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Class Information
Number: 134/902
Name: Cleaning and liquid contact with solids > Semiconductor wafer
Description: Apparatus including means to contact a semiconductor wafer with a liquid.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6116254 |
Cleaning method and system of semiconductor substrate and production method of cleaning solution |
Sep. 12, 2000 |
| 6108928 |
Vacuum dryer of drying semiconductor device using the same |
Aug. 29, 2000 |
| 6109278 |
Liquid treatment method and apparatus |
Aug. 29, 2000 |
| 6105592 |
Gas intake assembly for a wafer processing system |
Aug. 22, 2000 |
| 6106635 |
Washing method and washing apparatus |
Aug. 22, 2000 |
| 6101737 |
Apparatus and method for drying a semiconductor member |
Aug. 15, 2000 |
| 6102057 |
Lifting and rinsing a wafer |
Aug. 15, 2000 |
| 6098641 |
Motor drive assembly for a semiconductor wafer processing system |
Aug. 8, 2000 |
| 6098643 |
Bath system for semiconductor wafers with obliquely mounted transducers |
Aug. 8, 2000 |
| 6099686 |
Wet processing system |
Aug. 8, 2000 |
| 6095167 |
Rinse/dry apparatus including a chamber with a moveable side wall |
Aug. 1, 2000 |
| 6092538 |
Method for using high density compressed liquefied gases in cleaning applications |
Jul. 25, 2000 |
| 6092539 |
In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same |
Jul. 25, 2000 |
| 6092542 |
Cleaning apparatus |
Jul. 25, 2000 |
| 6092937 |
Linear developer |
Jul. 25, 2000 |
| 6093254 |
Method of HF-HF Cleaning |
Jul. 25, 2000 |
| 6090220 |
Method for transferring a wafer after removing a washing solution |
Jul. 18, 2000 |
| 6085762 |
Apparatus and method for providing pulsed fluids |
Jul. 11, 2000 |
| 6085764 |
Cleaning apparatus and method |
Jul. 11, 2000 |
| 6086269 |
Method and apparatus for applying a substance to a surface |
Jul. 11, 2000 |
| 6082377 |
Vertical wafer cleaning and drying system |
Jul. 4, 2000 |
| 6082381 |
Treatment apparatus |
Jul. 4, 2000 |
| 6079428 |
Apparatus for removing coated film from peripheral portion of substrate |
Jun. 27, 2000 |
| 6077359 |
Procedure and device for the chemical and electrolytic treatment of printed circuit boards and conductor films |
Jun. 20, 2000 |
| 6074515 |
Apparatus for processing substrates |
Jun. 13, 2000 |
| 6070601 |
Jet-cleaning device for developing station |
Jun. 6, 2000 |
| 6067728 |
Supercritical phase wafer drying/cleaning system |
May. 30, 2000 |
| 6068002 |
Cleaning and drying apparatus, wafer processing system and wafer processing method |
May. 30, 2000 |
| 6068137 |
Semiconductor wafer carrier |
May. 30, 2000 |
| 6062240 |
Treatment device |
May. 16, 2000 |
| 6062241 |
Substrate conveying device and substrate conveying method |
May. 16, 2000 |
| 6063191 |
Apparatus for the coating of flat-form substrates especially of printed circuit boards |
May. 16, 2000 |
| 6063208 |
Reticle cleaning without damaging pellicle |
May. 16, 2000 |
| 6063301 |
Crystal display processing method and crystal wafer manufacturing method |
May. 16, 2000 |
| 6058945 |
Cleaning methods of porous surface and semiconductor surface |
May. 9, 2000 |
| 6058947 |
Contamination monitoring system |
May. 9, 2000 |
| 6058950 |
Pressurized liquid-supply and straightening mechanism in a water-flow washing apparatus |
May. 9, 2000 |
| 6059889 |
Method for processing a substrate using a system having a roller with treading |
May. 9, 2000 |
| 6059891 |
Apparatus and method for washing substrate |
May. 9, 2000 |
| 6059893 |
Method for cleaning a semiconductor wafer |
May. 9, 2000 |
| 6055995 |
Semiconductor manufacture apparatus |
May. 2, 2000 |
| 6056828 |
Substrate conveying device and substrate conveying method |
May. 2, 2000 |
| 6053984 |
Method and apparatus for decomposition of silicon oxide layers for impurity analysis of silicon wafers |
Apr. 25, 2000 |
| 6049996 |
Device and fluid separator for processing spherical shaped devices |
Apr. 18, 2000 |
| 6050275 |
Apparatus for and method of cleaning objects to be processed |
Apr. 18, 2000 |
| 6050279 |
Apparatus and method for immersing an object in a liquid such that a lower surface of the object does not touch a bottom surface of a container holding the liquid |
Apr. 18, 2000 |
| 6047717 |
Mandrel device and method for hard disks |
Apr. 11, 2000 |
| 6048405 |
Megasonic cleaning methods and apparatus |
Apr. 11, 2000 |
| 6048409 |
Washing apparatus and washing method |
Apr. 11, 2000 |
| 6045621 |
Method for cleaning objects using a fluid charge |
Apr. 4, 2000 |
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