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Class Information
Number: 134/148
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With movable work support and separate movable means to cause fluid motion (e.g., pump, splasher, agitator) > And spray or jet applying conduit or nozzle
Description: Apparatus in which fluids are discharged from a spray nozzle or a jet conduit directly onto the work.
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7604013 |
Substrate cleaning method and developing apparatus |
Oct. 20, 2009 |
| 7596886 |
Method and system to separate and recycle divergent chemistries |
Oct. 6, 2009 |
| 7527698 |
Method and apparatus for removing a liquid from a surface of a substrate |
May. 5, 2009 |
| 7513263 |
Substrate holding device and substrate processing apparatus |
Apr. 7, 2009 |
| 7467635 |
Apparatus and method for substrate processing |
Dec. 23, 2008 |
| 7461664 |
Roller cover end plug |
Dec. 9, 2008 |
| 7448398 |
Sonic jewelry cleaner |
Nov. 11, 2008 |
| 7428907 |
Substrate processing apparatus |
Sep. 30, 2008 |
| 7412980 |
Machine for cleaning glasses or similar articles |
Aug. 19, 2008 |
| 7404407 |
Substrate processing apparatus |
Jul. 29, 2008 |
| 7396416 |
Substrate cleaning device |
Jul. 8, 2008 |
| 7389783 |
Proximity meniscus manifold |
Jun. 24, 2008 |
| 7383847 |
Paint implements cleaning system |
Jun. 10, 2008 |
| 7368016 |
Substrate processing unit and substrate processing apparatus |
May. 6, 2008 |
| 7347214 |
Rotary shaft sealing mechanism and liquid processing apparatus |
Mar. 25, 2008 |
| 7337792 |
Liquid processing apparatus and liquid processing method |
Mar. 4, 2008 |
| 7338565 |
Housingless washer |
Mar. 4, 2008 |
| 7334588 |
Method and apparatus for wafer cleaning |
Feb. 26, 2008 |
| 7328713 |
Nozzle apparatus for stripping edge bead of wafer |
Feb. 12, 2008 |
| 7323066 |
Paint accessory cleaning device and method |
Jan. 29, 2008 |
| 7306002 |
System and method for wet cleaning a semiconductor wafer |
Dec. 11, 2007 |
| 7303633 |
Apparatus for producing optical information recording medium |
Dec. 4, 2007 |
| 7275551 |
Device for cleaning food with ozone water, and method of cleaning food using cleaning device |
Oct. 2, 2007 |
| 7270136 |
Apparatus for cleaning the edges of wafers |
Sep. 18, 2007 |
| 7267130 |
Substrate processing apparatus |
Sep. 11, 2007 |
| 7252102 |
Ultrasonic slat washer |
Aug. 7, 2007 |
| 7252099 |
Wafer cleaning apparatus with multiple wash-heads |
Aug. 7, 2007 |
| 7237561 |
Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same |
Jul. 3, 2007 |
| 7223323 |
Multi-chemistry plating system |
May. 29, 2007 |
| 7171973 |
Substrate processing apparatus |
Feb. 6, 2007 |
| 7169664 |
Method of reducing wafer contamination by removing under-metal layers at the wafer edge |
Jan. 30, 2007 |
| 7165564 |
Device for cleaning installations and related methods |
Jan. 23, 2007 |
| 7122084 |
Device for liquid treatment of disk-shaped objects |
Oct. 17, 2006 |
| 7047989 |
Sonic-energy cleaner system with gasified fluid |
May. 23, 2006 |
| 7000621 |
Methods and apparatuses for drying wafer |
Feb. 21, 2006 |
| 6983755 |
Cleaning method and cleaning apparatus for performing the same |
Jan. 10, 2006 |
| 6983756 |
Substrate treatment process and apparatus |
Jan. 10, 2006 |
| 6960265 |
Apparatus and method for collecting metallic impurity on a semiconductor wafer |
Nov. 1, 2005 |
| 6951221 |
Substrate processing apparatus |
Oct. 4, 2005 |
| 6941957 |
Method and apparatus for pretreating a substrate prior to electroplating |
Sep. 13, 2005 |
| 6939410 |
Apparatus and method for collecting impurities on a semiconductor wafer |
Sep. 6, 2005 |
| 6913028 |
Flexible container for liquid transport, liquid transport method using the container, liquid transport apparatus using the container, method for washing the container, and washing equipment |
Jul. 5, 2005 |
| 6907893 |
Appliance for treating articles, particularly nursing bottles and accessories |
Jun. 21, 2005 |
| 6904920 |
Method and apparatus for cleaning containers |
Jun. 14, 2005 |
| 6899110 |
Cleaning method and apparatus |
May. 31, 2005 |
| 6895981 |
Cross flow processor |
May. 24, 2005 |
| 6895979 |
Processing apparatus and processing method |
May. 24, 2005 |
| 6892738 |
Apparatus and methods for reducing damage to substrates during megasonic cleaning processes |
May. 17, 2005 |
| 6883528 |
Apparatus for cleaning eggs by conveying thereof upon multiple conveyors through washers which are vertically tiered |
Apr. 26, 2005 |
| 6880563 |
Apparatus and method of cleaning a substrate |
Apr. 19, 2005 |
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