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Browse by Category: Main > Material Science
Class Information
Number: 134/33
Name: Cleaning and liquid contact with solids > Processes > With work or work parts movable during treatment > Centrifugal force and/or rotated work body
Description: Processes in which the work is subjected to centrifugal force and/or the work is rotated.










Patents under this class:
1 2 3 4 5 6 7 8 9 10 11

Patent Number Title Of Patent Date Issued
8691022 Method and apparatus for processing wafer-shaped articles Apr. 8, 2014
8663397 Processing and cleaning substrates Mar. 4, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8652268 Substrate treating method for treating substrates with treating liquids Feb. 18, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8591662 Methods for cleaning a semiconductor substrate Nov. 26, 2013
8578953 Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium Nov. 12, 2013
8574371 Method for cleaning containers and cleaning machine Nov. 5, 2013
8562752 Single workpiece processing chamber Oct. 22, 2013
8557705 Method of manufacturing semiconductor device and apparatus for manufacturing semiconductor device Oct. 15, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8518189 Vapor clean for haze and particle removal from lithographic photomasks Aug. 27, 2013
8500915 Substrate transporting apparatus, substrate platform shelf and substrate processing apparatus Aug. 6, 2013
8480810 Method and apparatus for particle removal Jul. 9, 2013
8454752 Foreign substance removing apparatus, foreign substance removing method, and storage medium Jun. 4, 2013
8454754 Cleaning method and method for manufacturing electronic device Jun. 4, 2013
8414708 Method and apparatus for cleaning photomask Apr. 9, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8377219 Method for cleaning a semiconductor wafer composed of silicon directly after a process of polishing of the semiconductor wafer Feb. 19, 2013
8349089 Dishwasher having dedicated sprayer for silverware basket Jan. 8, 2013
8343287 Apparatus for ejecting fluid onto a substrate and system and method incorporating the same Jan. 1, 2013
8337632 Apparatus and method for cleaning an electric hair-cutting device, and kit including such an apparatus Dec. 25, 2012
8313579 Workpiece cleaning Nov. 20, 2012
8308870 Cleaning apparatus, cleaning method and recording medium Nov. 13, 2012
8303718 Sterilizable washing machine using ultraviolet radiation and sterilizable washing method in the same Nov. 6, 2012
8303723 Liquid processing apparatus, liquid processing method, and storage medium Nov. 6, 2012
8277569 Substrate treating apparatus and substrate treating method Oct. 2, 2012
8268087 Liquid processing apparatus, liquid processing method, and storage medium Sep. 18, 2012
8268086 Method for processing a photomask for semiconductor devices Sep. 18, 2012
8268085 Methods for forming metal gate transistors Sep. 18, 2012
8257505 Method for megasonic processing of an article Sep. 4, 2012
8246759 Substrate processing apparatus, substrate processing method, and program storage medium Aug. 21, 2012
8226772 Methods of removing particles from over semiconductor substrates Jul. 24, 2012
8216389 Substrate cleaning method and substrate cleaning apparatus Jul. 10, 2012
8218124 Substrate processing apparatus with multi-speed drying having rinse liquid supplier that moves from center of rotated substrate to its periphery and stops temporarily so that a drying core can Jul. 10, 2012
8206510 Method and apparatus for an in-situ ultraviolet cleaning tool Jun. 26, 2012
8197604 Method and apparatus for controlling optimal operation of acoustic cleaning Jun. 12, 2012
8197606 Substrate cleaning method, substrate cleaning apparatus, control program, and computer-readable storage medium Jun. 12, 2012
8187387 Dryer and method of controlling cleaning operation thereof May. 29, 2012
8172954 Apparatus for simultaneous two-disk scrubbing and washing May. 8, 2012
8152932 Method for removing scum in a drum washing machine, and drum washing machine suitable for this purpose Apr. 10, 2012
8152933 Substrate processing apparatus, substrate processing method, and drain cup cleaning method Apr. 10, 2012
8147617 Substrate cleaning method and computer readable storage medium Apr. 3, 2012
8147618 Device and method for liquid treating disc-like articles Apr. 3, 2012
8136189 Method for controlling washing course of washing machine Mar. 20, 2012
8133327 Substrate processing method, storage medium and substrate processing apparatus Mar. 13, 2012
8118945 Substrate processing method and substrate processing apparatus Feb. 21, 2012
8080113 Method and apparatus for collecting chemicals from semiconductor wafer Dec. 20, 2011

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