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Class Information
Number: 134/26
Name: Cleaning and liquid contact with solids > Processes > Using sequentially applied treating agents
Description: Processes in which two or more treating agents are sequentially applied to the work.










Sub-classes under this class:

Class Number Class Name Patents
134/30 Including steam, gaseous agent or temperature feature 862
134/27 One a neutralizer for another 228
134/29 One a soap or an alkaline agent 575
134/28 One an acid or an acid salt 711


Patents under this class:
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Patent Number Title Of Patent Date Issued
6371134 Ozone cleaning of wafers Apr. 16, 2002
6368415 Method for washing semiconductor substrate and washing apparatus therefor Apr. 9, 2002
6368419 Non-destructive oil recovery method Apr. 9, 2002
6368420 Detergent composition and method for warewashing Apr. 9, 2002
6363950 Apparatus for processing substrate using process solutions having desired mixing ratios Apr. 2, 2002
6361614 Dark spin rinse/dry Mar. 26, 2002
6361617 Method and device for cleaning objects Mar. 26, 2002
6357453 System and method for cleaning cathode ray tube funnels prior to application of interior coating Mar. 19, 2002
6357454 Method for washing and sterilizing beer supply pipe Mar. 19, 2002
6358325 Polysilicon-silicon dioxide cleaning process performed in an integrated cleaner with scrubber Mar. 19, 2002
6358329 Resist residue removal apparatus and method Mar. 19, 2002
6355111 Method for removing contaminants from a workpiece using a chemically reactive additive Mar. 12, 2002
6355113 Multiple solvent cleaning system Mar. 12, 2002
6355568 Cleaning method for copper dual damascene process Mar. 12, 2002
6352081 Method of cleaning a semiconductor device processing chamber after a copper etch process Mar. 5, 2002
6352082 Ultra-low particle semiconductor cleaner Mar. 5, 2002
6352818 Photoresist development method employing multiple photoresist developer rinse Mar. 5, 2002
6350322 Method of reducing water spotting and oxide growth on a semiconductor structure Feb. 26, 2002
6348107 Compositions and method for removing paint from a substrate Feb. 19, 2002
6344090 Metal loss inhibitors and processes therewith Feb. 5, 2002
6342104 Method of cleaning objects to be processed Jan. 29, 2002
6340395 Salsa clean process Jan. 22, 2002
6331432 Device and method for cleaning and sanitizing a food reservoir Dec. 18, 2001
6331487 Removal of polishing residue from substrate using supercritical fluid process Dec. 18, 2001
6328042 Wafer cleaning module and method for cleaning the surface of a substrate Dec. 11, 2001
6328814 Apparatus for cleaning and drying substrates Dec. 11, 2001
6328815 Multiple chamber vacuum processing system configuration for improving the stability of mark shielding process Dec. 11, 2001
6325861 Method for etching and cleaning a substrate Dec. 4, 2001
6322633 Wafer container cleaning system Nov. 27, 2001
6318382 Cleaning method and cleaning apparatus, and electrophotographic photosensitive member and cleaning method of electrophotographic photosensitive member Nov. 20, 2001
6319328 Soil and/or groundwater remediation process Nov. 20, 2001
6319329 Method of cleaning objects to be processed Nov. 20, 2001
6319330 Method and apparatus for cleaning low K dielectric and metal wafer surfaces Nov. 20, 2001
6315835 Anti-spotting and anti-filming hard surface cleaning formulations and methods Nov. 13, 2001
6315836 Clean, recirculating processing method which prevents surface contamination of an object Nov. 13, 2001
6308719 Pre-clean deluge system Oct. 30, 2001
6308720 Method for precision-cleaning propellant tanks Oct. 30, 2001
6309470 Composition and method for cleaning surfaces Oct. 30, 2001
6306222 Process for cleaning plastics for recycling them Oct. 23, 2001
6306223 Degreasing method using a surfactant-free composition Oct. 23, 2001
6302968 Precarboxylic acid rinse method Oct. 16, 2001
6299696 Substrate processing apparatus and substrate processing method Oct. 9, 2001
6299697 Method and apparatus for processing substrate Oct. 9, 2001
6296714 Washing solution of semiconductor substrate and washing method using the same Oct. 2, 2001
6296716 Process for cleaning ceramic articles Oct. 2, 2001
6294028 Mercury process gold ballbond removal apparatus Sep. 25, 2001
6290779 Systems and methods for dry cleaning process chambers Sep. 18, 2001
6290859 Tungsten coating for improved wear resistance and reliability of microelectromechanical devices Sep. 18, 2001
6284053 Selective deleading process and bath for plumbing components made of a copper alloy Sep. 4, 2001
6280533 Method for in situ soil decontamination and micro-emulsion suitable therefor Aug. 28, 2001

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