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Browse by Category: Main > Material Science
Class Information
Number: 134/21
Name: Cleaning and liquid contact with solids > Processes > Including use of vacuum, suction, or inert atmosphere
Description: Processes in which the work is subjected to a vacuum or to suction during treatment, or an inert atmosphere is provided for the work, or any combination between the foregoing operations are used.


Patents under this class:
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Patent Number Title Of Patent Date Issued
7618473 Method for improving operational efficiency in clogged induction melting and pouring furnaces Nov. 17, 2009
7615259 Method and apparatus for processing workpiece Nov. 10, 2009
7601227 High purification method of jig for semiconductor heat treatment Oct. 13, 2009
7597767 Paint gun cleaning apparatus Oct. 6, 2009
7585438 Method for the cleaning of filament and fiber spinning devices Sep. 8, 2009
7582169 Device and method for cleaning a powder coating booth Sep. 1, 2009
7578904 Enzymatic press felt treatment Aug. 25, 2009
7578886 Substrate processing apparatus, substrate processing method, and substrate holding apparatus Aug. 25, 2009
7575658 Vacuum washer drum Aug. 18, 2009
7575641 Method and system for cleaning heat exchanger tube bundles Aug. 18, 2009
7572342 Method and apparatus for cleaning semiconductor photolithography tools Aug. 11, 2009
7566370 Wafer clamping apparatus and method for operating the same Jul. 28, 2009
7556697 System and method for carrying out liquid and subsequent drying treatments on one or more wafers Jul. 7, 2009
7553378 Substrate cleaning apparatus and method Jun. 30, 2009
7544254 System and method for cleaning an ion implanter Jun. 9, 2009
7534302 Method of cleaning flexible substrate May. 19, 2009
7534307 Methods for processing wafer surfaces using thin, high velocity fluid layer May. 19, 2009
7531045 Method for removing haze in a photo mask May. 12, 2009
7531046 Process for de-oiling steelmaking sludges and wastewater streams May. 12, 2009
7527698 Method and apparatus for removing a liquid from a surface of a substrate May. 5, 2009
7525010 Process to wash polymers contaminated with polychlorinated biphenyls (PCBs) Apr. 28, 2009
7520938 Method for high-pressure processing Apr. 21, 2009
7520298 Rotary fluid flow valve Apr. 21, 2009
7517412 Ash and dust removal method Apr. 14, 2009
7509962 Method and control system for treating a hafnium-based dielectric processing system Mar. 31, 2009
7507298 Cleaning equipment and use thereof Mar. 24, 2009
7503951 Fume chamber Mar. 17, 2009
7503983 Methods of proximity head brushing Mar. 17, 2009
7467634 No contact spray apparatus cleaning device Dec. 23, 2008
7465359 Game ticket scratching device and method Dec. 16, 2008
7461663 Cleaning apparatus Dec. 9, 2008
7462842 Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements Dec. 9, 2008
7419765 Method for producing flexographic printing plates by means of laser engraving Sep. 2, 2008
7410543 Substrate processing method Aug. 12, 2008
7401744 Jetting device and a method of jetting device Jul. 22, 2008
7387689 Methods for drying semiconductor wafer surfaces using a plurality of inlets and outlets held in close proximity to the wafer surfaces Jun. 17, 2008
7377053 Method and device for drying substrate May. 27, 2008
7377982 Method for the removal of airborne molecular contaminants using water gas mixtures May. 27, 2008
7372049 Lithographic apparatus including a cleaning device and method for cleaning an optical element May. 13, 2008
7364625 Rinsing processes and equipment Apr. 29, 2008
7361233 Methods of hydrogen cleaning of metallic surfaces Apr. 22, 2008
7361234 Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines Apr. 22, 2008
7354484 Liquid processing apparatus and liquid processing method Apr. 8, 2008
7350315 Edge wheel dry manifold Apr. 1, 2008
7346956 Automatic cart wash apparatus Mar. 25, 2008
7347916 Vacuum washer drum Mar. 25, 2008
7343640 Automatic festooned hose apparatus for public transit vacuuming systems and methods for using same Mar. 18, 2008
7335601 Method of processing an object and method of controlling processing apparatus to prevent contamination of the object Feb. 26, 2008
7320735 Fan cleaning method and apparatus Jan. 22, 2008
7316751 Cleaner with high pressure cleaning jets Jan. 8, 2008

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