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Browse by Category: Main > Material Science
Class Information
Number: 134/98.1
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation > With coordinated or multiple valves
Description: Apparatus combined with (1) interconnected, coordinated, or multiway valves for controlling flow of the plural fluids or (2) means to selectively direct or divert liquids to any one of plural conduits or courses used to conduct the liquid from the work.










Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8578952 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme Nov. 12, 2013
8273187 Probe cleaning method and apparatus Sep. 25, 2012
8136538 Processing system, processing method, and storage medium Mar. 20, 2012
8088693 Substrate treatment method Jan. 3, 2012
7964040 Multi-port pumping system for substrate processing chambers Jun. 21, 2011
7798168 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Sep. 21, 2010
7763118 Dishwasher Jul. 27, 2010
7740813 Automated endoscope reprocessor self-disinfection connection Jun. 22, 2010
7614408 Apparatus for controlling washing flow of dishwasher Nov. 10, 2009
7614421 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Nov. 10, 2009
7562663 High-pressure processing apparatus and high-pressure processing method Jul. 21, 2009
7544253 Method and apparatus for flushing asphalt feeding devices Jun. 9, 2009
7524396 Object processing apparatus and processing method Apr. 28, 2009
7520285 Apparatus and method for processing a substrate Apr. 21, 2009
7476368 Method and device for deactivating items and for maintaining such items in a deactivated state Jan. 13, 2009
7426932 Spray fill device and method for using the same Sep. 23, 2008
7422641 Substrate cleaning apparatus and substrate cleaning method Sep. 9, 2008
7328716 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Feb. 12, 2008
7314529 Substrate cleaning apparatus and substrate cleaning method Jan. 1, 2008
7252100 Systems and methods for processing a set of circuit boards Aug. 7, 2007
7146993 Bracket for dishwasher tub Dec. 12, 2006
7111630 High pressure processing apparatus and method Sep. 26, 2006
7108000 Washer pressure equalization system Sep. 19, 2006
7080651 High pressure processing apparatus and method Jul. 25, 2006
7066186 Method and apparatus mounted on a painting system to clean a paint feed line Jun. 27, 2006
6990988 Substrate processing method and substrate processing system Jan. 31, 2006
6945259 Substrate cleaning method and substrate cleaning apparatus Sep. 20, 2005
6913029 Multiple contents container assembly for ultrapure solvent purging Jul. 5, 2005
6857447 Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases Feb. 22, 2005
6848457 Liquid treatment equipment, liquid treatment method, semiconductor device manufacturing method, and semiconductor device manufacturing equipment Feb. 1, 2005
6840252 Multiple contents container assembly for ultrapure solvent purging Jan. 11, 2005
6837251 Multiple contents container assembly for ultrapure solvent purging Jan. 4, 2005
6832616 Substrate treating apparatus Dec. 21, 2004
6823879 Apparatus for cleaning pipes Nov. 30, 2004
6817369 Device and method for cleaning substrates Nov. 16, 2004
6698444 Freeing of seized valves Mar. 2, 2004
6648021 Gas control device and method of supplying gas Nov. 18, 2003
6612316 Wet processing device with sensor-controlled conveyor Sep. 2, 2003
6581625 Liquid supply system, method for cleaning the same and vaporizer Jun. 24, 2003
6539958 Cooler flusher Apr. 1, 2003
6527009 Gas control device and method of supplying gas Mar. 4, 2003
6499502 Method and device for filling a distribution line with corrosive gas Dec. 31, 2002
6493964 Supercritical point drying apparatus for semiconductor device manufacturing and bio-medical sample processing Dec. 17, 2002
6467498 City water flushing and sludge prevention control method Oct. 22, 2002
6345642 Method and apparatus for removing processing liquid from a processing liquid path Feb. 12, 2002
6341612 Two compartment container for neutralizing used cleaning solutions Jan. 29, 2002
6321773 Water valve assembly and water draining method Nov. 27, 2001
6314986 Gas control device and method of supplying gas Nov. 13, 2001
6302139 Auto-switching gas delivery system utilizing sub-atmospheric pressure gas supply vessels Oct. 16, 2001
6227228 Purge process for sequential plural component mixing system May. 8, 2001

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