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Class Information
Number: 134/902
Name: Cleaning and liquid contact with solids > Semiconductor wafer
Description: Apparatus including means to contact a semiconductor wafer with a liquid.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6675817 |
Apparatus for etching a glass substrate |
Jan. 13, 2004 |
| 6676757 |
Coating film forming apparatus and coating unit |
Jan. 13, 2004 |
| 6676762 |
Method for cleaning a finished and polished surface of a metal automotive wheel |
Jan. 13, 2004 |
| 6676764 |
Method for cleaning a substrate in selective epitaxial growth process |
Jan. 13, 2004 |
| 6676765 |
Method of removing particles and a liquid from a surface of substrate |
Jan. 13, 2004 |
| 6676766 |
Method for cleaning a substrate using a sherbet-like composition |
Jan. 13, 2004 |
| 6672318 |
Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism |
Jan. 6, 2004 |
| 6672319 |
Pressurized liquid diffuser |
Jan. 6, 2004 |
| 6672779 |
Substrate processing apparatus and substrate processing method |
Jan. 6, 2004 |
| 6668844 |
Systems and methods for processing workpieces |
Dec. 30, 2003 |
| 6666928 |
Methods and apparatus for holding a substrate in a pressure chamber |
Dec. 23, 2003 |
| 6663721 |
Liquid processing apparatus and method |
Dec. 16, 2003 |
| 6659116 |
System for wafer carrier in-process clean and rinse |
Dec. 9, 2003 |
| 6660101 |
Method and apparatus for cleaning film deposition device |
Dec. 9, 2003 |
| 6660104 |
Dual cassette centrifugal processor |
Dec. 9, 2003 |
| 6655044 |
Vacuum processing apparatus and operating method therefor |
Dec. 2, 2003 |
| 6656289 |
Method of reducing water spotting and oxide growth on a semiconductor structure |
Dec. 2, 2003 |
| 6651284 |
Scrubbing assembly for wafer-cleaning device |
Nov. 25, 2003 |
| 6651680 |
Washing apparatus with UV exposure and first and second ultrasonic cleaning vessels |
Nov. 25, 2003 |
| 6652658 |
Method for machining/cleaning by hydroxide ion in ultrapure water |
Nov. 25, 2003 |
| 6652659 |
Low species buffered rinsing fluids and method |
Nov. 25, 2003 |
| 6652662 |
Substrate surface processing apparatus and method |
Nov. 25, 2003 |
| 6652663 |
Composition for eliminating thermosetting resin |
Nov. 25, 2003 |
| 6652666 |
Wet dip method for photoresist and polymer stripping without buffer treatment step |
Nov. 25, 2003 |
| 6647579 |
Brush pressure control system for chemical and mechanical treatment of semiconductor surfaces |
Nov. 18, 2003 |
| 6647641 |
Device and method for the treatment of substrates in a fluid container |
Nov. 18, 2003 |
| 6647998 |
Electrostatic charge-free solvent-type dryer for semiconductor wafers |
Nov. 18, 2003 |
| 6648307 |
Method to increase the quantity of dissolved gas in a liquid and to maintain the increased quantity of dissolved gas in the liquid until utilized |
Nov. 18, 2003 |
| 6643952 |
System and method for controlling a vapor dryer process |
Nov. 11, 2003 |
| 6645311 |
Method of reducing water spotting and oxide growth on a semiconductor structure |
Nov. 11, 2003 |
| 6641675 |
Method and apparatus for immersion treatment of semiconductor and other devices |
Nov. 4, 2003 |
| 6641677 |
Method of reducing water spotting and oxide growth on a semiconductor structure |
Nov. 4, 2003 |
| 6641678 |
Methods for cleaning microelectronic structures with aqueous carbon dioxide systems |
Nov. 4, 2003 |
| 6637444 |
Volume efficient cleaning methods |
Oct. 28, 2003 |
| 6637445 |
Substrate processing unit |
Oct. 28, 2003 |
| 6637446 |
Integrated substrate processing system |
Oct. 28, 2003 |
| 6638365 |
Method for obtaining clean silicon surfaces for semiconductor manufacturing |
Oct. 28, 2003 |
| 6634116 |
Vacuum processing apparatus |
Oct. 21, 2003 |
| 6634368 |
Application of ozonated DI water to scrubbers for resist strip and particle removal processes |
Oct. 21, 2003 |
| 6634371 |
Apparatus for removing contaminants from a workpiece using a chemically reactive additive |
Oct. 21, 2003 |
| 6634806 |
Substrate processing method and substrate processing apparatus |
Oct. 21, 2003 |
| 6635118 |
Aqueous cleaning of polymer apply equipment |
Oct. 21, 2003 |
| 6631726 |
Apparatus and method for processing a substrate |
Oct. 14, 2003 |
| 6632288 |
Method for cleaning copper surfaces |
Oct. 14, 2003 |
| 6632289 |
Substrate cleaning method and substrate cleaning apparatus |
Oct. 14, 2003 |
| 6632292 |
Selective treatment of microelectronic workpiece surfaces |
Oct. 14, 2003 |
| 6629539 |
Sample processing system |
Oct. 7, 2003 |
| 6630031 |
Surface purification apparatus and surface purification method |
Oct. 7, 2003 |
| 6625835 |
Disk cascade scrubber |
Sep. 30, 2003 |
| 6625901 |
Apparatus and method for drying a thin substrate |
Sep. 30, 2003 |
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