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Class Information
Number: 134/95.2
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation > Means for sequentially applying different fluids > With drying means
Description: Apparatus combined with means for drying the work.

Patents under this class:
1 2 3 4 5 6

Patent Number Title Of Patent Date Issued
8651121 Substrate processing apparatus, substrate processing method, and storage medium Feb. 18, 2014
8652268 Substrate treating method for treating substrates with treating liquids Feb. 18, 2014
8646469 Substrate treating apparatus Feb. 11, 2014
8591664 Integrated cleaner and dryer system Nov. 26, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8567419 Evaporation material cleaning apparatus Oct. 29, 2013
8522799 Apparatus and system for cleaning a substrate Sep. 3, 2013
8511324 Washing/drying machine Aug. 20, 2013
8469043 Drying system for a dishwasher Jun. 25, 2013
8439051 Method of substrate processing, substrate processing system, and storage medium May. 14, 2013
8434501 Sealed cleaner-box with magnetically coupled actuator pucks May. 7, 2013
8381319 Cooling system with a cover which contains super absorber and can be activated Feb. 26, 2013
8371317 Surface treatment apparatus Feb. 12, 2013
8371318 Liquid processing apparatus, liquid processing method, and storage medium Feb. 12, 2013
8336564 Method and apparatus for cleaning a coating machine Dec. 25, 2012
8322045 Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife Dec. 4, 2012
8313582 System, method and apparatus for maintaining separation of liquids in a controlled meniscus Nov. 20, 2012
8303724 Substrate processing method and non-transitory storage medium for carrying out such method Nov. 6, 2012
8220470 Furniture pad folding machine Jul. 17, 2012
8147618 Device and method for liquid treating disc-like articles Apr. 3, 2012
8142732 Autoclave with shortenable work cycle, container to be employed therewith and full sterilisation treatment employing said container Mar. 27, 2012
8118042 Apparatus and method for cleaning a liquid handling probe Feb. 21, 2012
8113221 Substrate cleaning method, substrate cleaning apparatus and computer readable recording medium Feb. 14, 2012
8109282 Substrate processing apparatus and substrate processing method Feb. 7, 2012
8097091 Hot source cleaning system Jan. 17, 2012
8047215 Laparoscopic lens cleaner Nov. 1, 2011
8015984 Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent Sep. 13, 2011
8001984 Laparoscopic lens cleaner Aug. 23, 2011
7997288 Single phase proximity head having a controlled meniscus for treating a substrate Aug. 16, 2011
7967916 Method of preventing pattern collapse during rinsing and drying Jun. 28, 2011
7946302 Parts immersion apparatus and method May. 24, 2011
7934513 Facility with multi-storied process chamber for cleaning substrates and method for cleaning substrates using the facility May. 3, 2011
7905239 Part washer Mar. 15, 2011
7897056 Apparatus for etching or stripping substrate of liquid crystal display device and method thereof Mar. 1, 2011
7861731 Cleaning/drying apparatus and cleaning/drying method Jan. 4, 2011
7806126 Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the same Oct. 5, 2010
7802579 Apparatus and method for treating substrates Sep. 28, 2010
7784478 Acoustic energy system, method and apparatus for processing flat articles Aug. 31, 2010
7775219 Process chamber lid and controlled exhaust Aug. 17, 2010
7767028 Cleaning hardware kit for composite showerhead electrode assemblies for plasma processing apparatuses Aug. 3, 2010
7718011 Apparatus for cleaning and drying substrates May. 18, 2010
7703462 Reduction of entrance and exit marks left by a substrate-processing meniscus Apr. 27, 2010
7678199 Substrate cleaning method Mar. 16, 2010
7669608 Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle Mar. 2, 2010
7637272 Method and apparatus for cleaning and drying substrates Dec. 29, 2009
7628162 Dish washer and blower cover thereof Dec. 8, 2009
7617831 Wash booth for containers Nov. 17, 2009
7604013 Substrate cleaning method and developing apparatus Oct. 20, 2009
7578304 Cleaning and drying apparatus for substrate holder chuck and method thereof Aug. 25, 2009
7568488 Enhanced wafer cleaning method Aug. 4, 2009

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