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Class Information
Number: 134/34
Name: Cleaning and liquid contact with solids > Processes > With treating fluid motion
Description: Processes in which the treating fluid has motion during the work treatment.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 6277753 |
Removal of CMP residue from semiconductors using supercritical carbon dioxide process |
Aug. 21, 2001 |
| 6277205 |
Method and apparatus for cleaning photomask |
Aug. 21, 2001 |
| 6277203 |
Method and apparatus for cleaning low K dielectric and metal wafer surfaces |
Aug. 21, 2001 |
| 6273100 |
Surface cleaning apparatus and method |
Aug. 14, 2001 |
| 6273098 |
Extension of the useful life of a chemical bath used to process a substrate |
Aug. 14, 2001 |
| 6274059 |
Method to remove metals in a scrubber |
Aug. 14, 2001 |
| 6274506 |
Apparatus and method for dispensing processing fluid toward a substrate surface |
Aug. 14, 2001 |
| 6273102 |
Method of cleaning and maintaining petroleum refining plants |
Aug. 14, 2001 |
| 6273962 |
Method to reduce the particles in load-lock chamber |
Aug. 14, 2001 |
| 6270586 |
Vehicle washing device |
Aug. 7, 2001 |
| 6264753 |
Liquid carbon dioxide cleaning using agitation enhancements at low temperature |
Jul. 24, 2001 |
| 6261378 |
Substrate cleaning unit and cleaning method |
Jul. 17, 2001 |
| 6258178 |
Method for removing coated film from plastic bumper of automobile |
Jul. 10, 2001 |
| 6256825 |
Removal of particulate contamination in loadlocks |
Jul. 10, 2001 |
| 6257253 |
Percarboxylic acid rinse method |
Jul. 10, 2001 |
| 6248178 |
Method for removing pad nodules |
Jun. 19, 2001 |
| 6248179 |
Method of removing polymeric material on a silicon water |
Jun. 19, 2001 |
| 6248180 |
Method for removing particles from a semiconductor wafer |
Jun. 19, 2001 |
| 6245155 |
Method for removing photoresist and plasma etch residues |
Jun. 12, 2001 |
| 6245250 |
Process vessel |
Jun. 12, 2001 |
| 6240935 |
Boelube R dissolving alkaline cleaning solution |
Jun. 5, 2001 |
| 6235127 |
Method of making a toilet bowl cleaning tablet |
May. 22, 2001 |
| 6235124 |
Method and solution for removal of mildew |
May. 22, 2001 |
| 6235123 |
Chemical cleaning system for electrodes used in a liquid environment |
May. 22, 2001 |
| 6231683 |
Method for cleaning radioactively contaminated material |
May. 15, 2001 |
| 6231676 |
Cleaning process for disc drive components |
May. 15, 2001 |
| 6227212 |
Semiconductor workpiece cleaning method and apparatus |
May. 8, 2001 |
| 6217670 |
Method of manufacturing coated fluid tubing |
Apr. 17, 2001 |
| 6213133 |
Method and apparatus for flushing contaminants from oil in an oil cooler |
Apr. 10, 2001 |
| 6210492 |
Cleaning solution spraying system and method |
Apr. 3, 2001 |
| 6209552 |
Method of preventing or reducing formation of polymeric deposits in vessels during emptying |
Apr. 3, 2001 |
| 6206970 |
Semiconductor wafer processor, semiconductor processor gas filtering system and semiconductor processing methods |
Mar. 27, 2001 |
| 6203623 |
Aerosol assisted chemical cleaning method |
Mar. 20, 2001 |
| 6196238 |
Apparatus for removing coated film from plastic bumper of automobile |
Mar. 6, 2001 |
| 6197738 |
Nontoxic sanitizing cleanser based on organic acids and methods of using same |
Mar. 6, 2001 |
| 6193808 |
Method of washing motor vehicles including two movable gantries |
Feb. 27, 2001 |
| 6187105 |
Method of removing deposits from a conduit wall |
Feb. 13, 2001 |
| 6187107 |
Mixture for drying solids by the movement of water |
Feb. 13, 2001 |
| 6187108 |
Alkylene carbonate-based cleaners |
Feb. 13, 2001 |
| 6179930 |
Pull-up drying method and apparatus |
Jan. 30, 2001 |
| 6177279 |
Ion extraction process for single side wafers |
Jan. 23, 2001 |
| 6176941 |
Method of removing contaminants from an epidermal surface using an oscillating fluidic spray |
Jan. 23, 2001 |
| 6176937 |
Process for treating a metal surface with an acidic solution containing hydrogen peroxide and a stabilizer |
Jan. 23, 2001 |
| 6167892 |
Method for washing prefoamed particles |
Jan. 2, 2001 |
| 6165278 |
Removing thermal grease from electronic cards |
Dec. 26, 2000 |
| 6165279 |
Method for cleaning a semiconductor wafer |
Dec. 26, 2000 |
| 6162302 |
Method of cleaning quartz substrates using conductive solutions |
Dec. 19, 2000 |
| 6159303 |
Liquid displacement apparatus and liquid displacement method |
Dec. 12, 2000 |
| 6158445 |
Semiconductor wafer cleaning method |
Dec. 12, 2000 |
| 6156126 |
Method for reducing or avoiding the formation of a silicon recess in SDE junction regions |
Dec. 5, 2000 |
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