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Class Information
Number: 134/31
Name: Cleaning and liquid contact with solids > Processes > Gas or vapor condensation or absorption oowork
Description: Processes in which a gas or a vapor is caused to be condensed upon or absorbed on the work.

Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12

Patent Number Title Of Patent Date Issued
8702871 Package assembly cleaning process using vaporized solvent Apr. 22, 2014
8673086 Method and device for cleaning a substrate and storage medium Mar. 18, 2014
8673087 Reducing copper defects during a wet chemical cleaning of exposed copper surfaces in a metallization layer of a semiconductor device Mar. 18, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8647440 Substrate processing method and substrate processing apparatus Feb. 11, 2014
8580039 Surface treatment method of metal member and cleaning nozzle Nov. 12, 2013
8574369 Method of removing resist and apparatus therefor Nov. 5, 2013
8568535 Systems and methods for exposing semiconductor workpieces to vapors for through-hole cleaning and/or other processes Oct. 29, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8518189 Vapor clean for haze and particle removal from lithographic photomasks Aug. 27, 2013
8496760 Method of operating a dishwasher with closed loop condenser Jul. 30, 2013
8486291 Plasma processing method Jul. 16, 2013
8480812 Process for removing hydrocarbons and noxious gasses from reactors and media-packed equipment Jul. 9, 2013
8460478 Wet processing apparatuses Jun. 11, 2013
8454761 Apparatus and system for cleaning baseball bases Jun. 4, 2013
8425685 Method for controlling a dish washing machine Apr. 23, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8393091 Substrate processing method, and method of manufacturing semiconductor device Mar. 12, 2013
8377216 Vacuum processing apparatus and vacuum processing method Feb. 19, 2013
8372212 Supercritical drying method and apparatus for semiconductor substrates Feb. 12, 2013
8361814 Method for monitoring chamber cleanliness Jan. 29, 2013
8361240 Substrate processing apparatus and substrate processing method Jan. 29, 2013
8354072 Corrosion management systems for controlling, eliminating and/or managing corrosion Jan. 15, 2013
8318104 Waste treatment apparatus and method Nov. 27, 2012
8313581 Industrial cleaning system and methods related thereto Nov. 20, 2012
8308871 Thermal cleaning gas production and supply system Nov. 13, 2012
8309021 Corrosion management systems for controlling, eliminating and/or managing corrosion Nov. 13, 2012
8277728 Method of sterilizing an orthopaedic implant Oct. 2, 2012
8277564 Method for removing a hardened photoresist Oct. 2, 2012
8246757 Pyrolysis methods and ovens therefor Aug. 21, 2012
8241429 Removal of aromatic hydrocarbons from coke-oven gas by absorption Aug. 14, 2012
8221555 Dishwasher machine with a sound wave generator and relevant method Jul. 17, 2012
8206488 Fluoride ion cleaning method Jun. 26, 2012
8187389 Method of removing resist and apparatus therefor May. 29, 2012
8142571 Process for treatment of semiconductor wafer using water vapor containing environment Mar. 27, 2012
8133327 Substrate processing method, storage medium and substrate processing apparatus Mar. 13, 2012
8066820 Process for cleaning articles Nov. 29, 2011
8034191 Cleaning plant Oct. 11, 2011
8029622 Substrate processing apparatus, liquid film freezing method and substrate processing method Oct. 4, 2011
8025736 Semiconductor device fabrication equipment for performing PEOX process and method including cleaning the equipment with remotely produced plasma Sep. 27, 2011
8025841 Method of sterilizing an orthopaedic implant Sep. 27, 2011
8021492 Method of cleaning turbo pump and chamber/turbo pump clean process Sep. 20, 2011
8007718 System for and method of processing bone material using supercritical fluids Aug. 30, 2011
7988789 System and method for low temperature hydration of food soils Aug. 2, 2011
7967913 Remote plasma clean process with cycled high and low pressure clean steps Jun. 28, 2011
7964040 Multi-port pumping system for substrate processing chambers Jun. 21, 2011
7947220 Method of sterilizing an orthopaedic implant May. 24, 2011
7942976 Substrate processing apparatus and substrate processing method May. 17, 2011

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