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Class Information
Number: 134/902
Name: Cleaning and liquid contact with solids > Semiconductor wafer
Description: Apparatus including means to contact a semiconductor wafer with a liquid.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7625452 |
Apparatuses and methods for cleaning a substrate |
Dec. 1, 2009 |
| 7622037 |
Ozonated water flow and concentration control apparatus and method |
Nov. 24, 2009 |
| 7614411 |
Controls of ambient environment during wafer drying using proximity head |
Nov. 10, 2009 |
| 7611581 |
Coating apparatus, coating method and coating-film forming apparatus |
Nov. 3, 2009 |
| 7608152 |
Substrate processing apparatus and method |
Oct. 27, 2009 |
| 7604424 |
Substrate processing apparatus |
Oct. 20, 2009 |
| 7604013 |
Substrate cleaning method and developing apparatus |
Oct. 20, 2009 |
| 7597816 |
Wafer bevel polymer removal |
Oct. 6, 2009 |
| 7597765 |
Post etch wafer surface cleaning with liquid meniscus |
Oct. 6, 2009 |
| 7597109 |
Spin scrubber apparatus |
Oct. 6, 2009 |
| 7596886 |
Method and system to separate and recycle divergent chemistries |
Oct. 6, 2009 |
| 7594969 |
Device for controlling dispensing error in photo spinner equipment |
Sep. 29, 2009 |
| 7591922 |
Substrate processing apparatus and substrate processing method |
Sep. 22, 2009 |
| 7591270 |
Process solutions containing surfactants |
Sep. 22, 2009 |
| 7584760 |
Substrate processing apparatus |
Sep. 8, 2009 |
| 7582212 |
Method of removing silicon dioxide from waste liquid, method of cleaning membrane tube and method of processing waste water |
Sep. 1, 2009 |
| 7581551 |
Cleaning apparatus |
Sep. 1, 2009 |
| 7581550 |
Method of cleaning reaction chamber using substrate having catalyst layer thereon |
Sep. 1, 2009 |
| 7581335 |
Substrate drying processing apparatus, method, and program recording medium |
Sep. 1, 2009 |
| 7572342 |
Method and apparatus for cleaning semiconductor photolithography tools |
Aug. 11, 2009 |
| 7568490 |
Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids |
Aug. 4, 2009 |
| 7568489 |
Method of and apparatus for eluting impurities |
Aug. 4, 2009 |
| 7568488 |
Enhanced wafer cleaning method |
Aug. 4, 2009 |
| 7566370 |
Wafer clamping apparatus and method for operating the same |
Jul. 28, 2009 |
| 7556697 |
System and method for carrying out liquid and subsequent drying treatments on one or more wafers |
Jul. 7, 2009 |
| 7549428 |
Substrate processing apparatus |
Jun. 23, 2009 |
| 7531047 |
Method of removing residue from a substrate after a DRIE process |
May. 12, 2009 |
| 7531045 |
Method for removing haze in a photo mask |
May. 12, 2009 |
| 7527698 |
Method and apparatus for removing a liquid from a surface of a substrate |
May. 5, 2009 |
| 7520285 |
Apparatus and method for processing a substrate |
Apr. 21, 2009 |
| 7520284 |
Apparatus for developing photoresist and method for operating the same |
Apr. 21, 2009 |
| 7513262 |
Substrate meniscus interface and methods for operation |
Apr. 7, 2009 |
| 7507297 |
Cleaning method and cleaning apparatus |
Mar. 24, 2009 |
| 7506654 |
Accelerated plasma clean |
Mar. 24, 2009 |
| 7506457 |
Substrate treating apparatus |
Mar. 24, 2009 |
| 7503983 |
Methods of proximity head brushing |
Mar. 17, 2009 |
| 7503334 |
Apparatus and methods for processing semiconductor substrates using supercritical fluids |
Mar. 17, 2009 |
| 7498269 |
Cleaning methods for silicon electrode assembly surface contamination removal |
Mar. 3, 2009 |
| 7497913 |
Method and apparatus for colloidal particle cleaning |
Mar. 3, 2009 |
| 7494597 |
Method and apparatus for etching disk-like member |
Feb. 24, 2009 |
| 7494549 |
Substrate treatment apparatus and substrate treatment method |
Feb. 24, 2009 |
| 7488400 |
Apparatus for etching wafer by single-wafer process |
Feb. 10, 2009 |
| 7481230 |
Plasma processing method and apparatus |
Jan. 27, 2009 |
| 7476290 |
Substrate processing apparatus and substrate processing method |
Jan. 13, 2009 |
| 7472713 |
Substrate processing apparatus |
Jan. 6, 2009 |
| 7470631 |
Methods for fabricating residue-free contact openings |
Dec. 30, 2008 |
| 7470344 |
Chemical dispensing system for semiconductor wafer processing |
Dec. 30, 2008 |
| 7468105 |
CMP cleaning composition with microbial inhibitor |
Dec. 23, 2008 |
| 7467635 |
Apparatus and method for substrate processing |
Dec. 23, 2008 |
| 7465359 |
Game ticket scratching device and method |
Dec. 16, 2008 |
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