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Class Information
Number: 148/DIG.159
Name: Metal treatment > Strain gauges

Patents under this class:

Patent Number Title Of Patent Date Issued
7550052 Method of producing a complex structure by assembling stressed structures Jun. 23, 2009
7049165 Method of manufacturing an external force detection sensor May. 23, 2006
6440766 Microfabrication using germanium-based release masks Aug. 27, 2002
6001666 Manufacturing process of strain gauge sensor using the piezoresistive effect Dec. 14, 1999
5932048 Method of fabricating direct-bonded semiconductor wafers Aug. 3, 1999
5804457 Method for manufacturing a force sensor Sep. 8, 1998
5769991 Method and apparatus for wafer bonding Jun. 23, 1998
5723353 Process for manufacturing a sensor Mar. 3, 1998
5700702 Method for manufacturing an acceleration sensor Dec. 23, 1997
5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism Jul. 15, 1997
5549785 Method of producing a semiconductor dynamic sensor Aug. 27, 1996
5525549 Method for producing an acceleration sensor Jun. 11, 1996
5510276 Process for producing a pressure transducer using silicon-on-insulator technology Apr. 23, 1996
5484745 Method for forming a semiconductor sensor Jan. 16, 1996
5383993 Method of bonding semiconductor substrates Jan. 24, 1995
5310450 Method of making an acceleration sensor May. 10, 1994
5169472 Method of making a multi-layer silicon structure Dec. 8, 1992
5164339 Fabrication of oxynitride frontside microstructures Nov. 17, 1992
5155061 Method for fabricating a silicon pressure sensor incorporating silicon-on-insulator structures Oct. 13, 1992
5110373 Silicon membrane with controlled stress May. 5, 1992
5059556 Low stress polysilicon microstructures Oct. 22, 1991
4878957 Dielectrically isolated semiconductor substrate Nov. 7, 1989
4738935 Method of manufacturing compound semiconductor apparatus Apr. 19, 1988
4704186 Recessed oxide method for making a silicon-on-insulator substrate Nov. 3, 1987
4670969 Method of making silicon diaphragm pressure sensor Jun. 9, 1987
4665610 Method of making a semiconductor transducer having multiple level diaphragm structure May. 19, 1987
4638552 Method of manufacturing semiconductor substrate Jan. 27, 1987
4523964 High temperature layered silicon structures Jun. 18, 1985
4510671 Dielectrically isolated transducer employing single crystal strain gages Apr. 16, 1985
4404736 Method for manufacturing a semiconductor device of mesa type Sep. 20, 1983

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