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Class Information
Number: 134/66
Name: Cleaning and liquid contact with solids > Apparatus > Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices > With work transfer from one movable carrier to another
Description: Apparatus in which there are at least two movable work carriers or conveyors (i.e., movable to convey the work or work holder-not merely movable for adjustability of detachability of same) and means are provided to transfer the work from one to another in its travel through the machine from one work treating receptacle or station to another.










Sub-classes under this class:

Class Number Class Name Patents
134/69 Between plural rotary carriers on same axis 18
134/67 Including endless belt type 27


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8652268 Substrate treating method for treating substrates with treating liquids Feb. 18, 2014
8567417 Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Oct. 29, 2013
8475601 Apparatus and process for decontaminating oil boom Jul. 2, 2013
8409359 Substrate processing apparatus, substrate processing method and storage medium Apr. 2, 2013
8297293 Substrate support unit, and substrate treating apparatus and method using the same Oct. 30, 2012
8261756 Apparatus and process for decontaminating oil boom Sep. 11, 2012
8109281 Cleaning assembly for containers Feb. 7, 2012
8033288 Substrate treatment apparatus Oct. 11, 2011
7718011 Apparatus for cleaning and drying substrates May. 18, 2010
7694688 Wet clean system design Apr. 13, 2010
7661522 Container processing machine, and method for loading and unloading a container processing machine Feb. 16, 2010
7568489 Method of and apparatus for eluting impurities Aug. 4, 2009
7501038 Assembling apparatus, assembling method and terminal cleaning apparatus Mar. 10, 2009
7437832 Reduced pressure drying apparatus Oct. 21, 2008
7267128 Substrate treating apparatus Sep. 11, 2007
7252098 Apparatus for cleaning and drying substrates Aug. 7, 2007
7195021 In-situ cleaning of light source collector optics Mar. 27, 2007
7107999 Substrate processing apparatus for removing organic matter by removal liquid Sep. 19, 2006
7080652 Automated semiconductor processing systems Jul. 25, 2006
6945258 Substrate processing apparatus and method Sep. 20, 2005
6892740 Method and apparatus for transferring chips May. 17, 2005
6776173 Liquid processing apparatus Aug. 17, 2004
6763839 Substrate cleaning system Jul. 20, 2004
6745783 Cleaning processing method and cleaning processing apparatus Jun. 8, 2004
6746543 Apparatus for and method of cleaning objects to be processed Jun. 8, 2004
6736149 Method and apparatus for supercritical processing of multiple workpieces May. 18, 2004
6701942 Method of and apparatus for removing contaminants from surface of a substrate Mar. 9, 2004
6630031 Surface purification apparatus and surface purification method Oct. 7, 2003
6616771 Method and system for cleaning and reusing a cannula Sep. 9, 2003
6571806 Method for drying a substrate Jun. 3, 2003
6446646 Substrate processing apparatus Sep. 10, 2002
6342104 Method of cleaning objects to be processed Jan. 29, 2002
6328814 Apparatus for cleaning and drying substrates Dec. 11, 2001
6319329 Method of cleaning objects to be processed Nov. 20, 2001
6306224 Process and device for treatment of sheet objects in a liquid bath Oct. 23, 2001
6251232 Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatus Jun. 26, 2001
6251195 Method for transferring a microelectronic device to and from a processing chamber Jun. 26, 2001
6245156 Substrate transport method and apparatus, and substrate processing system Jun. 12, 2001
6230721 Processing apparatus and method, robot apparatus May. 15, 2001
6202655 Anodizing apparatus and apparatus and method associated with the same Mar. 20, 2001
6155276 Apparatus and method for removing soil contaminants Dec. 5, 2000
6138694 Multiple stage wet processing platform and method of use Oct. 31, 2000
6125862 Cleaning apparatus Oct. 3, 2000
6082382 Continuous washing device for vegetables, fiber, or other materials Jul. 4, 2000
6068002 Cleaning and drying apparatus, wafer processing system and wafer processing method May. 30, 2000
6056828 Substrate conveying device and substrate conveying method May. 2, 2000
6026830 Post-CMP cleaner apparatus and method Feb. 22, 2000
6021790 Substrate treating apparatus and method for treating substrate Feb. 8, 2000
6012471 Automated method and apparatus for single sided hydration of soft contact lenses in package carriers Jan. 11, 2000
5979473 Method and apparatus for washing fruit Nov. 9, 1999

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