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Class Information
Number: 134/155
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With means to drain from or supply liquid to the tank
Description: Apparatus having means for feeding liquid to and/or draining liquid from the tank with which the movable work support is associated.

Patents under this class:
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Patent Number Title Of Patent Date Issued
8603256 Mobile container cleaning system Dec. 10, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8479753 Liquid processing apparatus and method Jul. 9, 2013
8136540 Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles Mar. 20, 2012
8006710 Cleaning device and method for cleaning a workpiece Aug. 30, 2011
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7753060 Cellular aqueous tube cleaning system and method Jul. 13, 2010
7409960 Cleaning fluid container Aug. 12, 2008
7360546 Cleaning apparatus for semiconductor wafer Apr. 22, 2008
7255114 Ion sampling system for wafer Aug. 14, 2007
7217325 System for processing a workpiece May. 15, 2007
7140512 Interlocking lid for wet bench Nov. 28, 2006
7111632 Ultrasonic cleaning device for removing undesirable particles from an object Sep. 26, 2006
6969682 Single workpiece processing system Nov. 29, 2005
6866049 Device addressing gas contamination in a wet process Mar. 15, 2005
6863079 Semiconductor wafer washing system and method of supplying chemicals to the washing tanks of the system Mar. 8, 2005
6776175 Liquid waste disposal and canister flushing system Aug. 17, 2004
6712081 Pressure processing device Mar. 30, 2004
6691720 Multi-process system with pivoting process chamber Feb. 17, 2004
6680253 Apparatus for processing a workpiece Jan. 20, 2004
6672319 Pressurized liquid diffuser Jan. 6, 2004
6668844 Systems and methods for processing workpieces Dec. 30, 2003
6626194 Electric shaver cleaning apparatus Sep. 30, 2003
6622738 Apparatus and system for removing photoresist through the use of hot deionized water bath, water vapor and ozone gas Sep. 23, 2003
6532976 Semiconductor wafer cleaning apparatus Mar. 18, 2003
6505634 Semiconductor wafer cleaning apparatus Jan. 14, 2003
6502591 Surface tension effect dryer with porous vessel walls Jan. 7, 2003
6474350 Cleaning device for probe needle of probe card and washing liquid used therefor Nov. 5, 2002
6374835 Parts washing system Apr. 23, 2002
6363953 Device for cleaning contact lens and similar utility items Apr. 2, 2002
6357142 Method and apparatus for high-pressure wafer processing and drying Mar. 19, 2002
6328045 Parts washing system Dec. 11, 2001
6286231 Method and apparatus for high-pressure wafer processing and drying Sep. 11, 2001
6199562 Method and apparatus for cleaning a dispense line Mar. 13, 2001
6182673 Dump facility for cassette sewage tanks Feb. 6, 2001
6164133 Method and apparatus for pre-processing of semiconductor substrate surface analysis Dec. 26, 2000
6141812 Cleaning apparatus and cleaning member rinsing apparatus Nov. 7, 2000
6095163 Parts washing system Aug. 1, 2000
6082382 Continuous washing device for vegetables, fiber, or other materials Jul. 4, 2000
6073640 Part washer Jun. 13, 2000
6003531 Pipette-washing device for automatic biochemical analyzer Dec. 21, 1999
6000321 Rice washing apparatus Dec. 14, 1999
5992431 Device for treating substrates in a fluid container Nov. 30, 1999
5934299 Apparatus and method for improved washing and drying of semiconductor wafers Aug. 10, 1999
5932028 Paint roller cleaner assembly Aug. 3, 1999
5927306 Ultrasonic vibrator, ultrasonic cleaning nozzle, ultrasonic cleaning device, substrate cleaning device, substrate cleaning treatment system and ultrasonic cleaning nozzle manufacturing method Jul. 27, 1999
5927302 Method for rinsing plate-shaped articles and cleaning bath and cleaning equipment used in the same Jul. 27, 1999
5890502 Apparatus and method for cleaning semiconductor devices without leaving water droplets Apr. 6, 1999
5885360 Semiconductor wafer cleaning apparatus Mar. 23, 1999
5881748 Apparatus for rinsing wafers adhered with chemical liquid by use of purified water Mar. 16, 1999

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