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Browse by Category: Main > Material Science
Class Information
Number: 134/30
Name: Cleaning and liquid contact with solids > Processes > Using sequentially applied treating agents > Including steam, gaseous agent or temperature feature
Description: Processes which include treating the work with steam or gas, or heating or cooling the work or treating it at specified temperatures or with an agent which has a specified temperature or with plural agents at different temperatures.










Patents under this class:
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Patent Number Title Of Patent Date Issued
8702871 Package assembly cleaning process using vaporized solvent Apr. 22, 2014
8691019 Process for cleaning a compound semiconductor wafer Apr. 8, 2014
8668778 Method of removing liquid from a barrier structure Mar. 11, 2014
8663397 Processing and cleaning substrates Mar. 4, 2014
8656604 Condensation dryer with a housing Feb. 25, 2014
8652268 Substrate treating method for treating substrates with treating liquids Feb. 18, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8647440 Substrate processing method and substrate processing apparatus Feb. 11, 2014
8647445 Process for cleaning semiconductor devices and/or tooling during manufacturing thereof Feb. 11, 2014
8641985 Control system for ozone sterilization in multiple compact chambers Feb. 4, 2014
8636018 Microbubble cleaning system for a large product such as a vehicle Jan. 28, 2014
8636114 Bicycle chain cleaning and lubrication techniques Jan. 28, 2014
8621892 Cloth treating apparatus Jan. 7, 2014
8624210 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jan. 7, 2014
8608861 Method for the decontamination of an oxide layer-containing surface of a component or a system of a nuclear facility Dec. 17, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8591665 Wafer heating and temperature control by backside fluid injection Nov. 26, 2013
8585826 Apparatus and method for cleaning flexible webs Nov. 19, 2013
8585917 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Nov. 19, 2013
8580046 Method for the treatment of a semiconductor wafer Nov. 12, 2013
8578953 Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium Nov. 12, 2013
8580039 Surface treatment method of metal member and cleaning nozzle Nov. 12, 2013
8574371 Method for cleaning containers and cleaning machine Nov. 5, 2013
8562750 Method and apparatus for processing bevel edge Oct. 22, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545635 Hard floor surface care process Oct. 1, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8535855 Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask Sep. 17, 2013
8524009 Substrate treating method Sep. 3, 2013
8518187 Transfer pick cleaning method Aug. 27, 2013
8518188 Method of controlling dishwasher Aug. 27, 2013
8511436 Bicycle chain cleaner and lubrication apparatus Aug. 20, 2013
8506721 Dish washer and controlling method thereof Aug. 13, 2013
8506722 Method for cleaning filtering membrane Aug. 13, 2013
8496760 Method of operating a dishwasher with closed loop condenser Jul. 30, 2013
8492736 Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates Jul. 23, 2013
8486201 Method for drying a semiconductor wafer Jul. 16, 2013
8481434 Method of manufacturing a semiconductor device and processing apparatus Jul. 9, 2013
8480812 Process for removing hydrocarbons and noxious gasses from reactors and media-packed equipment Jul. 9, 2013
8480807 Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure Jul. 9, 2013
8465596 Supercritical processing apparatus and supercritical processing method Jun. 18, 2013
8460478 Wet processing apparatuses Jun. 11, 2013
8439051 Method of substrate processing, substrate processing system, and storage medium May. 14, 2013
8435358 Conveyor dishwasher and method for operating a conveyor dishwasher May. 7, 2013
8414708 Method and apparatus for cleaning photomask Apr. 9, 2013
8409361 Controlling method of dishwasher Apr. 2, 2013
8409364 Process for removing a composite coating present on the surface of a gas cartridge Apr. 2, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8388761 Method for container sterilizing and washing and apparatus therefor Mar. 5, 2013

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