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Browse by Category: Main > Material Science
Class Information
Number: 134/153
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With spray or jet applying conduits or nozzles > Rotary, pivoted or swinging work holder
Description: Apparatus, in which the workholder is mounted for rotation or swinging, or is pivoted.










Patents under this class:
1 2 3 4 5 6 7 8 9 10

Patent Number Title Of Patent Date Issued
8672821 Paint roller cleaner and associated method Mar. 18, 2014
8656936 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Feb. 25, 2014
8613288 High temperature chuck and method of using same Dec. 24, 2013
8590550 Apparatus for cleaning contaminants from substrate Nov. 26, 2013
8578953 Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage medium Nov. 12, 2013
8578952 Substrate processing system, substrate surface processing apparatus, substrate surface inspecting apparatus, substrate surface inspecting method, and storage medium storing program for impleme Nov. 12, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8529707 Liquid processing apparatus, liquid processing method, and storage medium having computer program recorded therein Sep. 10, 2013
8505562 Hands-free cleaning apparatus for roller pads and/or paintbrushes Aug. 13, 2013
8501025 Substrate treatment apparatus and substrate treatment method Aug. 6, 2013
8486199 Ultrasonic cleaning method and apparatus Jul. 16, 2013
8387556 Substrate processing system Mar. 5, 2013
8387635 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Mar. 5, 2013
8375964 Template cleaning method, system, and apparatus Feb. 19, 2013
8375963 Substrate processing apparatus and substrate processing method Feb. 19, 2013
8333206 Parts washer Dec. 18, 2012
8316869 Acoustic energy system, method and apparatus for processing flat articles Nov. 27, 2012
8277569 Substrate treating apparatus and substrate treating method Oct. 2, 2012
8277884 Coating and processing apparatus and method Oct. 2, 2012
8278186 Wafer cleaning method and wafer bonding method using the same Oct. 2, 2012
8268087 Liquid processing apparatus, liquid processing method, and storage medium Sep. 18, 2012
8256370 Coating apparatus and method Sep. 4, 2012
8211241 Washing device and washing method for substrate for magnetic recording medium Jul. 3, 2012
8211242 Substrate processing method, substrate processing apparatus, and control program Jul. 3, 2012
8166985 Substrate cleaning and processing apparatus with magnetically controlled spin chuck holding pins May. 1, 2012
8136540 Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles Mar. 20, 2012
8087419 Substrate holding rotating mechanism, and substrate processing apparatus Jan. 3, 2012
8056699 Pan inverting and/or cleaning system Nov. 15, 2011
8029624 Rinse method and developing apparatus Oct. 4, 2011
8020570 Substrate processing apparatus and substrate processing method Sep. 20, 2011
8002899 Method and apparatus for mask pellicle adhesive residue cleaning Aug. 23, 2011
7964042 Substrate processing apparatus and substrate processing method Jun. 21, 2011
7938130 Substrate holding rotating mechanism, and substrate processing apparatus May. 10, 2011
7926439 Substrate processing apparatus Apr. 19, 2011
7921859 Method and apparatus for an in-situ ultraviolet cleaning tool Apr. 12, 2011
7886459 Apparatus for assisting in fluid removal from fluid storage bladder and the like Feb. 15, 2011
7861732 Immersion cleaner for print rollers Jan. 4, 2011
7850818 Method of manufacturing semiconductor device and cleaning apparatus Dec. 14, 2010
7836901 Method and apparatus for wafer cleaning Nov. 23, 2010
7803230 Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method Sep. 28, 2010
7789095 Wash chamber for automated appendage-washing apparatus Sep. 7, 2010
7757700 Wash chamber for automated appendage-washing apparatus Jul. 20, 2010
7752996 Apparatus for applying a plating solution for electroless deposition Jul. 13, 2010
7726323 Device and process for liquid treatment of wafer-shaped articles Jun. 1, 2010
7727494 Child care storage having steam sterilizing apparatus Jun. 1, 2010
7722736 Apparatus for and method of processing a substrate with processing liquid May. 25, 2010
7617830 Wash chamber for automated appendage-washing apparatus Nov. 17, 2009
7607442 Wash chamber for automated appendage-washing apparatus Oct. 27, 2009
7604013 Substrate cleaning method and developing apparatus Oct. 20, 2009
7596886 Method and system to separate and recycle divergent chemistries Oct. 6, 2009

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