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Browse by Category: Main > Material Science
Class Information
Number: 134/35
Name: Cleaning and liquid contact with solids > Processes > With treating fluid motion > Caused by heating
Description: Processes in which the treating fluid motion is caused by heating.










Patents under this class:
1 2 3 4

Patent Number Title Of Patent Date Issued
8673086 Method and device for cleaning a substrate and storage medium Mar. 18, 2014
8663397 Processing and cleaning substrates Mar. 4, 2014
8624210 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jan. 7, 2014
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8580039 Surface treatment method of metal member and cleaning nozzle Nov. 12, 2013
8574371 Method for cleaning containers and cleaning machine Nov. 5, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545635 Hard floor surface care process Oct. 1, 2013
8540821 Teat cup cleaning device and method Sep. 24, 2013
8496760 Method of operating a dishwasher with closed loop condenser Jul. 30, 2013
8492736 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jul. 23, 2013
8486201 Method for drying a semiconductor wafer Jul. 16, 2013
8465596 Supercritical processing apparatus and supercritical processing method Jun. 18, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8361238 Process for removing polymeric fouling Jan. 29, 2013
8349089 Dishwasher having dedicated sprayer for silverware basket Jan. 8, 2013
8277565 Method for cleaning tanks Oct. 2, 2012
8268085 Methods for forming metal gate transistors Sep. 18, 2012
8216384 Combinatorial approach to the development of cleaning formulations for wet removal of high dose implant photoresist Jul. 10, 2012
8216386 Atmosphere exchange method Jul. 10, 2012
8211238 System, method and apparatus for self-cleaning dry etch Jul. 3, 2012
8197605 Use of alkanesulfonic acid as agent for cleaning cement, mortar and concrete Jun. 12, 2012
8187389 Method of removing resist and apparatus therefor May. 29, 2012
8177913 Cleaning apparatus and method utilizing sublimation of nanofabricated particles May. 15, 2012
8128755 Cleaning solvent and cleaning method for metallic compound Mar. 6, 2012
8118945 Substrate processing method and substrate processing apparatus Feb. 21, 2012
8088455 Laser treatment apparatus Jan. 3, 2012
8029623 Acid removal in cleaning processes Oct. 4, 2011
8025736 Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma Sep. 27, 2011
8007594 Method for manufacturing semiconductor device Aug. 30, 2011
7955440 Method for cleaning silicon wafer and apparatus for cleaning the silicon wafer Jun. 7, 2011
7947130 Troika acid semiconductor cleaning compositions and methods of use May. 24, 2011
7931753 Method for removing deposits containing magnetite and copper from containers in industrial and power plants Apr. 26, 2011
7905963 Apparatus and method for washing polycrystalline silicon Mar. 15, 2011
7901514 Substrate cleaning method and developing apparatus Mar. 8, 2011
7896973 Substrate processing apparatus and substrate processing method Mar. 1, 2011
7879155 Process for removal of paint from plastic substrates Feb. 1, 2011
7879153 Method for cleaning metal nanoparticles Feb. 1, 2011
7846261 Methods of using halogen-containing organic compounds to remove deposits from internal surfaces of turbine engine components Dec. 7, 2010
7837805 Methods for treating surfaces Nov. 23, 2010
7828908 Acid cleaning and corrosion inhibiting compositions comprising gluconic acid Nov. 9, 2010
7749330 Washer and decontaminator with lid control Jul. 6, 2010
7744701 Process for removal of paint from plastic substrates Jun. 29, 2010
7736442 Method for activating surface of base material and apparatus thereof Jun. 15, 2010
7736439 Method for cleaning a polysilicon fraction Jun. 15, 2010
7691208 Cleaning method Apr. 6, 2010
7641738 Method of wet cleaning a surface, especially of a material of the silicon-germanium type Jan. 5, 2010
7637269 Low damage method for ashing a substrate using CO.sub.2/CO-based process Dec. 29, 2009

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