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Class Information
Number: 15/88.3
Name: Brushing, scrubbing, and general cleaning > Machines > Brushing > Work moves past rotatable brush > Cylindrical brush
Description: Subject matter wherein the working surface of the brush coincides with a surface of revolution generated by the rotation of a straight line about an axis parallel thereto.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7395573 |
Dust remover and dust removal method |
Jul. 8, 2008 |
| 7383601 |
Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same |
Jun. 10, 2008 |
| 7377002 |
Scrubber box |
May. 27, 2008 |
| 7353560 |
Proximity brush unit apparatus and method |
Apr. 8, 2008 |
| 7325268 |
Wheel cleaner apparatus |
Feb. 5, 2008 |
| 7302727 |
Pressed powder pan cleaning machine |
Dec. 4, 2007 |
| 7231682 |
Method and apparatus for simultaneously cleaning the front side and back side of a wafer |
Jun. 19, 2007 |
| 7232493 |
Glass washing machine with conveyor and brush speed control |
Jun. 19, 2007 |
| 7229504 |
Methods and apparatus for determining scrubber brush pressure |
Jun. 12, 2007 |
| 7176676 |
Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece |
Feb. 13, 2007 |
| 7162765 |
Seal system for irrigated scrubber mandrel assembly |
Jan. 16, 2007 |
| 7160172 |
Multi-station disk finishing apparatus and method |
Jan. 9, 2007 |
| 7137164 |
Glass washing machine with broken glass removal system |
Nov. 21, 2006 |
| 7030603 |
Apparatuses and methods for monitoring rotation of a conductive microfeature workpiece |
Apr. 18, 2006 |
| 7007333 |
System and method for a combined contact and non-contact wafer cleaning module |
Mar. 7, 2006 |
| 6986185 |
Methods and apparatus for determining scrubber brush pressure |
Jan. 17, 2006 |
| 6942737 |
Substrate cleaning apparatus and method |
Sep. 13, 2005 |
| 6907637 |
Edge wheel assembly in a substrate processing brush box |
Jun. 21, 2005 |
| 6865764 |
Fixture for assembling a post-CMP cleaning brush |
Mar. 15, 2005 |
| 6851151 |
Brush drive assembly in a substrate processing brush box |
Feb. 8, 2005 |
| 6851436 |
Substrate processing using a fluid re-circulation system in a wafer scrubbing system |
Feb. 8, 2005 |
| 6851152 |
Substrate cleaning apparatus |
Feb. 8, 2005 |
| 6820298 |
Wafer scrubbing device having brush assembly and mounting assembly forming spherical joint |
Nov. 23, 2004 |
| 6813796 |
Apparatus and methods to clean copper contamination on wafer edge |
Nov. 9, 2004 |
| 6810548 |
Cleaning apparatus |
Nov. 2, 2004 |
| 6804851 |
Holder for semiconductor wafers in a brush-cleaning installation |
Oct. 19, 2004 |
| 6740170 |
Apparatus and method for cleaning peripheral part of substrate |
May. 25, 2004 |
| 6739013 |
Wafer cleaning apparatus |
May. 25, 2004 |
| 6733596 |
Substrate cleaning brush preparation sequence, method, and system |
May. 11, 2004 |
| 6728989 |
Labyrinth seal for bearing in brush mounting assembly for semiconductor wafer scrubber |
May. 4, 2004 |
| 6711775 |
System for cleaning a semiconductor wafer |
Mar. 30, 2004 |
| 6676493 |
Integrated planarization and clean wafer processing system |
Jan. 13, 2004 |
| 6671917 |
Wheel cleaning apparatus |
Jan. 6, 2004 |
| 6643882 |
Substrate cleaning apparatus |
Nov. 11, 2003 |
| 6625836 |
Apparatus and method for cleaning substrate |
Sep. 30, 2003 |
| 6625835 |
Disk cascade scrubber |
Sep. 30, 2003 |
| 6622335 |
Drip manifold for uniform chemical delivery |
Sep. 23, 2003 |
| 6622334 |
Wafer edge cleaning utilizing polish pad material |
Sep. 23, 2003 |
| 6618889 |
Disk-shaped workpiece washing apparatus |
Sep. 16, 2003 |
| 6620242 |
Device for applying and/or spreading liquid or pasty substances for coating surfaces |
Sep. 16, 2003 |
| 6615433 |
Apparatus for detecting wetness of a semiconductor wafer cleaning brush |
Sep. 9, 2003 |
| 6594846 |
Poultry cone cleaning device |
Jul. 22, 2003 |
| 6594847 |
Single wafer residue, thin film removal and clean |
Jul. 22, 2003 |
| 6588043 |
Wafer cascade scrubber |
Jul. 8, 2003 |
| 6585826 |
Semiconductor wafer cleaning method to remove residual contamination including metal nitride particles |
Jul. 1, 2003 |
| 6578227 |
Pad for use in a critical environment |
Jun. 17, 2003 |
| 6575177 |
Semiconductor substrate cleaning system |
Jun. 10, 2003 |
| 6572710 |
Brush force control method for a substrate cleaning apparatus |
Jun. 3, 2003 |
| 6560809 |
Substrate cleaning apparatus |
May. 13, 2003 |
| 6557202 |
Wafer scrubbing brush core having an internal motor and method of making the same |
May. 6, 2003 |
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