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Class Information
Number: 134/30
Name: Cleaning and liquid contact with solids > Processes > Using sequentially applied treating agents > Including steam, gaseous agent or temperature feature
Description: Processes which include treating the work with steam or gas, or heating or cooling the work or treating it at specified temperatures or with an agent which has a specified temperature or with plural agents at different temperatures.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 8702871 |
Package assembly cleaning process using vaporized solvent |
Apr. 22, 2014 |
| 8691019 |
Process for cleaning a compound semiconductor wafer |
Apr. 8, 2014 |
| 8668778 |
Method of removing liquid from a barrier structure |
Mar. 11, 2014 |
| 8663397 |
Processing and cleaning substrates |
Mar. 4, 2014 |
| 8656604 |
Condensation dryer with a housing |
Feb. 25, 2014 |
| 8652268 |
Substrate treating method for treating substrates with treating liquids |
Feb. 18, 2014 |
| 8647446 |
Method and system for improving performance and preventing corrosion in multi-module cleaning chamber |
Feb. 11, 2014 |
| 8647440 |
Substrate processing method and substrate processing apparatus |
Feb. 11, 2014 |
| 8647445 |
Process for cleaning semiconductor devices and/or tooling during manufacturing thereof |
Feb. 11, 2014 |
| 8641985 |
Control system for ozone sterilization in multiple compact chambers |
Feb. 4, 2014 |
| 8636018 |
Microbubble cleaning system for a large product such as a vehicle |
Jan. 28, 2014 |
| 8636114 |
Bicycle chain cleaning and lubrication techniques |
Jan. 28, 2014 |
| 8621892 |
Cloth treating apparatus |
Jan. 7, 2014 |
| 8624210 |
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates |
Jan. 7, 2014 |
| 8608861 |
Method for the decontamination of an oxide layer-containing surface of a component or a system of a nuclear facility |
Dec. 17, 2013 |
| 8591661 |
Low damage photoresist strip method for low-K dielectrics |
Nov. 26, 2013 |
| 8591665 |
Wafer heating and temperature control by backside fluid injection |
Nov. 26, 2013 |
| 8585826 |
Apparatus and method for cleaning flexible webs |
Nov. 19, 2013 |
| 8585917 |
Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods |
Nov. 19, 2013 |
| 8580046 |
Method for the treatment of a semiconductor wafer |
Nov. 12, 2013 |
| 8578953 |
Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium |
Nov. 12, 2013 |
| 8580039 |
Surface treatment method of metal member and cleaning nozzle |
Nov. 12, 2013 |
| 8574371 |
Method for cleaning containers and cleaning machine |
Nov. 5, 2013 |
| 8562750 |
Method and apparatus for processing bevel edge |
Oct. 22, 2013 |
| 8562751 |
Dry cleaning method of substrate processing apparatus |
Oct. 22, 2013 |
| 8551253 |
Post polish disk cleaning process |
Oct. 8, 2013 |
| 8545635 |
Hard floor surface care process |
Oct. 1, 2013 |
| 8545640 |
Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus |
Oct. 1, 2013 |
| 8535855 |
Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask |
Sep. 17, 2013 |
| 8524009 |
Substrate treating method |
Sep. 3, 2013 |
| 8518187 |
Transfer pick cleaning method |
Aug. 27, 2013 |
| 8518188 |
Method of controlling dishwasher |
Aug. 27, 2013 |
| 8511436 |
Bicycle chain cleaner and lubrication apparatus |
Aug. 20, 2013 |
| 8506721 |
Dish washer and controlling method thereof |
Aug. 13, 2013 |
| 8506722 |
Method for cleaning filtering membrane |
Aug. 13, 2013 |
| 8496760 |
Method of operating a dishwasher with closed loop condenser |
Jul. 30, 2013 |
| 8492736 |
Ozone plenum as UV shutter or tunable UV filter for cleaning semiconductor substrates |
Jul. 23, 2013 |
| 8486201 |
Method for drying a semiconductor wafer |
Jul. 16, 2013 |
| 8481434 |
Method of manufacturing a semiconductor device and processing apparatus |
Jul. 9, 2013 |
| 8480812 |
Process for removing hydrocarbons and noxious gasses from reactors and media-packed equipment |
Jul. 9, 2013 |
| 8480807 |
Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure |
Jul. 9, 2013 |
| 8465596 |
Supercritical processing apparatus and supercritical processing method |
Jun. 18, 2013 |
| 8460478 |
Wet processing apparatuses |
Jun. 11, 2013 |
| 8439051 |
Method of substrate processing, substrate processing system, and storage medium |
May. 14, 2013 |
| 8435358 |
Conveyor dishwasher and method for operating a conveyor dishwasher |
May. 7, 2013 |
| 8414708 |
Method and apparatus for cleaning photomask |
Apr. 9, 2013 |
| 8409361 |
Controlling method of dishwasher |
Apr. 2, 2013 |
| 8409364 |
Process for removing a composite coating present on the surface of a gas cartridge |
Apr. 2, 2013 |
| 8404052 |
Method for cleaning the surface of a silicon substrate |
Mar. 26, 2013 |
| 8388761 |
Method for container sterilizing and washing and apparatus therefor |
Mar. 5, 2013 |
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