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Class Information
Number: 156/345.11
Name: Adhesive bonding and miscellaneous chemical manufacture > Differential fluid etching apparatus > For liquid etchant
Description: Apparatus including means for etching a workpiece with a liquid etchant.

Sub-classes under this class:

Class Number Class Name Patents
156/345.21 Liquid etchant spray type 108
156/345.2 Running length workpiece (e.g., etching indeterminate length strip) 46
156/345.18 With means to supply, remove, or recycle liquid etchant outside of etching tank or chamber (e.g., supply tanks or pipe network) 132
156/345.15 With measuring, sensing, detection or process control means 115
156/345.19 With mechanical mask or shield or shutter for shielding workpiece 38
156/345.12 With mechanical polishing (i.e., cmp-chemical mechanical polishing) 264
156/345.22 With plural etching zones for a single discrete workpiece in apparatus 81
156/345.23 With specified workpiece support 139

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8685202 Etching device and method for manufacturing printed circuit board using same Apr. 1, 2014
8673110 Solution supplying unit and substrate treating apparatus having the same Mar. 18, 2014
8636915 Liquid processing apparatus and liquid processing method Jan. 28, 2014
8591697 Transmission electron microscopy sample etching fixture Nov. 26, 2013
8500907 Masking system for the masking of a cylinder bore Aug. 6, 2013
8419891 Semiconductor development apparatus and method using same Apr. 16, 2013
8377251 Spin processing apparatus and spin processing method Feb. 19, 2013
8282766 Etch apparatus and method of etching silicon nitride Oct. 9, 2012
8277602 Apparatus and method for the wet chemical treatment of a product and method for installing a flow member into the apparatus Oct. 2, 2012
8257600 Printed masking process Sep. 4, 2012
8123901 Etching apparatus Feb. 28, 2012
8052833 Chemical treatment apparatus Nov. 8, 2011
8053371 Apparatus and methods for selective removal of material from wafer alignment marks Nov. 8, 2011
8043468 Apparatus for and method of processing substrate Oct. 25, 2011
7998306 Substrate processing apparatus Aug. 16, 2011
7959816 Wet-processing apparatus and method of fabricating display panel Jun. 14, 2011
7807017 Etching apparatus for substrates Oct. 5, 2010
7790048 Treatment of the working layer of a multilayer structure Sep. 7, 2010
7767271 Method for producing a metallized image on a sheet material and device for carrying out said method Aug. 3, 2010
7758717 Wafer treating apparatus Jul. 20, 2010
7754623 Apparatus for forming film hole Jul. 13, 2010
7730898 Semiconductor wafer lifter Jun. 8, 2010
7582180 Systems and methods for processing microfeature workpieces Sep. 1, 2009
7566378 Arrangement of electronic semiconductor components on a carrier system for treating said semiconductor components with a liquid medium Jul. 28, 2009
7556711 Semiconductor device manufacturing apparatus and operating method thereof Jul. 7, 2009
7531060 Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces May. 12, 2009
7527743 Apparatus and method for etching insulating film May. 5, 2009
7524396 Object processing apparatus and processing method Apr. 28, 2009
7510974 CMP process Mar. 31, 2009
7494597 Method and apparatus for etching disk-like member Feb. 24, 2009
7479205 Substrate processing apparatus Jan. 20, 2009
7476290 Substrate processing apparatus and substrate processing method Jan. 13, 2009
7470344 Chemical dispensing system for semiconductor wafer processing Dec. 30, 2008
7427333 Resist removing method and resist removing apparatus Sep. 23, 2008
7399713 Selective treatment of microelectric workpiece surfaces Jul. 15, 2008
7393431 Bubble plate for etching and etching apparatus using the same Jul. 1, 2008
7377991 Ultrasonic assisted etch using corrosive liquids May. 27, 2008
7332054 Etch apparatus Feb. 19, 2008
7267742 Etching apparatus, a method of controlling an etching solution, and a method of manufacturing a semiconductor device Sep. 11, 2007
7229521 Etching system using a deionized water adding device Jun. 12, 2007
7189305 Gas-assist systems for applying and moving ozonated resist stripper to resist-bearing surfaces of substrates Mar. 13, 2007
7172674 Device for liquid treatment of wafer-shaped articles Feb. 6, 2007
7169253 Process sequence for photoresist stripping and/or cleaning of photomasks for integrated circuit manufacturing Jan. 30, 2007
7166183 Apparatus and method for treating edge of substrate Jan. 23, 2007
7132034 Apparatus for etching a glass substrate Nov. 7, 2006
7097784 Etching method and apparatus for semiconductor wafers Aug. 29, 2006
7091132 Ultrasonic assisted etch using corrosive liquids Aug. 15, 2006
7077727 Process for chemical-mechanical polishing of metal substrates Jul. 18, 2006
7067033 Chemical liquid processing apparatus for processing a substrate Jun. 27, 2006
7048824 Device for treating silicon wafers May. 23, 2006

1 2 3 4

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