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Class Information
Number: 148/DIG.105
Name: Metal treatment > Masks, metal

Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
7030033 Method for manufacturing circuit devices Apr. 18, 2006
6432317 Method to produce masking Aug. 13, 2002
6171956 Method for improving the thermal conductivity of metal lines in integrated circuits Jan. 9, 2001
5963788 Method for integrating microelectromechanical devices with electronic circuitry Oct. 5, 1999
5766968 Micro mask comprising agglomerated material Jun. 16, 1998
5688703 Method of manufacturing a gate structure for a metal semiconductor field effect transistor Nov. 18, 1997
5633183 FET having minimized parasitic gate capacitance May. 27, 1997
5576227 Process for fabricating a recessed gate MOS device Nov. 19, 1996
5527726 Self-aligned thin-film transistor constructed using lift-off technique Jun. 18, 1996
5510294 Method of forming vias for multilevel metallization Apr. 23, 1996
5478766 Process for formation of thin film transistor liquid crystal display Dec. 26, 1995
5474950 Method for manufacturing a capacitor in a semiconductor device Dec. 12, 1995
5466626 Micro mask comprising agglomerated material Nov. 14, 1995
5466626 Micro mask comprising agglomerated material Nov. 14, 1995
5462887 Process for making a matrix of thin layer transistors with memory capacitors Oct. 31, 1995
5462882 Masked radiant anneal diffusion method Oct. 31, 1995
5438006 Method of fabricating gate stack having a reduced height Aug. 1, 1995
5436182 Method of manufacturing thin film transistor panel Jul. 25, 1995
5427983 Process for corrosion free multi-layer metal conductors Jun. 27, 1995
5422312 Method for forming metal via Jun. 6, 1995
5399526 Method of manufacturing semiconductor device by forming barrier metal layer between substrate and wiring layer Mar. 21, 1995
5382544 Manufacturing method of a semiconductor device utilizing thin metal film Jan. 17, 1995
5362682 Method of producing sheets of crystalline material and devices made therefrom Nov. 8, 1994
5340773 Method of fabricating a semiconductor device Aug. 23, 1994
5308440 Method of making semiconductor device with air-bridge interconnection May. 3, 1994
5306653 Method of making thin film transistors Apr. 26, 1994
5300462 Method for forming a sputtered metal film Apr. 5, 1994
5300446 Method of making staggered gate MOSTFT Apr. 5, 1994
5294565 Crystal growth method of III - V compound semiconductor Mar. 15, 1994
5250452 Deposition of germanium thin films on silicon dioxide employing interposed polysilicon layer Oct. 5, 1993
5188974 Method of manufacturing semiconductor device Feb. 23, 1993
5185293 Method of forming and aligning patterns in deposted overlaying on GaAs Feb. 9, 1993
5173438 Method of performing a field implant subsequent to field oxide fabrication by utilizing selective tungsten deposition to produce encroachment-free isolation Dec. 22, 1992
5143856 Method of manufacturing MES FET Sep. 1, 1992
5123847 Method of manufacturing flat panel backplanes, display transistors Jun. 23, 1992
5114876 Selective epitaxy using the gild process May. 19, 1992
5112763 Process for forming a Schottky barrier gate May. 12, 1992
5110760 Method of nanometer lithography May. 5, 1992
5093280 Refractory metal ohmic contacts and method Mar. 3, 1992
5091337 Method of manufacturing amorphous-silicon thin-film transistors Feb. 25, 1992
5091342 Multilevel resist plated transfer layer process for fine line lithography Feb. 25, 1992
5077236 Method of making a pattern of tungsten interconnection Dec. 31, 1991
5070029 Semiconductor process using selective deposition Dec. 3, 1991
5047360 Method of manufacture thin film transistors Sep. 10, 1991
5030583 Method of making single crystal semiconductor substrate articles and semiconductor device Jul. 9, 1991
5028554 Process of fabricating an MIS FET Jul. 2, 1991
5024971 Method for patterning submicron openings using an image reversal layer of material Jun. 18, 1991
5013682 Method for selective epitaxy using a WS.sub.I mask May. 7, 1991
5010030 Semiconductor process using selective deposition Apr. 23, 1991
5008218 Method for fabricating a thin film transistor using a silicide as an etch mask Apr. 16, 1991

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