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Class Information
Number: 134/151
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With spray or jet applying conduits or nozzles
Description: Apparatus having fluid nozzles or jet forming means for applying fluids to the work.

Sub-classes under this class:

Class Number Class Name Patents
134/152 For work having hollows or passages 140
134/153 Rotary, pivoted or swinging work holder 478

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8627835 In-situ cleaning assembly Jan. 14, 2014
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8544483 Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids Oct. 1, 2013
8524008 Method and device for cleaning substrates on a carrier Sep. 3, 2013
8486199 Ultrasonic cleaning method and apparatus Jul. 16, 2013
8479753 Liquid processing apparatus and method Jul. 9, 2013
8439053 Paint caddy May. 14, 2013
8388800 Apparatus for wet processing substrate Mar. 5, 2013
8388764 Apparatus and method for handling an artificial turf arranged on a base Mar. 5, 2013
8347682 Apparatus for cleaning cylinders or rolls Jan. 8, 2013
8297293 Substrate support unit, and substrate treating apparatus and method using the same Oct. 30, 2012
8241431 Method for distributing a fluid in an automatic cleaning machine Aug. 14, 2012
8136539 Wash ring assembly and method of use Mar. 20, 2012
8136540 Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles Mar. 20, 2012
8123868 Method and apparatus for in-line processing and immediately sequential or simultaneous processing of flat and flexible substrates through viscous shear in thin cross section gaps for the manuf Feb. 28, 2012
8088693 Substrate treatment method Jan. 3, 2012
8087419 Substrate holding rotating mechanism, and substrate processing apparatus Jan. 3, 2012
7999513 Adaptive battery charging Aug. 16, 2011
7938130 Substrate holding rotating mechanism, and substrate processing apparatus May. 10, 2011
7926494 Bernoulli blade Apr. 19, 2011
7836901 Method and apparatus for wafer cleaning Nov. 23, 2010
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7807017 Etching apparatus for substrates Oct. 5, 2010
7758716 Apparatus for spraying etchant solution onto preformed printed circuit board Jul. 20, 2010
7681581 Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids Mar. 23, 2010
7673582 Apparatus and method for removing an edge bead of a spin-coated layer Mar. 9, 2010
7416647 Plating processing device Aug. 26, 2008
7412982 Cleaning probe and megasonic cleaning apparatus having the same Aug. 19, 2008
7396416 Substrate cleaning device Jul. 8, 2008
7306002 System and method for wet cleaning a semiconductor wafer Dec. 11, 2007
7264008 Apparatus for cleaning a wafer Sep. 4, 2007
7243911 Substrate treating apparatus Jul. 17, 2007
7223323 Multi-chemistry plating system May. 29, 2007
7051743 Apparatus and method for cleaning surfaces of semiconductor wafers using ozone May. 30, 2006
7047984 Device and method for cleaning articles used in the production of semiconductor components May. 23, 2006
7047989 Sonic-energy cleaner system with gasified fluid May. 23, 2006
6983755 Cleaning method and cleaning apparatus for performing the same Jan. 10, 2006
6983756 Substrate treatment process and apparatus Jan. 10, 2006
6945259 Substrate cleaning method and substrate cleaning apparatus Sep. 20, 2005
6899111 Configurable single substrate wet-dry integrated cluster cleaner May. 31, 2005
6892738 Apparatus and methods for reducing damage to substrates during megasonic cleaning processes May. 17, 2005
6802323 Method and apparatus for storing guide wires Oct. 12, 2004
6684890 Megasonic cleaner probe system with gasified fluid Feb. 3, 2004
6681782 Wafer cleaning Jan. 27, 2004
6679272 Megasonic probe energy attenuator Jan. 20, 2004
6592681 Floating oil boom cleaning apparatus Jul. 15, 2003
6543462 Apparatus for cleaning surfaces substantially free of contaminants Apr. 8, 2003
6454875 Golf club cleaning apparatus Sep. 24, 2002
6328639 System for abrasively cleaning small parts and a container for holding small parts undergoing abrasive cleaning Dec. 11, 2001
6178610 Method of and apparatus for removing burrs from metal work-piece Jan. 30, 2001

1 2 3

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