| Patent Number |
Title Of Patent |
Date Issued |
| 6452211 |
Semiconductor thin film and semiconductor device |
Sep. 17, 2002 |
| 6255200 |
Polysilicon structure and process for improving CMOS device performance |
Jul. 3, 2001 |
| 6177127 |
Method of monitoring emissivity |
Jan. 23, 2001 |
| 6111191 |
Columnar-grained polycrystalline solar cell substrate and improved method of manufacture |
Aug. 29, 2000 |
| 6074925 |
Method for fabricating semiconductor device with polycide structure for electrode or interconnect |
Jun. 13, 2000 |
| 5943550 |
Method of processing a semiconductor wafer for controlling drive current |
Aug. 24, 1999 |
| 5885869 |
Method for uniformly doping hemispherical grain polycrystalline silicon |
Mar. 23, 1999 |
| RE36156 |
Columnar-grained polycrystalline solar cell and process of manufacture |
Mar. 23, 1999 |
| 5874129 |
Low temperature, high pressure silicon deposition method |
Feb. 23, 1999 |
| 5863598 |
Method of forming doped silicon in high aspect ratio openings |
Jan. 26, 1999 |
| 5811323 |
Process for fabricating a thin film transistor |
Sep. 22, 1998 |
| 5789030 |
Method for depositing doped amorphous or polycrystalline silicon on a substrate |
Aug. 4, 1998 |
| 5652156 |
Layered polysilicon deposition method |
Jul. 29, 1997 |
| 5591668 |
Laser annealing method for a semiconductor thin film |
Jan. 7, 1997 |
| 5496416 |
Columnar-grained polycrystalline solar cell and process of manufacture |
Mar. 5, 1996 |
| 5496744 |
Method of fabricating complementary poly emitter transistors |
Mar. 5, 1996 |
| 5429961 |
Method for manufacturing a thin film transistor |
Jul. 4, 1995 |
| 5336335 |
Columnar-grained polycrystalline solar cell and process of manufacture |
Aug. 9, 1994 |
| 5273911 |
Method of producing a thin-film solar cell |
Dec. 28, 1993 |
| H1249 |
Coating processes with a polycrystalline diamond passivation layer |
Nov. 2, 1993 |
| 5244831 |
Method of doping a polysilicon layer on a semiconductor wafer |
Sep. 14, 1993 |
| 5238879 |
Method for the production of polycrystalline layers having granular crystalline structure for thin-film semiconductor components such as solar cells |
Aug. 24, 1993 |
| 5221643 |
Method for producing polycrystalline semiconductor material by plasma-induced vapor phase deposition using activated hydrogen |
Jun. 22, 1993 |
| 5221365 |
Photovoltaic cell and method of manufacturing polycrystalline semiconductive film |
Jun. 22, 1993 |
| 5212118 |
Method for selective chemical vapor deposition of dielectric, semiconductor and conductive films on semiconductor and metallic substrates |
May. 18, 1993 |
| 5212119 |
Method for maintaining the resistance of a high resistive polysilicon layer for a semiconductor device |
May. 18, 1993 |
| 5202290 |
Process for manufacture of quantum dot and quantum wire semiconductors |
Apr. 13, 1993 |
| 5192717 |
Process for the formation of a polycrystalline semiconductor film by microwave plasma chemical vapor deposition method |
Mar. 9, 1993 |
| 5180690 |
Method of forming a layer of doped crystalline semiconductor alloy material |
Jan. 19, 1993 |
| 5169806 |
Method of making amorphous deposited polycrystalline silicon thermal ink jet transducers |
Dec. 8, 1992 |
| 5166091 |
Fabrication method in vertical integration |
Nov. 24, 1992 |
| 5149666 |
Method of manufacturing a semiconductor memory device having a floating gate electrode composed of 2-10 silicon grains |
Sep. 22, 1992 |
| 5112775 |
Method of making diamond N-type semiconductor diamond p-n junction diode using diphosphorus pentoxide and hot filament CVD method |
May. 12, 1992 |
| 5102813 |
Method of fabricating a thin film transistor |
Apr. 7, 1992 |
| 5098850 |
Process for producing substrate for selective crystal growth, selective crystal growth process and process for producing solar battery by use of them |
Mar. 24, 1992 |
| 5096856 |
In-situ doped silicon using tertiary butyl phosphine |
Mar. 17, 1992 |
| 5087296 |
Solar battery and process for preparing same |
Feb. 11, 1992 |
| 5082794 |
Method of fabricating MOS transistors using selective polysilicon deposition |
Jan. 21, 1992 |
| 5064779 |
Method of manufacturing polycrystalline silicon film |
Nov. 12, 1991 |
| 5024972 |
Deposition of a conductive layer for contacts |
Jun. 18, 1991 |
| 5013690 |
Method for deposition of silicon films from azidosilane sources |
May. 7, 1991 |
| 4975385 |
Method of constructing lightly doped drain (LDD) integrated circuit structure |
Dec. 4, 1990 |
| 4968640 |
Isolation structures for integrated circuits |
Nov. 6, 1990 |
| 4963506 |
Selective deposition of amorphous and polycrystalline silicon |
Oct. 16, 1990 |
| 4927786 |
Process for the formation of a silicon-containing semiconductor thin film by chemically reacting active hydrogen atoms with liquefied film-forming raw material gas on the surface of a substrat |
May. 22, 1990 |
| 4900694 |
Process for the preparation of a multi-layer stacked junction typed thin film transistor using seperate remote plasma |
Feb. 13, 1990 |
| 4897360 |
Polysilicon thin film process |
Jan. 30, 1990 |
| 4891330 |
Method of fabricating n-type and p-type microcrystalline semiconductor alloy material including band gap widening elements |
Jan. 2, 1990 |
| 4877753 |
In situ doped polysilicon using tertiary butyl phosphine |
Oct. 31, 1989 |
| 4868140 |
Semiconductor device and method of manufacturing the same |
Sep. 19, 1989 |
