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Class Information
Number: 134/99.1
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation > Plural fluids applying conduits
Description: Apparatus which includes two or more conduits for applying two or more fluids to the work.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7604013 |
Substrate cleaning method and developing apparatus |
Oct. 20, 2009 |
| 7584761 |
Wafer edge surface treatment with liquid meniscus |
Sep. 8, 2009 |
| 7568490 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids |
Aug. 4, 2009 |
| 7568488 |
Enhanced wafer cleaning method |
Aug. 4, 2009 |
| 7544253 |
Method and apparatus for flushing asphalt feeding devices |
Jun. 9, 2009 |
| 7527698 |
Method and apparatus for removing a liquid from a surface of a substrate |
May. 5, 2009 |
| 7520285 |
Apparatus and method for processing a substrate |
Apr. 21, 2009 |
| 7475696 |
Dishwasher having valved third-level sprayer |
Jan. 13, 2009 |
| 7464719 |
Multi-menisci processing apparatus |
Dec. 16, 2008 |
| 7426932 |
Spray fill device and method for using the same |
Sep. 23, 2008 |
| 7422641 |
Substrate cleaning apparatus and substrate cleaning method |
Sep. 9, 2008 |
| 7422024 |
Ultrasonic shower cleaning apparatus of double-side cleaning type |
Sep. 9, 2008 |
| 7406972 |
Substrate proximity processing structures |
Aug. 5, 2008 |
| 7383601 |
Substrate brush scrubbing and proximity cleaning-drying sequence using compatible chemistries, and method, apparatus, and system for implementing the same |
Jun. 10, 2008 |
| 7383843 |
Method and apparatus for processing wafer surfaces using thin, high velocity fluid layer |
Jun. 10, 2008 |
| 7367345 |
Apparatus and method for providing a confined liquid for immersion lithography |
May. 6, 2008 |
| 7350316 |
Meniscus proximity system for cleaning semiconductor substrate surfaces |
Apr. 1, 2008 |
| 7314529 |
Substrate cleaning apparatus and substrate cleaning method |
Jan. 1, 2008 |
| 7278434 |
Cleaning device with toggle for increasing ozone dissolution in water for cleaning vegetables and fruits |
Oct. 9, 2007 |
| 7275553 |
Liquid processing apparatus and liquid processing method |
Oct. 2, 2007 |
| 7267129 |
Device and process for liquid treatment of wafer-shaped articles |
Sep. 11, 2007 |
| 7264007 |
Method and apparatus for cleaning a substrate using megasonic power |
Sep. 4, 2007 |
| 7252097 |
System and method for integrating in-situ metrology within a wafer process |
Aug. 7, 2007 |
| 7240679 |
System for substrate processing with meniscus, vacuum, IPA vapor, drying manifold |
Jul. 10, 2007 |
| 7234477 |
Method and apparatus for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces |
Jun. 26, 2007 |
| 7211555 |
Process for preparing fine zeolite particles |
May. 1, 2007 |
| 7188632 |
Cleaning and sanitizing system |
Mar. 13, 2007 |
| 7172674 |
Device for liquid treatment of wafer-shaped articles |
Feb. 6, 2007 |
| 7165563 |
Method and apparatus to decouple power and cavitation for megasonic cleaning applications |
Jan. 23, 2007 |
| 7163019 |
Method of reducing water spotting and oxide growth on a semiconductor structure |
Jan. 16, 2007 |
| 7086407 |
Cleaning and sanitizing system |
Aug. 8, 2006 |
| 7069937 |
Vertical proximity processor |
Jul. 4, 2006 |
| 7007702 |
Device and process for liquid treatment of wafer-shaped articles |
Mar. 7, 2006 |
| 7000623 |
Apparatus and method for substrate preparation implementing a surface tension reducing process |
Feb. 21, 2006 |
| 6964724 |
Etching and cleaning methods and etching and cleaning apparatuses used therefor |
Nov. 15, 2005 |
| 6945259 |
Substrate cleaning method and substrate cleaning apparatus |
Sep. 20, 2005 |
| 6910487 |
Method and apparatus for liquid-treating and drying a substrate |
Jun. 28, 2005 |
| 6901938 |
Substrate cleaning apparatus |
Jun. 7, 2005 |
| 6863741 |
Cleaning processing method and cleaning processing apparatus |
Mar. 8, 2005 |
| 6851435 |
Method and apparatus for localized liquid treatment of the surface of a substrate |
Feb. 8, 2005 |
| 6843259 |
Solution treatment unit |
Jan. 18, 2005 |
| 6823876 |
Methodology of rotational etching tool maintenance |
Nov. 30, 2004 |
| 6817369 |
Device and method for cleaning substrates |
Nov. 16, 2004 |
| 6817368 |
Substrate processing method and substrate processing apparatus |
Nov. 16, 2004 |
| 6805754 |
Device and method for processing substrates |
Oct. 19, 2004 |
| 6792958 |
System for processing substrate with liquid |
Sep. 21, 2004 |
| 6758227 |
Medical instrument washer |
Jul. 6, 2004 |
| 6745783 |
Cleaning processing method and cleaning processing apparatus |
Jun. 8, 2004 |
| 6742531 |
In-sink dishwater with self-aligning liquid feed system |
Jun. 1, 2004 |
| 6725868 |
Liquid processing apparatus |
Apr. 27, 2004 |
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