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Class Information
Number: 134/157
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > Rotary, revolving, swinging or oscillating motion work holder or carrier
Description: Apparatus in which the work support is mounted so as to have rotary, revolving, swinging or oscillating motion.










Sub-classes under this class:

Class Number Class Name Patents
134/162 Actuating means extending through or carried by tank cover 29
134/160 Carried by pivotally mounted links or levers or by strands 15
134/161 Compound motion 32
134/163 With liquid impeller mounted on work support 11
134/158 With plural work receiving chambers or holders and/or with cover carried by work receiving chamber 59


Patents under this class:
1 2 3 4 5

Patent Number Title Of Patent Date Issued
8684014 Liquid processing apparatus for substrate and liquid processing method Apr. 1, 2014
8671961 Methods and apparatus for cleaning semiconductor wafers Mar. 18, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8617318 Liquid processing apparatus and liquid processing method Dec. 31, 2013
8584687 Sonication cleaning system Nov. 19, 2013
8584837 Razor blade storage and sterilization device Nov. 19, 2013
8580042 Methods and apparatus for cleaning semiconductor wafers Nov. 12, 2013
8567421 Method and system for uniformly applying a multi-phase cleaning solution to a substrate Oct. 29, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8511324 Washing/drying machine Aug. 20, 2013
8505562 Hands-free cleaning apparatus for roller pads and/or paintbrushes Aug. 13, 2013
8490634 Device for treating disc-like articles Jul. 23, 2013
8479753 Liquid processing apparatus and method Jul. 9, 2013
8453655 Surface treatment apparatus Jun. 4, 2013
8435380 Substrate chucking member, substrate processing apparatus having the member, and method of processing substrate using the member May. 7, 2013
8394234 Spin head and method of chucking substrate using the same Mar. 12, 2013
8387635 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Mar. 5, 2013
8333206 Parts washer Dec. 18, 2012
8316869 Acoustic energy system, method and apparatus for processing flat articles Nov. 27, 2012
8293071 Spin head Oct. 23, 2012
8277884 Coating and processing apparatus and method Oct. 2, 2012
8257549 Spin head, chuck pin used in the spin head, and method for treating a substrate with the spin head Sep. 4, 2012
8256370 Coating apparatus and method Sep. 4, 2012
8211241 Washing device and washing method for substrate for magnetic recording medium Jul. 3, 2012
8211269 Wafer spin chuck and an etcher using the same Jul. 3, 2012
8201568 Liquid treatment apparatus Jun. 19, 2012
8166985 Substrate cleaning and processing apparatus with magnetically controlled spin chuck holding pins May. 1, 2012
8156623 Apparatus for removing material from surfaces of a metals processing chamber Apr. 17, 2012
8141570 System and method for removing foreign particles from semiconductor device Mar. 27, 2012
8136540 Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles Mar. 20, 2012
8136539 Wash ring assembly and method of use Mar. 20, 2012
8099844 Method and apparatus for removing material from a surface of a metal processing chamber Jan. 24, 2012
8087419 Substrate holding rotating mechanism, and substrate processing apparatus Jan. 3, 2012
8051862 Liquid processing apparatus and liquid processing method Nov. 8, 2011
8033288 Substrate treatment apparatus Oct. 11, 2011
8007634 Wafer spin chuck and an etcher using the same Aug. 30, 2011
7958899 Substrate cleaning apparatus and substrate cleaning method Jun. 14, 2011
7938130 Substrate holding rotating mechanism, and substrate processing apparatus May. 10, 2011
7913703 Method and apparatus for uniformly applying a multi-phase cleaning solution to a substrate Mar. 29, 2011
7862658 Etching and cleaning methods and etching and cleaning apparatuses used therefor Jan. 4, 2011
7828001 Pad washing system with splash guard Nov. 9, 2010
7789095 Wash chamber for automated appendage-washing apparatus Sep. 7, 2010
7766021 Substrate treatment apparatus Aug. 3, 2010
7757700 Wash chamber for automated appendage-washing apparatus Jul. 20, 2010
7726323 Device and process for liquid treatment of wafer-shaped articles Jun. 1, 2010
7617830 Wash chamber for automated appendage-washing apparatus Nov. 17, 2009
7607442 Wash chamber for automated appendage-washing apparatus Oct. 27, 2009
7607443 Wash chamber for automated appendage-washing apparatus Oct. 27, 2009
7568490 Method and apparatus for cleaning semiconductor wafers using compressed and/or pressurized foams, bubbles, and/or liquids Aug. 4, 2009

1 2 3 4 5










 
 
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