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Class Information
Number: 137/565.23
Name: Fluid handling > Systems > With pump > Vacuum pump
Description:










Patents under this class:
1 2

Patent Number Title Of Patent Date Issued
8689820 Pneumatic system for residential use Apr. 8, 2014
8684031 Apparatus for conveying a waste stream Apr. 1, 2014
8623141 Piping system and control for semiconductor processing Jan. 7, 2014
8459299 Fluid control apparatus Jun. 11, 2013
8460256 Collapsible fluid collection and disposal system and related methods Jun. 11, 2013
8366423 Method and arrangement for realizing a vacuum in a vacuum chamber Feb. 5, 2013
8308440 Vacuum processing apparatus, method of controlling vacuum processing apparatus, device manufacturing method, and storage medium Nov. 13, 2012
8297311 Controlling gas partial pressures for process optimization Oct. 30, 2012
8245724 Pneumatic system for residential use Aug. 21, 2012
8186380 Decompression apparatus and inorganic porous body May. 29, 2012
8042566 Ex-situ component recovery Oct. 25, 2011
7896625 Vacuum pumping system and method of operating a vacuum pumping arrangement Mar. 1, 2011
7866341 Vacuum pumping system, driving method thereof, apparatus having the same, and method of transferring substrate using the same Jan. 11, 2011
7814922 Apparatus for controlling the pressure in a process chamber and method of operating same Oct. 19, 2010
7793685 Controlling gas partial pressures for process optimization Sep. 14, 2010
7484370 Refrigerant gas recycling apparatus for cryogenic cooling device Feb. 3, 2009
7392825 Arrangement for tool equipment Jul. 1, 2008
7219692 Apparatus for conditioning the atmosphere in a chamber May. 22, 2007
7140389 Vacuum producing device Nov. 28, 2006
7101155 Vacuum pumping system and method of controlling the same Sep. 5, 2006
7077159 Processing apparatus having integrated pumping system Jul. 18, 2006
7051759 Processing apparatus having integrated pumping system May. 30, 2006
7037411 Apparatus and method for handling easily polymerizable substance, apparatus for extracting liquid from apparatus under reduced pressure, and process for producing easily polymerizable substanc May. 2, 2006
7013916 Sub-atmospheric gas delivery method and apparatus Mar. 21, 2006
6983757 Pressure differential distribution system Jan. 10, 2006
6968851 Double block valve with proving system Nov. 29, 2005
6938638 Gas circulating-processing apparatus Sep. 6, 2005
6926029 Wafer container Aug. 9, 2005
6910497 Semiconductor component manufacturing plant with ventilated false floor Jun. 28, 2005
6883539 Wafer container Apr. 26, 2005
6857859 Gasket for jet pump assembly of a fuel supply unit Feb. 22, 2005
6834664 Device making use of heated fluid to reduce dust products in waste gas pipeline Dec. 28, 2004
6830068 Vacuum generating method and device including a charge valve Dec. 14, 2004
6827101 Vacuum generating method and device Dec. 7, 2004
6817377 Processing apparatus having integrated pumping system Nov. 16, 2004
6786228 Air circuit with air economizing and memory Sep. 7, 2004
6782907 Gas recirculation flow control method and apparatus for use in vacuum system Aug. 31, 2004
6779555 Vacuum generating method and device including a charge valve and electronic control Aug. 24, 2004
6691726 System and method for using bent pipes in high-purity fluid handling systems Feb. 17, 2004
6681801 Pumping station with efficiency increasing and backflow preventing structure Jan. 27, 2004
6609536 Depression cap for a bottle Aug. 26, 2003
6598615 Compact independent pressure control and vacuum isolation for a turbomolecular pumped plasma reaction chamber Jul. 29, 2003
6520203 Evacuation and inert gas introduction apparatus Feb. 18, 2003
6513540 System and method for using bent pipes in high-purity fluid handling systems Feb. 4, 2003
6453481 Vacuum waste system having a vacuum control valve Sep. 24, 2002
6446651 Multi-chamber vacuum system and a method of operating the same Sep. 10, 2002
6427458 Apparatus and method for clearing air conditioning drain lines Aug. 6, 2002
6397883 Equipment skid Jun. 4, 2002
6397876 Method for maintaining the operating condition of a vacuum responsive device during loss and resumption of power Jun. 4, 2002
6397885 Vacuum control apparatus for maintaining the operating condition of a vacuum responsive device during loss and resumption of power Jun. 4, 2002

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