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Class Information
Number: 134/147
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With movable work support and separate movable means to cause fluid motion (e.g., pump, splasher, agitator)
Description: Apparatus having means, in addition to a movable work support, for causing fluid motion (e.g., pump, agitator, splasher).
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7604013 |
Substrate cleaning method and developing apparatus |
Oct. 20, 2009 |
| 7524771 |
Substrate processing method using alkaline solution and acid solution |
Apr. 28, 2009 |
| 7387131 |
Processing apparatus and substrate processing method |
Jun. 17, 2008 |
| 7353832 |
Housingless washer |
Apr. 8, 2008 |
| 7341066 |
Washing machine |
Mar. 11, 2008 |
| 7334588 |
Method and apparatus for wafer cleaning |
Feb. 26, 2008 |
| 7305999 |
Centrifugal spray processor and retrofit kit |
Dec. 11, 2007 |
| 7306002 |
System and method for wet cleaning a semiconductor wafer |
Dec. 11, 2007 |
| 7252102 |
Ultrasonic slat washer |
Aug. 7, 2007 |
| 7237564 |
Distribution of energy in a high frequency resonating wafer processing system |
Jul. 3, 2007 |
| 7201808 |
Method and apparatus for rotating a semiconductor substrate |
Apr. 10, 2007 |
| 7195679 |
Versatile system for wafer edge remediation |
Mar. 27, 2007 |
| 7128075 |
Parts washing apparatus |
Oct. 31, 2006 |
| 7047989 |
Sonic-energy cleaner system with gasified fluid |
May. 23, 2006 |
| 7040330 |
Method and apparatus for megasonic cleaning of patterned substrates |
May. 9, 2006 |
| 7028698 |
Pressure processing apparatus with improved heating and closure system |
Apr. 18, 2006 |
| 6983756 |
Substrate treatment process and apparatus |
Jan. 10, 2006 |
| 6983755 |
Cleaning method and cleaning apparatus for performing the same |
Jan. 10, 2006 |
| 6880563 |
Apparatus and method of cleaning a substrate |
Apr. 19, 2005 |
| 6827092 |
Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same |
Dec. 7, 2004 |
| 6729339 |
Method and apparatus for cooling a resonator of a megasonic transducer |
May. 4, 2004 |
| 6725869 |
Protective barrier for cleaning chamber |
Apr. 27, 2004 |
| 6719850 |
Sonic jewelry cleaner |
Apr. 13, 2004 |
| 6694991 |
Ball/roller bearing cleaning apparatus |
Feb. 24, 2004 |
| 6684890 |
Megasonic cleaner probe system with gasified fluid |
Feb. 3, 2004 |
| 6684891 |
Wafer cleaning |
Feb. 3, 2004 |
| 6681782 |
Wafer cleaning |
Jan. 27, 2004 |
| 6682605 |
Apparatus and method for removing coating layers from alignment marks |
Jan. 27, 2004 |
| 6672318 |
Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism |
Jan. 6, 2004 |
| 6644327 |
Ultrasonic cleaner and wet treatment nozzle comprising the same |
Nov. 11, 2003 |
| 6619304 |
Pressure chamber assembly including non-mechanical drive means |
Sep. 16, 2003 |
| 6539952 |
Megasonic treatment apparatus |
Apr. 1, 2003 |
| 6516815 |
Edge bead removal/spin rinse dry (EBR/SRD) module |
Feb. 11, 2003 |
| 6505634 |
Semiconductor wafer cleaning apparatus |
Jan. 14, 2003 |
| 6494221 |
Device for wet etching an edge of a semiconductor disk |
Dec. 17, 2002 |
| 6463938 |
Wafer cleaning method |
Oct. 15, 2002 |
| 6460551 |
Megasonic resonator for disk cleaning and method for use thereof |
Oct. 8, 2002 |
| 6460552 |
Method and apparatus for cleaning flat workpieces |
Oct. 8, 2002 |
| 6318385 |
Micro-environment chamber and system for rinsing and drying a semiconductor workpiece |
Nov. 20, 2001 |
| 6289907 |
Device and method for cleaning contact lenses |
Sep. 18, 2001 |
| 6287387 |
Apparatus and method for locking a basket in a cleaning bath |
Sep. 11, 2001 |
| 6267126 |
Apparatus for rinsing |
Jul. 31, 2001 |
| 6240938 |
Device for treating substrates in a fluid container |
Jun. 5, 2001 |
| 6202658 |
Method and apparatus for cleaning the edge of a thin disc |
Mar. 20, 2001 |
| 6202655 |
Anodizing apparatus and apparatus and method associated with the same |
Mar. 20, 2001 |
| 6167893 |
Dynamic chuck for semiconductor wafer or other substrate |
Jan. 2, 2001 |
| 6155275 |
Substrate processing unit and substrate processing apparatus using the same |
Dec. 5, 2000 |
| 6138695 |
Substrate processing apparatus |
Oct. 31, 2000 |
| 6119708 |
Method and apparatus for cleaning the edge of a thin disc |
Sep. 19, 2000 |
| 6085764 |
Cleaning apparatus and method |
Jul. 11, 2000 |
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