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Class Information
Number: 148/DIG.106
Name: Metal treatment > Masks, special

Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
7635652 Mask with hydrophobic surface Dec. 22, 2009
6171956 Method for improving the thermal conductivity of metal lines in integrated circuits Jan. 9, 2001
5932489 Method for manufacturing phase-shifting mask Aug. 3, 1999
5811342 Method for forming a semiconductor device with a graded lightly-doped drain structure Sep. 22, 1998
5792270 Apparatus for forming a pattern of nucleation sites Aug. 11, 1998
5683936 Reactive ion etched assisted gold post process Nov. 4, 1997
5679608 Processing techniques for achieving production-worthy, low dielectric, low dielectric, low interconnect resistance and high performance IC Oct. 21, 1997
5668042 Method for aligning micro patterns of a semiconductor device Sep. 16, 1997
5668018 Method for defining a region on a wall of a semiconductor structure Sep. 16, 1997
5604139 Method for manufacturing a semiconductor device Feb. 18, 1997
5583069 Method for making a fine annular charge storage electrode in a semiconductor device using a phase-shift mask Dec. 10, 1996
5573963 Method of forming self-aligned twin tub CMOS devices Nov. 12, 1996
5565031 Method for low temperature selective growth of silicon or silicon alloys Oct. 15, 1996
5550074 Process for fabricating MOS transistors having anti-punchthrough implant regions formed by the use of a phase-shift mask Aug. 27, 1996
5543342 Method of ion implantation Aug. 6, 1996
5525534 Method of producing a semiconductor device using a reticle having a polygonal shaped hole Jun. 11, 1996
5512514 Self-aligned via and contact interconnect manufacturing method Apr. 30, 1996
5510294 Method of forming vias for multilevel metallization Apr. 23, 1996
5466640 Method for forming a metal wire of a semiconductor device Nov. 14, 1995
5466640 Method for forming a metal wire of a semiconductor device Nov. 14, 1995
5466639 Double mask process for forming trenches and contacts during the formation of a semiconductor memory device Nov. 14, 1995
5466639 Double mask process for forming trenches and contacts during the formation of a semiconductor memory device Nov. 14, 1995
5466632 Field oxide with curvilinear boundaries and method of producing the same Nov. 14, 1995
5466632 Field oxide with curvilinear boundaries and method of producing the same Nov. 14, 1995
5462888 Process for manufacturing semiconductor BICMOS device Oct. 31, 1995
5432117 Method of producing semiconductor device Jul. 11, 1995
5413956 Method for producing a semiconductor laser device May. 9, 1995
5399901 Semiconductor devices having a mesa structure and method of fabrication for improved surface voltage breakdown characteristics Mar. 21, 1995
5395799 Method of fabricating semiconductor devices having electrodes comprising layers of doped tungsten disilicide Mar. 7, 1995
5356824 Process for the production of a thin film transistor having a double gate and an optical mask Oct. 18, 1994
5342804 Method of fabrication of devices with different operating characteristics through a single selective epitaxial growth process Aug. 30, 1994
5332681 Method of making a semiconductor device by forming a nanochannel mask Jul. 26, 1994
5328810 Method for reducing, by a factor or 2.sup.-N, the minimum masking pitch of a photolithographic process Jul. 12, 1994
5328864 Method of doping gate electrodes discretely with either P-type or N-type impurities to form discrete semiconductor regions Jul. 12, 1994
5314837 Method of making a registration mark on a semiconductor May. 24, 1994
5300446 Method of making staggered gate MOSTFT Apr. 5, 1994
5300454 Method for forming doped regions within a semiconductor substrate Apr. 5, 1994
5298445 Method for fabricating a field effect transistor Mar. 29, 1994
5294565 Crystal growth method of III - V compound semiconductor Mar. 15, 1994
5292402 Masking material for applications in plasma etching Mar. 8, 1994
5292676 Self-aligned low resistance buried contact process Mar. 8, 1994
5290713 Process of manufacturing a semiconductor device by using a photoresist mask which does not encircle an area of implanted ions Mar. 1, 1994
5288659 Photonic-integrated-circuit fabrication process Feb. 22, 1994
5282922 Hybrid circuit structures and methods of fabrication Feb. 1, 1994
5266156 Methods of forming a local interconnect and a high resistor polysilicon load by reacting cobalt with polysilicon Nov. 30, 1993
5219770 Method for fabricating a MISFET including a common contact window Jun. 15, 1993
5219775 Manufacturing method for a floating gate semiconductor memory device by forming cell slits Jun. 15, 1993
5212111 Local-oxidation of silicon (LOCOS) process using ceramic barrier layer May. 18, 1993
5196368 Semiconductor device manufacture Mar. 23, 1993
5194118 Dry etching method Mar. 16, 1993

1 2 3 4

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