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Class Information
Number: 134/902
Name: Cleaning and liquid contact with solids > Semiconductor wafer
Description: Apparatus including means to contact a semiconductor wafer with a liquid.

Patents under this class:

Patent Number Title Of Patent Date Issued
8691027 Method for removing material from semiconductor wafer and apparatus for performing the same Apr. 8, 2014
8691022 Method and apparatus for processing wafer-shaped articles Apr. 8, 2014
8685203 Dry etcher including etching device and cleaning device Apr. 1, 2014
8684015 Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation Apr. 1, 2014
8679259 Substrate processing apparatus, method of manufacturing semiconductor device and method of cleaning processing vessel Mar. 25, 2014
8663397 Processing and cleaning substrates Mar. 4, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8652262 Ultrasonic cleaning method for generating ultrasonic vibrations by a frequency modulated signal Feb. 18, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8647445 Process for cleaning semiconductor devices and/or tooling during manufacturing thereof Feb. 11, 2014
8637408 In-situ reclaim of volatile components Jan. 28, 2014
8635968 Substrate processing apparatus and substrate processing method Jan. 28, 2014
8627836 Method and system for removal of contaminates from phaseshift photomasks Jan. 14, 2014
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8617318 Liquid processing apparatus and liquid processing method Dec. 31, 2013
8613803 Apparatus and method for indirect surface cleaning Dec. 24, 2013
8613287 Apparatus for preventing stiction of MEMS microstructure Dec. 24, 2013
8607806 Megasonic precision cleaning of semiconductor process equipment components and parts Dec. 17, 2013
8601639 Apparatus for application of two-phase contaminant removal medium Dec. 10, 2013
8591665 Wafer heating and temperature control by backside fluid injection Nov. 26, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8590547 Liquid processing apparatus Nov. 26, 2013
8584687 Sonication cleaning system Nov. 19, 2013
8578952 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme Nov. 12, 2013
8573236 Apparatus and method for ultrasonic wet treatment of plate-like articles Nov. 5, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8567339 Liquid processing apparatus Oct. 29, 2013
8562752 Single workpiece processing chamber Oct. 22, 2013
8562749 Wafer fabrication process Oct. 22, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8539969 Gigasonic brush for cleaning surfaces Sep. 24, 2013
8534303 Carrier for reducing entrance and/or exit marks left by a substrate-processing meniscus Sep. 17, 2013
8534302 Prober cleaning block assembly Sep. 17, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8505559 Cleaning apparatus and high pressure cleaner for use therein Aug. 13, 2013
8501025 Substrate treatment apparatus and substrate treatment method Aug. 6, 2013
8475602 Substrate cleaning method and apparatus Jul. 2, 2013
8470095 Process and installation for surface preparation by dielectric barrier discharge Jun. 25, 2013
8460478 Wet processing apparatuses Jun. 11, 2013
8449687 Wash ring assembly and method of use May. 28, 2013
8449684 Substrate cleaning method, substrate cleaning system and program storage medium May. 28, 2013
8448288 Semiconductor equipment May. 28, 2013
8444772 Liquid processing apparatus May. 21, 2013
8429831 Drug-eluting coatings applied to medical devices by spraying and drying to remove solvent Apr. 30, 2013
8409363 Method of fabricating semiconductor cleaners Apr. 2, 2013
8408221 Micro bubble generating device and silicon wafer cleaning apparatus Apr. 2, 2013
8404056 Process control for a sonication cleaning tank Mar. 26, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013

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