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Browse by Category: Main > Material Science
Class Information
Number: 134/37
Name: Cleaning and liquid contact with solids > Processes > With treating fluid motion > Gas or vapor blasts or currents
Description: Processes which include treating the work with a gaseous or vaporous blast or a gaseous or vaporous current.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8685175 Apparatus and process for isomerizing a hydrocarbon stream Apr. 1, 2014
8685174 Process for cleaning hard surfaces Apr. 1, 2014
8673087 Reducing copper defects during a wet chemical cleaning of exposed copper surfaces in a metallization layer of a semiconductor device Mar. 18, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8641831 Non-chemical, non-optical edge bead removal process Feb. 4, 2014
8624210 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jan. 7, 2014
8608865 Device and method for deburring and/or cleaning a work piece dipped in a fluid medium Dec. 17, 2013
8591667 Apparatus and method for cleaning electronic jacks of debris Nov. 26, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8585826 Apparatus and method for cleaning flexible webs Nov. 19, 2013
8580039 Surface treatment method of metal member and cleaning nozzle Nov. 12, 2013
8580044 Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber Nov. 12, 2013
8580046 Method for the treatment of a semiconductor wafer Nov. 12, 2013
8574371 Method for cleaning containers and cleaning machine Nov. 5, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8557051 Method for using generator for foam to clean substrate Oct. 15, 2013
8545637 Cleaning device and cleaning method Oct. 1, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8524009 Substrate treating method Sep. 3, 2013
8506718 Polymer removing apparatus and method Aug. 13, 2013
8492736 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jul. 23, 2013
8480812 Process for removing hydrocarbons and noxious gasses from reactors and media-packed equipment Jul. 9, 2013
8470096 Paint bell cup cleaning method Jun. 25, 2013
8459277 Chemical cleaning method and system with steam injection Jun. 11, 2013
8460478 Wet processing apparatuses Jun. 11, 2013
8454761 Apparatus and system for cleaning baseball bases Jun. 4, 2013
8454756 Methods for extending the lifetime of pressure gauges coupled to substrate process chambers Jun. 4, 2013
8454752 Foreign substance removing apparatus, foreign substance removing method, and storage medium Jun. 4, 2013
8435358 Conveyor dishwasher and method for operating a conveyor dishwasher May. 7, 2013
8419862 Method for removing a contamination layer from an optical surface and arrangement therefor as well as a method for generating a cleaning gas and arrangement therefor Apr. 16, 2013
8421046 Optical sensor for detecting valuable documents and method for keeping a sensor window of the sensor clean Apr. 16, 2013
8414708 Method and apparatus for cleaning photomask Apr. 9, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8382909 Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system Feb. 26, 2013
8377225 Submerged membrane separation apparatus, cleaning method for diffusing apparatus, and method for membrane separation Feb. 19, 2013
8377216 Vacuum processing apparatus and vacuum processing method Feb. 19, 2013
8372212 Supercritical drying method and apparatus for semiconductor substrates Feb. 12, 2013
8361240 Substrate processing apparatus and substrate processing method Jan. 29, 2013
8357245 Stripe removal system Jan. 22, 2013
8337629 Method for cleaning elements in vacuum chamber and apparatus for processing substrates Dec. 25, 2012
8323420 Method for removing material from semiconductor wafer and apparatus for performing the same Dec. 4, 2012
8313579 Workpiece cleaning Nov. 20, 2012
8298345 Method for cleaning a heat exchanger Oct. 30, 2012
8293020 Method of megasonic cleaning of an object Oct. 23, 2012
8287967 Method and apparatus for processing workpiece Oct. 16, 2012
8277567 Method of cleaning turbo pump and chamber/turbo pump clean process Oct. 2, 2012
8277565 Method for cleaning tanks Oct. 2, 2012
8277564 Method for removing a hardened photoresist Oct. 2, 2012

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