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Class Information
Number: 15/102
Name: Brushing, scrubbing, and general cleaning > Machines > Wiping > Sheet, bar, and plate cleaners
Description: Cleaning-machines in which the cleaning instrument is a wiper as distinguished from a brush, broom, or scraper and which are especially adapted for cleaning articles or materials in sheet, bar or plate form.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6352596 |
Post CMP cleaning method using a brush cleaner with torque monitor |
Mar. 5, 2002 |
| 6345404 |
Wafer cleaning apparatus |
Feb. 12, 2002 |
| 6334230 |
Wafer cleaning apparatus |
Jan. 1, 2002 |
| 6334229 |
Apparatus for cleaning edges of contaminated substrates |
Jan. 1, 2002 |
| 6330729 |
Brush alignment platform |
Dec. 18, 2001 |
| 6324715 |
Apparatus for cleaning semiconductor substrates |
Dec. 4, 2001 |
| 6319330 |
Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
Nov. 20, 2001 |
| 6308369 |
Wafer cleaning system |
Oct. 30, 2001 |
| 6308361 |
Cleaning apparatus |
Oct. 30, 2001 |
| 6299698 |
Wafer edge scrubber and method |
Oct. 9, 2001 |
| 6296034 |
Image-forming material removing apparatus |
Oct. 2, 2001 |
| 6295684 |
Apparatus for cleaning laminated sheets |
Oct. 2, 2001 |
| 6292972 |
Scrub washing apparatus and scrub washing method |
Sep. 25, 2001 |
| 6290780 |
Method and apparatus for processing a wafer |
Sep. 18, 2001 |
| 6286525 |
Substrate cleaning apparatus and method |
Sep. 11, 2001 |
| 6286170 |
Apparatus for cleaning photo film |
Sep. 11, 2001 |
| 6282744 |
Electrostatographic imaging web cleaning systems |
Sep. 4, 2001 |
| 6277203 |
Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
Aug. 21, 2001 |
| 6272712 |
Brush box containment apparatus |
Aug. 14, 2001 |
| 6273100 |
Surface cleaning apparatus and method |
Aug. 14, 2001 |
| 6269510 |
Post CMP clean brush with torque monitor |
Aug. 7, 2001 |
| 6261377 |
Method of removing particles and a liquid from a surface of substrate |
Jul. 17, 2001 |
| 6261378 |
Substrate cleaning unit and cleaning method |
Jul. 17, 2001 |
| 6248180 |
Method for removing particles from a semiconductor wafer |
Jun. 19, 2001 |
| 6247197 |
Brush interflow distributor |
Jun. 19, 2001 |
| 6243904 |
Apparatus for cleaning photo film |
Jun. 12, 2001 |
| 6240588 |
Wafer scrubbing brush core |
Jun. 5, 2001 |
| 6237176 |
Substrate or sheet surface cleaning apparatus |
May. 29, 2001 |
| 6236831 |
Method and apparatus of recycling office paper |
May. 22, 2001 |
| 6230753 |
Wafer cleaning apparatus |
May. 15, 2001 |
| 6231681 |
Method of cleaning photo film |
May. 15, 2001 |
| 6200392 |
Sheet cleaning apparatus with cartridge roller assembly and method of use |
Mar. 13, 2001 |
| 6199238 |
Machine for cleaning compact disc |
Mar. 13, 2001 |
| 6189173 |
Device for removing a substance deposited on a sheet |
Feb. 20, 2001 |
| 6185777 |
Systems and methods for cleaning |
Feb. 13, 2001 |
| 6178580 |
Processing apparatus |
Jan. 30, 2001 |
| 6175983 |
Substrate washing apparatus and method |
Jan. 23, 2001 |
| 6173468 |
Apparatus for washing both surfaces of a substrate |
Jan. 16, 2001 |
| 6170110 |
Apparatus for HF-HF cleaning |
Jan. 9, 2001 |
| 6167583 |
Double side cleaning apparatus for semiconductor substrate |
Jan. 2, 2001 |
| 6163916 |
Cleaning apparatus for disk-shaped workpieces |
Dec. 26, 2000 |
| 6158075 |
Apparatus and method for washing substrate |
Dec. 12, 2000 |
| 6156127 |
Method and apparatus for removing image forming substance from image holding member |
Dec. 5, 2000 |
| 6148463 |
Cleaning apparatus |
Nov. 21, 2000 |
| 6150066 |
Method and apparatus for repetitively using a toner image carrier sheet |
Nov. 21, 2000 |
| 6145148 |
Method and apparatus for cleaning of semiconductor substrates using hydrofluoric acid (HF) |
Nov. 14, 2000 |
| 6141812 |
Cleaning apparatus and cleaning member rinsing apparatus |
Nov. 7, 2000 |
| 6128464 |
Apparatus for removing printing material from a recording member on which an image is recorded by the printing material |
Oct. 3, 2000 |
| 6125496 |
Pad and roller assembly for cleaning semiconductor wafers |
Oct. 3, 2000 |
| 6120864 |
Anti-static roll cover |
Sep. 19, 2000 |
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