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Class Information
Number: 134/21
Name: Cleaning and liquid contact with solids > Processes > Including use of vacuum, suction, or inert atmosphere
Description: Processes in which the work is subjected to a vacuum or to suction during treatment, or an inert atmosphere is provided for the work, or any combination between the foregoing operations are used.

Patents under this class:

Patent Number Title Of Patent Date Issued
8673087 Reducing copper defects during a wet chemical cleaning of exposed copper surfaces in a metallization layer of a semiconductor device Mar. 18, 2014
8668778 Method of removing liquid from a barrier structure Mar. 11, 2014
8663396 Method for cleaning oil soaked bonded panels and laminates Mar. 4, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8647446 Method and system for improving performance and preventing corrosion in multi-module cleaning chamber Feb. 11, 2014
8641830 Gravimetric dispensing system Feb. 4, 2014
8636848 Vacuumable gel for decontaminating surfaces and use thereof Jan. 28, 2014
8617409 Magnetically levitated gas cell for touchless site-isolated wet processing Dec. 31, 2013
8617319 Dishwasher and method of controlling a dishwasher Dec. 31, 2013
8603320 Mobile surface cleaner and method for generating and applying an electrochemically activated sanitizing liquid having O.sub.3 molecules Dec. 10, 2013
8591667 Apparatus and method for cleaning electronic jacks of debris Nov. 26, 2013
8591664 Integrated cleaner and dryer system Nov. 26, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8585828 Systems, methods and apparatus for stain removal Nov. 19, 2013
8585825 Acoustic assisted single wafer wet clean for semiconductor wafer process Nov. 19, 2013
8580045 Method and apparatus for physical confinement of a liquid meniscus over a semiconductor wafer Nov. 12, 2013
8580044 Apparatus for agitating and evacuating byproduct dust from a semiconductor processing chamber Nov. 12, 2013
8580039 Surface treatment method of metal member and cleaning nozzle Nov. 12, 2013
8574372 Nozzle cleaning method, nozzle cleaning device, and automatic analyzer Nov. 5, 2013
8562753 Nozzle cleaning method and a computer-readable storage medium storing nozzle cleaning program Oct. 22, 2013
8562752 Single workpiece processing chamber Oct. 22, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8551260 Fuel injection flush tool Oct. 8, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8545640 Substrate processing method, storage medium storing computer program for performing substrate processing method, and substrate processing apparatus Oct. 1, 2013
8545637 Cleaning device and cleaning method Oct. 1, 2013
8529704 Vacuum processing apparatus and operating method for vacuum processing apparatus Sep. 10, 2013
8513593 In-situ conditioning in mass spectrometer systems Aug. 20, 2013
8512478 Cleaning and drying-preventing method, and cleaning and drying-preventing apparatus Aug. 20, 2013
8506718 Polymer removing apparatus and method Aug. 13, 2013
8500914 Device for blowing off bottle bottoms Aug. 6, 2013
8491722 Pipeline pigs Jul. 23, 2013
8486201 Method for drying a semiconductor wafer Jul. 16, 2013
8480810 Method and apparatus for particle removal Jul. 9, 2013
8480807 Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure Jul. 9, 2013
8470730 Process for producing catalyst Jun. 25, 2013
8465596 Supercritical processing apparatus and supercritical processing method Jun. 18, 2013
8454761 Apparatus and system for cleaning baseball bases Jun. 4, 2013
8454756 Methods for extending the lifetime of pressure gauges coupled to substrate process chambers Jun. 4, 2013
8454755 Methods for evacuating particles from a hard drive component Jun. 4, 2013
8449687 Wash ring assembly and method of use May. 28, 2013
8430970 Methods for preventing corrosion of plasma-exposed yttria-coated constituents Apr. 30, 2013
8425687 Wetting a workpiece surface in a fluid-processing system Apr. 23, 2013
8419863 Method for removing painted markings Apr. 16, 2013
8418274 Vacuum drainage system for unclogging a clogged drain, drain clean-out device therefor, and method of unclogging a clogged drain Apr. 16, 2013
8414708 Method and apparatus for cleaning photomask Apr. 9, 2013
8405051 Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method Mar. 26, 2013
8404055 Method and apparatus for touchless cleaning of a chandelier Mar. 26, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8397342 Debris removal system for power tool Mar. 19, 2013

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