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Class Information
Number: 134/153
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With spray or jet applying conduits or nozzles > Rotary, pivoted or swinging work holder
Description: Apparatus, in which the workholder is mounted for rotation or swinging, or is pivoted.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7412981 |
Liquid processing apparatus and method |
Aug. 19, 2008 |
| 7404407 |
Substrate processing apparatus |
Jul. 29, 2008 |
| 7393387 |
Particle filter cleaning apparatus |
Jul. 1, 2008 |
| 7389783 |
Proximity meniscus manifold |
Jun. 24, 2008 |
| 7387132 |
Apparatus for treating wafer |
Jun. 17, 2008 |
| 7387131 |
Processing apparatus and substrate processing method |
Jun. 17, 2008 |
| 7364626 |
Substrate processing apparatus and substrate processing method |
Apr. 29, 2008 |
| 7353832 |
Housingless washer |
Apr. 8, 2008 |
| 7347214 |
Rotary shaft sealing mechanism and liquid processing apparatus |
Mar. 25, 2008 |
| 7337792 |
Liquid processing apparatus and liquid processing method |
Mar. 4, 2008 |
| 7334588 |
Method and apparatus for wafer cleaning |
Feb. 26, 2008 |
| 7328713 |
Nozzle apparatus for stripping edge bead of wafer |
Feb. 12, 2008 |
| 7314054 |
Liquid processing apparatus with nozzle having planar ejecting orifices |
Jan. 1, 2008 |
| 7311781 |
Substrate rotation type treatment apparatus |
Dec. 25, 2007 |
| 7305999 |
Centrifugal spray processor and retrofit kit |
Dec. 11, 2007 |
| 7303633 |
Apparatus for producing optical information recording medium |
Dec. 4, 2007 |
| 7284560 |
Liquid processing apparatus |
Oct. 23, 2007 |
| 7282086 |
Fluid filter cleaning apparatus |
Oct. 16, 2007 |
| 7275551 |
Device for cleaning food with ozone water, and method of cleaning food using cleaning device |
Oct. 2, 2007 |
| 7267129 |
Device and process for liquid treatment of wafer-shaped articles |
Sep. 11, 2007 |
| 7267130 |
Substrate processing apparatus |
Sep. 11, 2007 |
| 7252099 |
Wafer cleaning apparatus with multiple wash-heads |
Aug. 7, 2007 |
| 7237561 |
Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same |
Jul. 3, 2007 |
| 7226055 |
Substrate holding and spinning assembly and methods for making the same |
Jun. 5, 2007 |
| 7223323 |
Multi-chemistry plating system |
May. 29, 2007 |
| 7217325 |
System for processing a workpiece |
May. 15, 2007 |
| 7201808 |
Method and apparatus for rotating a semiconductor substrate |
Apr. 10, 2007 |
| 7195679 |
Versatile system for wafer edge remediation |
Mar. 27, 2007 |
| 7171973 |
Substrate processing apparatus |
Feb. 6, 2007 |
| 7172674 |
Device for liquid treatment of wafer-shaped articles |
Feb. 6, 2007 |
| 7169664 |
Method of reducing wafer contamination by removing under-metal layers at the wafer edge |
Jan. 30, 2007 |
| 7143793 |
Cleaning system for a filling machine |
Dec. 5, 2006 |
| 7124466 |
Particle capture system |
Oct. 24, 2006 |
| 7107999 |
Substrate processing apparatus for removing organic matter by removal liquid |
Sep. 19, 2006 |
| 7017281 |
Substrate processing apparatus and substrate processing method drying substrate by spraying gas |
Mar. 28, 2006 |
| 7007702 |
Device and process for liquid treatment of wafer-shaped articles |
Mar. 7, 2006 |
| 7000622 |
Methods and systems for processing a bevel edge of a substrate using a dynamic liquid meniscus |
Feb. 21, 2006 |
| 7000623 |
Apparatus and method for substrate preparation implementing a surface tension reducing process |
Feb. 21, 2006 |
| 7000653 |
High pressure processing apparatus and high pressure processing method |
Feb. 21, 2006 |
| 7000621 |
Methods and apparatuses for drying wafer |
Feb. 21, 2006 |
| 6983755 |
Cleaning method and cleaning apparatus for performing the same |
Jan. 10, 2006 |
| 6969682 |
Single workpiece processing system |
Nov. 29, 2005 |
| 6960265 |
Apparatus and method for collecting metallic impurity on a semiconductor wafer |
Nov. 1, 2005 |
| 6951221 |
Substrate processing apparatus |
Oct. 4, 2005 |
| 6941957 |
Method and apparatus for pretreating a substrate prior to electroplating |
Sep. 13, 2005 |
| 6939410 |
Apparatus and method for collecting impurities on a semiconductor wafer |
Sep. 6, 2005 |
| 6923192 |
Stackable process chambers |
Aug. 2, 2005 |
| 6915809 |
Single wafer type substrate cleaning method and apparatus |
Jul. 12, 2005 |
| 6907893 |
Appliance for treating articles, particularly nursing bottles and accessories |
Jun. 21, 2005 |
| 6904920 |
Method and apparatus for cleaning containers |
Jun. 14, 2005 |
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