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Class Information
Number: 148/DIG.164
Name: Metal treatment > Three dimensional processing
Description:


Patents under this class:
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Patent Number Title Of Patent Date Issued
7195950 Forming a plurality of thin-film devices Mar. 27, 2007
5801089 Method of forming stacked devices Sep. 1, 1998
5691239 Method for fabricating an electrical connect above an integrated circuit Nov. 25, 1997
5668046 Method of producing a semiconductor on insulating substrate, and a method of forming transistor thereon Sep. 16, 1997
5656548 Method for forming three dimensional processor using transferred thin film circuits Aug. 12, 1997
5610094 Photoelectric conversion device Mar. 11, 1997
5427976 Method of producing a semiconductor on insulating substrate, and a method of forming a transistor thereon Jun. 27, 1995
5422302 Method for producing a three-dimensional semiconductor device Jun. 6, 1995
5409857 Process for production of an integrated circuit Apr. 25, 1995
5372959 Thin film transistor having a multi-layer stacked channel and its manufacturing method Dec. 13, 1994
5322816 Method for forming deep conductive feedthroughs Jun. 21, 1994
5312765 Method of fabricating three dimensional gallium arsenide microelectronic device May. 17, 1994
5306659 Reach-through isolation etching method for silicon-on-insulator devices Apr. 26, 1994
5130276 Method of fabricating surface micromachined structures Jul. 14, 1992
5124276 Filling contact hole with selectively deposited EPI and poly silicon Jun. 23, 1992
5120666 Manufacturing method for semiconductor device Jun. 9, 1992
5112765 Method of forming stacked tungsten gate PFET devices and structures resulting therefrom May. 12, 1992
5055425 Stacked solid via formation in integrated circuit systems Oct. 8, 1991
5049525 Iterative self-aligned contact metallization process Sep. 17, 1991
5032538 Semiconductor embedded layer technology utilizing selective epitaxial growth methods Jul. 16, 1991
4971925 Improved method of manufacturing a semiconductor device of the "semiconductor on insulator" type Nov. 20, 1990
4954458 Method of forming a three dimensional integrated circuit structure Sep. 4, 1990
4952526 Method for the fabrication of an alternation of layers of monocrystalline semiconducting material and layers of insulating material Aug. 28, 1990
4902637 Method for producing a three-dimensional type semiconductor device Feb. 20, 1990
4877752 3-D packaging of focal plane assemblies Oct. 31, 1989
4840923 Simultaneous multiple level interconnection process Jun. 20, 1989
4829018 Multilevel integrated circuits employing fused oxide layers May. 9, 1989
4797723 Stacked semiconductor device Jan. 10, 1989
4794092 Single wafer moated process Dec. 27, 1988
4793872 III-V Compound heteroepitaxial 3-D semiconductor structures utilizing superlattices Dec. 27, 1988
4771013 Process of making a double heterojunction 3-D I.sup.2 L bipolar transistor with a Si/Ge superlattice Sep. 13, 1988
4761681 Method for fabricating a semiconductor contact and interconnect structure using orientation dependent etching and thermomigration Aug. 2, 1988
4758534 Process for producing porous refractory metal layers embedded in semiconductor devices Jul. 19, 1988
4737470 Method of making three dimensional structures of active and passive semiconductor components Apr. 12, 1988
4696097 Poly-sidewall contact semiconductor device method Sep. 29, 1987
4692994 Process for manufacturing semiconductor devices containing microbridges Sep. 15, 1987
4679299 Formation of self-aligned stacked CMOS structures by lift-off Jul. 14, 1987
4663831 Method of forming transistors with poly-sidewall contacts utilizing deposition of polycrystalline and insulating layers combined with selective etching and oxidation of said layers May. 12, 1987
4661167 Method for manufacturing a monocrystalline semiconductor device Apr. 28, 1987
4660066 Structure for packaging focal plane imagers and signal processing circuits Apr. 21, 1987
4651408 Fabrication of stacked MOS devices utilizing lateral seeding and a plurality of separate implants at different energies Mar. 24, 1987
4649624 Fabrication of semiconductor devices in recrystallized semiconductor films on electrooptic substrates Mar. 17, 1987
4649627 Method of fabricating silicon-on-insulator transistors with a shared element Mar. 17, 1987
4612083 Process of fabricating three-dimensional semiconductor device Sep. 16, 1986
4603468 Method for source/drain self-alignment in stacked CMOS Aug. 5, 1986
4581623 Interlayer contact for use in a static RAM cell Apr. 8, 1986
4555843 Method of fabricating density intensive non-self-aligned stacked CMOS Dec. 3, 1985
4472792 Semiconductor memory Sep. 18, 1984
4467518 Process for fabrication of stacked, complementary MOS field effect transistor circuits Aug. 28, 1984
4424579 Mask programmable read-only memory stacked above a semiconductor substrate Jan. 3, 1984

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