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Class Information
Number: 134/94.1
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation
Description: Apparatus having one work treating station which includes either plural means for treating a work product with different fluids at the workstation.

Sub-classes under this class:

Class Number Class Name Patents
134/97.1 Coordinated intlet nonimpelling control and noninlet control 5
134/103.2 Fluid spraying means 136
134/103.1 Having means for recirculating or reversing fluid flows 113
134/95.1 Means for sequentially applying different fluids 243
134/99.1 Plural fluids applying conduits 201
134/98.1 With coordinated or multiple valves 123
134/96.1 With nonimpelling plural way liquid outlet (e.g., two way valve) or nonimpelling liquid outlet control coordinated with other control control coordinated with other control 44

Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8684014 Liquid processing apparatus for substrate and liquid processing method Apr. 1, 2014
8671961 Methods and apparatus for cleaning semiconductor wafers Mar. 18, 2014
8651121 Substrate processing apparatus, substrate processing method, and storage medium Feb. 18, 2014
8646469 Substrate treating apparatus Feb. 11, 2014
8640717 Multipurpose sequential droplet applicator Feb. 4, 2014
8641985 Control system for ozone sterilization in multiple compact chambers Feb. 4, 2014
8617318 Liquid processing apparatus and liquid processing method Dec. 31, 2013
8607806 Megasonic precision cleaning of semiconductor process equipment components and parts Dec. 17, 2013
8607807 Liquid treatment apparatus and method Dec. 17, 2013
8590547 Liquid processing apparatus Nov. 26, 2013
8578952 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme Nov. 12, 2013
8580042 Methods and apparatus for cleaning semiconductor wafers Nov. 12, 2013
8567418 Stain treatment and removal Oct. 29, 2013
8567419 Evaporation material cleaning apparatus Oct. 29, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8562907 Hand sanitizer Oct. 22, 2013
8555679 Multiple-action addition valve for a system for metering liquid or pasty washing aids and method for operating the multiple-action addition valve Oct. 15, 2013
8557705 Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device Oct. 15, 2013
8544483 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Oct. 1, 2013
8522799 Apparatus and system for cleaning a substrate Sep. 3, 2013
8511324 Washing/drying machine Aug. 20, 2013
8512478 Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus Aug. 20, 2013
8505559 Cleaning apparatus and high pressure cleaner for use therein Aug. 13, 2013
8491726 Liquid processing apparatus and process liquid supplying method Jul. 23, 2013
8490634 Device for treating disc-like articles Jul. 23, 2013
8485203 Surface cleaning with concurrently usable prespray and rinse units Jul. 16, 2013
8464736 Reclaim chemistry Jun. 18, 2013
8459277 Chemical cleaning method and system with steam injection Jun. 11, 2013
8453656 Integrated processing and critical point drying systems for semiconductor and MEMS devices Jun. 4, 2013
8453655 Surface treatment apparatus Jun. 4, 2013
8439051 Method of substrate processing, substrate processing system, and storage medium May. 14, 2013
8434501 Sealed cleaner-box with magnetically coupled actuator pucks May. 7, 2013
8394349 Household appliance having an ozone generator and an ozone eliminating device, and related method Mar. 12, 2013
8387631 HDA vacuum cleaning machine for manufacturing of HDD Mar. 5, 2013
8381745 Water-conducting appliance having a cleaning agent feeding device Feb. 26, 2013
8375965 Systems and methods for single integrated substrate cleaning and rinsing Feb. 19, 2013
8371317 Surface treatment apparatus Feb. 12, 2013
8366834 Endoscope cleaning/disinfecting apparatus Feb. 5, 2013
8347901 Substrate cleaning method, substrate cleaning system and program storage medium Jan. 8, 2013
8349089 Dishwasher having dedicated sprayer for silverware basket Jan. 8, 2013
8337628 Non-integrated bulk dispenser and method of operating a dishwasher having same Dec. 25, 2012
8327861 Megasonic precision cleaning of semiconductor process equipment components and parts Dec. 11, 2012
8329112 Multi-dosing detergent delivery device Dec. 11, 2012
8313708 Gas treatment apparatus Nov. 20, 2012
8291921 Removing bubbles from a fluid flowing down through a plenum Oct. 23, 2012
8273185 Cleaning a vehicle exhaust filter Sep. 25, 2012
8261757 Device and method for wet treating disc-like substrates Sep. 11, 2012
8261758 Apparatus and method for cleaning and removing liquids from front and back sides of a rotating workpiece Sep. 11, 2012
8257506 Pulsed chemical dispense system Sep. 4, 2012
8246909 Automated endoscope reprocessor germicide concentration monitoring system and method Aug. 21, 2012

1 2 3 4 5

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