarization method and apparatus |
Jul. 18, 2006 |
| 7070659 |
System for filling openings in semiconductor products |
Jul. 4, 2006 |
| 7052375 |
Method of making carrier head backing plate having low-friction coating |
May. 30, 2006 |
| 7037403 |
In-situ real-time monitoring technique and apparatus for detection of thin films during chemical/mechanical polishing planarization |
May. 2, 2006 |
| 7025854 |
Method and apparatus for aligning and setting the axis of rotation of spindles of a multi-body system |
Apr. 11, 2006 |
| 7004814 |
CMP process control method |
Feb. 28, 2006 |
| 6997785 |
Wafer planarization composition and method of use |
Feb. 14, 2006 |
| 6994611 |
Method and system for cleaning a chemical mechanical polishing pad |
Feb. 7, 2006 |
| 6992007 |
Method of cleaning damascene structure of semiconductor wafer during fabrication of semiconductor device |
Jan. 31, 2006 |
| 6936133 |
Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool |
Aug. 30, 2005 |
| 6921455 |
Device for polishing outer peripheral edge of semiconductor wafer |
Jul. 26, 2005 |
| 6896776 |
Method and apparatus for electro-chemical processing |
May. 24, 2005 |
| 6887338 |
300 mm platen and belt configuration |
May. 3, 2005 |
| 6886442 |
Punching apparatus for backing-films of CMP machines and preventive maintenance method for the same |
May. 3, 2005 |
| 6887358 |
Installation for processing wafers |
May. 3, 2005 |
| 6872280 |
Slurry collection device and method |
Mar. 29, 2005 |
| 6869498 |
Chemical mechanical polishing with shear force measurement |
Mar. 22, 2005 |
| 6867138 |
Method of chemical/mechanical polishing of the surface of semiconductor device |
Mar. 15, 2005 |
| 6863770 |
Method and apparatus for polishing a substrate while washing a polishing pad of the apparatus with at least one free-flowing vertical stream of liquid |
Mar. 8, 2005 |
| 6857940 |
Polishing apparatus and method |
Feb. 22, 2005 |
| 6849152 |
In-situ real-time monitoring technique and apparatus for endpoint detection of thin films during chemical/mechanical polishing planarization |
Feb. 1, 2005 |
| 6837781 |
Polishing pad |
Jan. 4, 2005 |
| 6833046 |
Planarizing machines and methods for mechanical and/or chemical-mechanical planarization of microelectronic-device substrate assemblies |
Dec. 21, 2004 |
| 6827814 |
Processing apparatus, processing system and processing method |
Dec. 7, 2004 |
| 6818095 |
Chemical mechanical polishing apparatus |
Nov. 16, 2004 |
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