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Class Information
Number: 148/DIG.60
Name: Metal treatment > Gettering
Description:










Patents under this class:
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Patent Number Title Of Patent Date Issued
6372611 Semiconductor manufacturing method including gettering of metal impurities Apr. 16, 2002
6287478 Optical window Sep. 11, 2001
6277297 Optical window composition Aug. 21, 2001
6133123 Fabrication of semiconductor gettering structures by ion implantation Oct. 17, 2000
6117749 Modification of interfacial fields between dielectrics and semiconductors Sep. 12, 2000
6048778 Gettering regions and methods of forming gettering regions within a semiconductor wafer Apr. 11, 2000
5998283 Silicon wafer having plasma CVD gettering layer with components/composition changing in depth-wise direction and method of manufacturing the silicon wafer Dec. 7, 1999
5976956 Method of controlling dopant concentrations using transient-enhanced diffusion prior to gate formation in a device Nov. 2, 1999
5950077 Semiconductor device and manufacturing method thereof Sep. 7, 1999
5894037 Silicon semiconductor substrate and method of fabricating the same Apr. 13, 1999
5882989 Process for the preparation of silicon wafers having a controlled distribution of oxygen precipitate nucleation centers Mar. 16, 1999
5830802 Process for reducing halogen concentration in a material layer during semiconductor device fabrication Nov. 3, 1998
5773356 Gettering regions and methods of forming gettering regions within a semiconductor wafer Jun. 30, 1998
5738942 Semiconductor silicon wafer and process for producing it Apr. 14, 1998
5580792 Method of removing a catalyst substance from the channel region of a TFT after crystallization Dec. 3, 1996
5534112 Method for testing electrical properties of silicon single crystal Jul. 9, 1996
5529937 Process for fabricating thin film transistor Jun. 25, 1996
5445975 Semiconductor wafer with enhanced pre-process denudation and process-induced gettering Aug. 29, 1995
5405803 Method of manufacturing a semiconductor device Apr. 11, 1995
5389551 Method of manufacturing a semiconductor substrate Feb. 14, 1995
5360748 Method of manufacturing a semiconductor device Nov. 1, 1994
5352615 Denuding a semiconductor substrate Oct. 4, 1994
5286658 Process for producing semiconductor device Feb. 15, 1994
5244819 Method to getter contamination in semiconductor devices Sep. 14, 1993
5227314 Method of making metal conductors having a mobile inn getterer therein Jul. 13, 1993
5225355 Gettering treatment process Jul. 6, 1993
5194395 Method of producing a substrate having semiconductor-on-insulator structure with gettering sites Mar. 16, 1993
5162241 Method of manufacturing a semiconductor device Nov. 10, 1992
5130260 Method of gettering unintentional mobile impurities in silicon wafer by using a damaged layer exposed to the reverse surface thereof Jul. 14, 1992
5110404 Method for heat processing of silicon May. 5, 1992
5102810 Method for controlling the switching speed of bipolar power devices Apr. 7, 1992
5051375 Method of producing semiconductor wafer through gettering using spherical abrasives Sep. 24, 1991
5021360 Method of farbicating highly lattice mismatched quantum well structures Jun. 4, 1991
5006475 Method for backside damage of silicon wafers Apr. 9, 1991
4997776 Complementary bipolar transistor structure and method for manufacture Mar. 5, 1991
4994399 Method of gettering heavy-metal impurities from silicon substrates by laser-assisted intrinsic gettering Feb. 19, 1991
4960721 Method for purifying group II-IV compound semiconductors Oct. 2, 1990
4897154 Post dry-etch cleaning method for restoring wafer properties Jan. 30, 1990
4885257 Gettering process with multi-step annealing and inert ion implantation Dec. 5, 1989
4868133 Semiconductor wafer fabrication with improved control of internal gettering sites using RTA Sep. 19, 1989
4866009 Multilayer wiring technique for a semiconductor device Sep. 12, 1989
4851358 Semiconductor wafer fabrication with improved control of internal gettering sites using rapid thermal annealing Jul. 25, 1989
4722879 Electrophotographic photoreceptor with super lattice structure Feb. 2, 1988
4687682 Back sealing of silicon wafers Aug. 18, 1987
4681983 Semiconductor solar cells Jul. 21, 1987
4668304 Dopant gettering semiconductor processing by excimer laser May. 26, 1987
4666532 Denuding silicon substrates with oxygen and halogen May. 19, 1987
4661166 Method of manufacturing semiconductor device using a Czochralski wafer and multiple heat treatment Apr. 28, 1987
4645546 Semiconductor substrate Feb. 24, 1987
4637123 Method of standardizing and stabilizing semiconductor wafers Jan. 20, 1987

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