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Class Information
Number: 15/102
Name: Brushing, scrubbing, and general cleaning > Machines > Wiping > Sheet, bar, and plate cleaners
Description: Cleaning-machines in which the cleaning instrument is a wiper as distinguished from a brush, broom, or scraper and which are especially adapted for cleaning articles or materials in sheet, bar or plate form.










Patents under this class:
1 2 3 4 5 6 7 8

Patent Number Title Of Patent Date Issued
6418584 Apparatus and process for cleaning a work piece Jul. 16, 2002
6412134 Cleaning device and substrate cleaning apparatus Jul. 2, 2002
6401287 System for cleaning a web substrate Jun. 11, 2002
6402851 Lanthanide oxide dissolution from glass surface Jun. 11, 2002
6378154 Web cleaning system Apr. 30, 2002
6379469 Apparatus and method for washing substrate Apr. 30, 2002
6379468 Method for cleaning thin metal strip material Apr. 30, 2002
6357071 Rotating belt wafer edge cleaning apparatus Mar. 19, 2002
6352596 Post CMP cleaning method using a brush cleaner with torque monitor Mar. 5, 2002
6345404 Wafer cleaning apparatus Feb. 12, 2002
6334230 Wafer cleaning apparatus Jan. 1, 2002
6334229 Apparatus for cleaning edges of contaminated substrates Jan. 1, 2002
6330729 Brush alignment platform Dec. 18, 2001
6324715 Apparatus for cleaning semiconductor substrates Dec. 4, 2001
6319330 Method and apparatus for cleaning low K dielectric and metal wafer surfaces Nov. 20, 2001
6308369 Wafer cleaning system Oct. 30, 2001
6308361 Cleaning apparatus Oct. 30, 2001
6299698 Wafer edge scrubber and method Oct. 9, 2001
6295684 Apparatus for cleaning laminated sheets Oct. 2, 2001
6296034 Image-forming material removing apparatus Oct. 2, 2001
6292972 Scrub washing apparatus and scrub washing method Sep. 25, 2001
6290780 Method and apparatus for processing a wafer Sep. 18, 2001
6286170 Apparatus for cleaning photo film Sep. 11, 2001
6286525 Substrate cleaning apparatus and method Sep. 11, 2001
6282744 Electrostatographic imaging web cleaning systems Sep. 4, 2001
6277203 Method and apparatus for cleaning low K dielectric and metal wafer surfaces Aug. 21, 2001
6273100 Surface cleaning apparatus and method Aug. 14, 2001
6272712 Brush box containment apparatus Aug. 14, 2001
6269510 Post CMP clean brush with torque monitor Aug. 7, 2001
6261378 Substrate cleaning unit and cleaning method Jul. 17, 2001
6261377 Method of removing particles and a liquid from a surface of substrate Jul. 17, 2001
6248180 Method for removing particles from a semiconductor wafer Jun. 19, 2001
6247197 Brush interflow distributor Jun. 19, 2001
6243904 Apparatus for cleaning photo film Jun. 12, 2001
6240588 Wafer scrubbing brush core Jun. 5, 2001
6237176 Substrate or sheet surface cleaning apparatus May. 29, 2001
6236831 Method and apparatus of recycling office paper May. 22, 2001
6231681 Method of cleaning photo film May. 15, 2001
6230753 Wafer cleaning apparatus May. 15, 2001
6200392 Sheet cleaning apparatus with cartridge roller assembly and method of use Mar. 13, 2001
6199238 Machine for cleaning compact disc Mar. 13, 2001
6189173 Device for removing a substance deposited on a sheet Feb. 20, 2001
6185777 Systems and methods for cleaning Feb. 13, 2001
6178580 Processing apparatus Jan. 30, 2001
6175983 Substrate washing apparatus and method Jan. 23, 2001
6173468 Apparatus for washing both surfaces of a substrate Jan. 16, 2001
6170110 Apparatus for HF-HF cleaning Jan. 9, 2001
6167583 Double side cleaning apparatus for semiconductor substrate Jan. 2, 2001
6163916 Cleaning apparatus for disk-shaped workpieces Dec. 26, 2000
6158075 Apparatus and method for washing substrate Dec. 12, 2000

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