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Class Information
Number: 134/144
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > With movably mounted spray or jet applying conduits or nozzles
Description: Apparatus having fluid nozzles or jet forming means for applying fluids to the work, which devices are mounted for motion relative to the other portion of the apparatus.










Sub-classes under this class:

Class Number Class Name Patents
134/145 Immovably mounted on movable work support 15


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8701256 Removing material from surfaces of metals processing chambers Apr. 22, 2014
8590550 Apparatus for cleaning contaminants from substrate Nov. 26, 2013
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8479753 Liquid processing apparatus and method Jul. 9, 2013
8356384 Hard drive assembly tools for evacuating particles Jan. 22, 2013
8006710 Cleaning device and method for cleaning a workpiece Aug. 30, 2011
7823595 Apparatus for etching substrate and method of fabricating thin-glass substrate Nov. 2, 2010
7754024 Crockery basket for a dishwasher machine, comprising an intensive washing zone Jul. 13, 2010
7686022 Nozzle device, and cleaning apparatus equipped with the nozzle device Mar. 30, 2010
7665916 Coater/developer and coating/developing method Feb. 23, 2010
7575641 Method and system for cleaning heat exchanger tube bundles Aug. 18, 2009
7493907 Nozzle assembly of dishwasher Feb. 24, 2009
7404410 Dish-washing machine with versatility of position Jul. 29, 2008
7364626 Substrate processing apparatus and substrate processing method Apr. 29, 2008
7297286 Methods for resist stripping and other processes for cleaning surfaces substantially free of contaminants Nov. 20, 2007
7165564 Device for cleaning installations and related methods Jan. 23, 2007
7143793 Cleaning system for a filling machine Dec. 5, 2006
7128279 Method and apparatus for fluid delivery to a backside of a substrate Oct. 31, 2006
7112260 Process and device for cleaning a circulating belt Sep. 26, 2006
7051743 Apparatus and method for cleaning surfaces of semiconductor wafers using ozone May. 30, 2006
7013953 Heat exchanger for wasted heat with its cleaning apparatus Mar. 21, 2006
7008306 Nozzle for injecting sublimable solid particles entrained in gas for cleaning a surface Mar. 7, 2006
7000623 Apparatus and method for substrate preparation implementing a surface tension reducing process Feb. 21, 2006
6983756 Substrate treatment process and apparatus Jan. 10, 2006
6983755 Cleaning method and cleaning apparatus for performing the same Jan. 10, 2006
6807974 Single wafer type substrate cleaning method and apparatus Oct. 26, 2004
6702202 Method and apparatus for fluid delivery to a backside of a substrate Mar. 9, 2004
6638366 Automated spray cleaning apparatus for semiconductor wafers Oct. 28, 2003
6612009 Dishwasher spray arm feed system Sep. 2, 2003
6568408 Method and apparatus for removing a liquid from a surface of a rotating substrate May. 27, 2003
6561204 Apparatus and method for cleaning wafers with contact holes or via holes May. 13, 2003
6543462 Apparatus for cleaning surfaces substantially free of contaminants Apr. 8, 2003
6539952 Megasonic treatment apparatus Apr. 1, 2003
6526999 Random high pressure water jetting nozzle for cleaning castings Mar. 4, 2003
6517641 Apparatus and process for collecting trace metals from wafers Feb. 11, 2003
6505635 Lifting and rinsing a wafer Jan. 14, 2003
6453916 Low angle solvent dispense nozzle design for front-side edge bead removal in photolithography resist process Sep. 24, 2002
6431188 Dishwasher spray arm feed system Aug. 13, 2002
6405741 Washing apparatus Jun. 18, 2002
6325982 Method and apparatus for the deacidification of library materials Dec. 4, 2001
6309472 Method of and apparatus for cleaning strip line rolls Oct. 30, 2001
6209222 Belt dryer with cleaning apparatus Apr. 3, 2001
6196240 Equipment for conveyance and treatment of garbage in high building Mar. 6, 2001
6176939 Cleaning device and process Jan. 23, 2001
6171559 Toothbrush sterilization unit for home use Jan. 9, 2001
6155276 Apparatus and method for removing soil contaminants Dec. 5, 2000
6131589 Accurate positioning of a wafer Oct. 17, 2000
6120729 Apparatus for cleansing and/or disinfecting surgical instruments Sep. 19, 2000
6115867 Apparatus for cleaning both sides of substrate Sep. 12, 2000
6106635 Washing method and washing apparatus Aug. 22, 2000

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