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Class Information
Number: 148/DIG.6
Name: Metal treatment > Apparatus
Description:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 5561088 |
Heating method and manufacturing method for semiconductor device |
Oct. 1, 1996 |
| 5529630 |
Apparatus for manufacturing a liquid crystal display substrate, and apparatus for evaluating semiconductor crystals |
Jun. 25, 1996 |
| 5510297 |
Process for uniform deposition of tungsten silicide on semiconductor wafers by treatment of susceptor having aluminum nitride surface thereon with tungsten silicide after cleaning of susceptor |
Apr. 23, 1996 |
| 5374594 |
Gas-based backside protection during substrate processing |
Dec. 20, 1994 |
| 5273553 |
Apparatus for bonding semiconductor substrates |
Dec. 28, 1993 |
| 5186718 |
Staged-vacuum wafer processing system and method |
Feb. 16, 1993 |
| 5125136 |
Method and apparatus for semiconductor device passivation |
Jun. 30, 1992 |
| 5120393 |
Method for molecular-beam epitaxial growth |
Jun. 9, 1992 |
| 5119541 |
Wafer succeptor apparatus |
Jun. 9, 1992 |
| 5080870 |
Sublimating and cracking apparatus |
Jan. 14, 1992 |
| 4992301 |
Chemical vapor deposition apparatus for obtaining high quality epitaxial layer with uniform film thickness |
Feb. 12, 1991 |
| 4988642 |
Semiconductor device, manufacturing method, and system |
Jan. 29, 1991 |
| 4985372 |
Method of forming conductive layer including removal of native oxide |
Jan. 15, 1991 |
| 4933299 |
Method of forming 3-D structures using MOVCD with in-situ photoetching |
Jun. 12, 1990 |
| 4916089 |
Process for the epitaxial production of semiconductor stock material |
Apr. 10, 1990 |
| 4870030 |
Remote plasma enhanced CVD method for growing an epitaxial semiconductor layer |
Sep. 26, 1989 |
| 4640720 |
Method of manufacturing a semiconductor device |
Feb. 3, 1987 |
| 4555273 |
Furnace transient anneal process |
Nov. 26, 1985 |
| 4392451 |
Apparatus for forming thin-film heterojunction solar cells employing materials selected from the class of I-III-VI.sub.2 chalcopyrite compounds |
Jul. 12, 1983 |
| 4366337 |
p-Si/n-CdS Heterojunction photovoltaic cells |
Dec. 28, 1982 |
| 4318938 |
Method for the continuous manufacture of thin film solar cells |
Mar. 9, 1982 |
| 4315796 |
Crystal growth of compound semiconductor mixed crystals under controlled vapor pressure |
Feb. 16, 1982 |
| 4313254 |
Thin-film silicon solar cell with metal boride bottom electrode |
Feb. 2, 1982 |
| 4286545 |
Apparatus for vapor depositing a stoichiometric compound |
Sep. 1, 1981 |
| 4242149 |
Method of making photodetectors using ion implantation and laser annealing |
Dec. 30, 1980 |
| 4181544 |
Molecular beam method for processing a plurality of substrates |
Jan. 1, 1980 |
| 4179326 |
Process for the vapor growth of a thin film |
Dec. 18, 1979 |
| 4168998 |
Process for manufacturing a vapor phase epitaxial wafer of compound semiconductor without causing breaking of wafer by utilizing a pre-coating of carbonaceous powder |
Sep. 25, 1979 |
| 4160166 |
System for regulating molecular flux and its application to co-evaporation techniques |
Jul. 3, 1979 |
| 4159919 |
Molecular beam epitaxy using premixing |
Jul. 3, 1979 |
| 4154631 |
Equilibrium growth technique for preparing PbS.sub.x Se.sub.1-x epilayers |
May. 15, 1979 |
| 4144116 |
Vapor deposition of single crystal gallium nitride |
Mar. 13, 1979 |
| 4132818 |
Method of forming deposits from reactive gases |
Jan. 2, 1979 |
| 4125086 |
Nozzle beam type metal vapor source |
Nov. 14, 1978 |
| 4100310 |
Method of doping inpurities |
Jul. 11, 1978 |
| 4089735 |
Method for epitactic precipitation of crystalline material from a gaseous phase, particularly for semiconductors |
May. 16, 1978 |
| 4081313 |
Process for preparing semiconductor wafers with substantially no crystallographic slip |
Mar. 28, 1978 |
| 4061800 |
Vapor desposition method |
Dec. 6, 1977 |
| 4027053 |
Method of producing polycrystalline silicon ribbon |
May. 31, 1977 |
| 3980854 |
Graphite susceptor structure for inductively heating semiconductor wafers |
Sep. 14, 1976 |
| 3969163 |
Vapor deposition method of forming low cost semiconductor solar cells including reconstitution of the reacted gases |
Jul. 13, 1976 |
| 3957932 |
Humidifier |
May. 18, 1976 |
| 3933538 |
Method and apparatus for production of liquid phase epitaxial layers of semiconductors |
Jan. 20, 1976 |
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