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Class Information
Number: 134/147
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With movable work support and separate movable means to cause fluid motion (e.g., pump, splasher, agitator)
Description: Apparatus having means, in addition to a movable work support, for causing fluid motion (e.g., pump, agitator, splasher).

Sub-classes under this class:

Class Number Class Name Patents
134/148 And spray or jet applying conduit or nozzle 177

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8584687 Sonication cleaning system Nov. 19, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8524008 Method and device for cleaning substrates on a carrier Sep. 3, 2013
8281794 Stage device and stage cleaning method Oct. 9, 2012
8268087 Liquid processing apparatus, liquid processing method, and storage medium Sep. 18, 2012
8201568 Liquid treatment apparatus Jun. 19, 2012
8192557 Dish washing machine with basket height adjusting apparatus Jun. 5, 2012
8156950 Megasonic cleaning with controlled boundary layer thickness and associated systems and methods Apr. 17, 2012
8136540 Cleaning system having heated cleaning enclosure for cleaning heat exchanger tube bundles Mar. 20, 2012
8006710 Cleaning device and method for cleaning a workpiece Aug. 30, 2011
7951244 Liquid cleaning apparatus for cleaning printed circuit boards May. 31, 2011
7828001 Pad washing system with splash guard Nov. 9, 2010
7803230 Substrate cleaning apparatus, substrate cleaning method, and medium for recording program used for the method Sep. 28, 2010
7604013 Substrate cleaning method and developing apparatus Oct. 20, 2009
7524771 Substrate processing method using alkaline solution and acid solution Apr. 28, 2009
7387131 Processing apparatus and substrate processing method Jun. 17, 2008
7353832 Housingless washer Apr. 8, 2008
7341066 Washing machine Mar. 11, 2008
7334588 Method and apparatus for wafer cleaning Feb. 26, 2008
7305999 Centrifugal spray processor and retrofit kit Dec. 11, 2007
7306002 System and method for wet cleaning a semiconductor wafer Dec. 11, 2007
7252102 Ultrasonic slat washer Aug. 7, 2007
7237564 Distribution of energy in a high frequency resonating wafer processing system Jul. 3, 2007
7201808 Method and apparatus for rotating a semiconductor substrate Apr. 10, 2007
7195679 Versatile system for wafer edge remediation Mar. 27, 2007
7128075 Parts washing apparatus Oct. 31, 2006
7047989 Sonic-energy cleaner system with gasified fluid May. 23, 2006
7040330 Method and apparatus for megasonic cleaning of patterned substrates May. 9, 2006
7028698 Pressure processing apparatus with improved heating and closure system Apr. 18, 2006
6983755 Cleaning method and cleaning apparatus for performing the same Jan. 10, 2006
6983756 Substrate treatment process and apparatus Jan. 10, 2006
6880563 Apparatus and method of cleaning a substrate Apr. 19, 2005
6827092 Wafer backside plate for use in a spin, rinse, and dry module and methods for making and implementing the same Dec. 7, 2004
6729339 Method and apparatus for cooling a resonator of a megasonic transducer May. 4, 2004
6725869 Protective barrier for cleaning chamber Apr. 27, 2004
6719850 Sonic jewelry cleaner Apr. 13, 2004
6694991 Ball/roller bearing cleaning apparatus Feb. 24, 2004
6684890 Megasonic cleaner probe system with gasified fluid Feb. 3, 2004
6684891 Wafer cleaning Feb. 3, 2004
6682605 Apparatus and method for removing coating layers from alignment marks Jan. 27, 2004
6681782 Wafer cleaning Jan. 27, 2004
6672318 Wafer rotary holding apparatus and wafer surface treatment apparatus with waste liquid recovery mechanism Jan. 6, 2004
6644327 Ultrasonic cleaner and wet treatment nozzle comprising the same Nov. 11, 2003
6619304 Pressure chamber assembly including non-mechanical drive means Sep. 16, 2003
6539952 Megasonic treatment apparatus Apr. 1, 2003
6516815 Edge bead removal/spin rinse dry (EBR/SRD) module Feb. 11, 2003
6505634 Semiconductor wafer cleaning apparatus Jan. 14, 2003
6494221 Device for wet etching an edge of a semiconductor disk Dec. 17, 2002
6463938 Wafer cleaning method Oct. 15, 2002
6460552 Method and apparatus for cleaning flat workpieces Oct. 8, 2002

1 2 3

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