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Class Information
Number: 134/95.1
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation > Means for sequentially applying different fluids
Description: Apparatus which includes means for successively applying two or more different fluids to the work.










Sub-classes under this class:

Class Number Class Name Patents
134/95.3 Fluid spraying means 278
134/95.2 With drying means 284


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8685203 Dry etcher including etching device and cleaning device Apr. 1, 2014
8652268 Substrate treating method for treating substrates with treating liquids Feb. 18, 2014
8651121 Substrate processing apparatus, substrate processing method, and storage medium Feb. 18, 2014
8646469 Substrate treating apparatus Feb. 11, 2014
8641985 Control system for ozone sterilization in multiple compact chambers Feb. 4, 2014
8641981 Device for the disinfection, sterilization and/or maintenance of medical in particular dental, instruments Feb. 4, 2014
8636114 Bicycle chain cleaning and lubrication techniques Jan. 28, 2014
8617318 Liquid processing apparatus and liquid processing method Dec. 31, 2013
8607806 Megasonic precision cleaning of semiconductor process equipment components and parts Dec. 17, 2013
8607807 Liquid treatment apparatus and method Dec. 17, 2013
8590547 Liquid processing apparatus Nov. 26, 2013
8585832 Washer and decontaminator with lid control Nov. 19, 2013
8578952 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme Nov. 12, 2013
8567419 Evaporation material cleaning apparatus Oct. 29, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8557705 Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device Oct. 15, 2013
8522799 Apparatus and system for cleaning a substrate Sep. 3, 2013
8511324 Washing/drying machine Aug. 20, 2013
8505559 Cleaning apparatus and high pressure cleaner for use therein Aug. 13, 2013
8491726 Liquid processing apparatus and process liquid supplying method Jul. 23, 2013
8464736 Reclaim chemistry Jun. 18, 2013
8459275 In-situ cleaning system Jun. 11, 2013
8453656 Integrated processing and critical point drying systems for semiconductor and MEMS devices Jun. 4, 2013
8444772 Liquid processing apparatus May. 21, 2013
8439051 Method of substrate processing, substrate processing system, and storage medium May. 14, 2013
8434501 Sealed cleaner-box with magnetically coupled actuator pucks May. 7, 2013
8381745 Water-conducting appliance having a cleaning agent feeding device Feb. 26, 2013
8371317 Surface treatment apparatus Feb. 12, 2013
8327861 Megasonic precision cleaning of semiconductor process equipment components and parts Dec. 11, 2012
8273187 Probe cleaning method and apparatus Sep. 25, 2012
8236091 Fluid separation method and fluid separation apparatus Aug. 7, 2012
8235062 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation Aug. 7, 2012
8205625 Apparatus and method for surface treatment of substrate, and substrate processing apparatus and method Jun. 26, 2012
8201567 Liquid treating apparatus Jun. 19, 2012
8197609 Automated detection and control system and method for high pressure water wash application and collection applied to aero compressor washing Jun. 12, 2012
8181747 Bicycle chain cleaner and lubrication apparatus May. 22, 2012
8109282 Substrate processing apparatus and substrate processing method Feb. 7, 2012
8069866 Apparatus and method for cleaning beverage lines Dec. 6, 2011
8047215 Laparoscopic lens cleaner Nov. 1, 2011
8001984 Laparoscopic lens cleaner Aug. 23, 2011
7967019 Method and apparatus for removing contaminants from substrate Jun. 28, 2011
7967664 Device and process for cleaning, activation or pretreatment of work pieces by means of carbon dioxide blasting Jun. 28, 2011
7950403 Pipe clearing systems May. 31, 2011
7939139 Methods for atomic layer deposition (ALD) using a proximity meniscus May. 10, 2011
7938129 Substrate processing apparatus May. 10, 2011
7918235 Steam generator auto--blow down and scale reduction system Apr. 5, 2011
7850818 Method of manufacturing semiconductor device and cleaning apparatus Dec. 14, 2010
7832417 Dispenser for a drawer-type dishwasher Nov. 16, 2010
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7806126 Substrate proximity drying using in-situ local heating of substrate and substrate carrier point of contact, and methods, apparatus, and systems for implementing the same Oct. 5, 2010

1 2 3 4 5










 
 
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