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Class Information
Number: 134/61
Name: Cleaning and liquid contact with solids > Apparatus > Sequential work treating receptacles or stations with means to transfer work or fluid-applying devices
Description: Apparatus having two or more distinct work treating receptacles, treating stations, or fluid applying devices, and having, in addition, means that carries, conveys, or transfers the work from one such receptacle or station to another, or transfers the receptacles or fluid applying devices from one location to another so as to afford sequential treatment of the work with different fluids.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7405164 |
Apparatus and method for removing a photoresist structure from a substrate |
Jul. 29, 2008 |
| 7392812 |
Substrate processing apparatus and substrate transporting device mounted thereto |
Jul. 1, 2008 |
| 7384484 |
Substrate processing method, substrate processing apparatus and substrate processing system |
Jun. 10, 2008 |
| 7346956 |
Automatic cart wash apparatus |
Mar. 25, 2008 |
| 7332440 |
Wet etching apparatus and method |
Feb. 19, 2008 |
| 7284560 |
Liquid processing apparatus |
Oct. 23, 2007 |
| 7267128 |
Substrate treating apparatus |
Sep. 11, 2007 |
| 7252098 |
Apparatus for cleaning and drying substrates |
Aug. 7, 2007 |
| 7182820 |
Methods and apparatus for cleaning a hearing aid device |
Feb. 27, 2007 |
| 7114508 |
Cleaning apparatus having multiple wash tanks for carbon dioxide dry cleaning and methods of using same |
Oct. 3, 2006 |
| 7086405 |
Screenings washer |
Aug. 8, 2006 |
| 7080650 |
Screenings washer |
Jul. 25, 2006 |
| 7060422 |
Method of supercritical processing of a workpiece |
Jun. 13, 2006 |
| 7011714 |
Method and device for treating the surfaces of metallic strip material, especially for pickling rolled material |
Mar. 14, 2006 |
| 6945258 |
Substrate processing apparatus and method |
Sep. 20, 2005 |
| 6941956 |
Substrate treating method and apparatus |
Sep. 13, 2005 |
| 6926798 |
Apparatus for supercritical processing of a workpiece |
Aug. 9, 2005 |
| 6923872 |
Arrangement and method for cleaning fine solid particles from a continuously flowing liquid suspension |
Aug. 2, 2005 |
| 6913028 |
Flexible container for liquid transport, liquid transport method using the container, liquid transport apparatus using the container, method for washing the container, and washing equipment |
Jul. 5, 2005 |
| 6910489 |
Composition for eliminating thermosetting resin |
Jun. 28, 2005 |
| 6899109 |
Method and apparatus for reducing He backside faults during wafer processing |
May. 31, 2005 |
| 6887358 |
Installation for processing wafers |
May. 3, 2005 |
| 6849153 |
Removal of post-rie polymer on A1/CU metal line |
Feb. 1, 2005 |
| 6833109 |
Method and apparatus for storing a semiconductor wafer after its CMP polishing |
Dec. 21, 2004 |
| 6823876 |
Methodology of rotational etching tool maintenance |
Nov. 30, 2004 |
| 6818178 |
Method for high vacuum sterilization of closures |
Nov. 16, 2004 |
| 6799589 |
Method and apparatus for wet-cleaning substrate |
Oct. 5, 2004 |
| 6792957 |
Wet etching apparatus and method |
Sep. 21, 2004 |
| 6763839 |
Substrate cleaning system |
Jul. 20, 2004 |
| 6748960 |
Apparatus for supercritical processing of multiple workpieces |
Jun. 15, 2004 |
| 6745783 |
Cleaning processing method and cleaning processing apparatus |
Jun. 8, 2004 |
| 6746543 |
Apparatus for and method of cleaning objects to be processed |
Jun. 8, 2004 |
| 6742529 |
Resin recycling system |
Jun. 1, 2004 |
| 6732750 |
Semiconductor wafer cleaning apparatus and method of using the same |
May. 11, 2004 |
| 6701942 |
Method of and apparatus for removing contaminants from surface of a substrate |
Mar. 9, 2004 |
| 6647642 |
Liquid processing apparatus and method |
Nov. 18, 2003 |
| 6647998 |
Electrostatic charge-free solvent-type dryer for semiconductor wafers |
Nov. 18, 2003 |
| 6641781 |
System for cleaning, disinfecting and/or drying endoscropes |
Nov. 4, 2003 |
| 6634370 |
Liquid treatment system and liquid treatment method |
Oct. 21, 2003 |
| 6625901 |
Apparatus and method for drying a thin substrate |
Sep. 30, 2003 |
| 6622738 |
Apparatus and system for removing photoresist through the use of hot deionized water bath, water vapor and ozone gas |
Sep. 23, 2003 |
| 6620257 |
Scrub cleaning method for substrate and manufacturing method for information recording medium |
Sep. 16, 2003 |
| 6615852 |
Cleaning machine for die used for synthetic resin mould |
Sep. 9, 2003 |
| 6616771 |
Method and system for cleaning and reusing a cannula |
Sep. 9, 2003 |
| 6613156 |
Apparatus and method for photoresist stripping |
Sep. 2, 2003 |
| 6595220 |
Apparatus for conveying a workpiece |
Jul. 22, 2003 |
| 6578589 |
Apparatus for manufacturing semiconductor wafer |
Jun. 17, 2003 |
| 6578588 |
Unified strip/cleaning apparatus |
Jun. 17, 2003 |
| 6571806 |
Method for drying a substrate |
Jun. 3, 2003 |
| 6543461 |
Buffer system for a wafer handling system field of the invention |
Apr. 8, 2003 |
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