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Class Information
Number: 134/140
Name: Cleaning and liquid contact with solids > Apparatus > With means to movably mount or movably support the work or work support > Motor operated apparatus
Description: Apparatus claiming a motor for operating any part of the apparatus.










Sub-classes under this class:

Class Number Class Name Patents
134/141 Fluid motor or turbine 36


Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8567420 Cleaning apparatus for semiconductor wafer Oct. 29, 2013
8079376 Multi-pass, inverting bottle cleaner Dec. 20, 2011
8025069 Semiconductor wafer treating apparatus Sep. 27, 2011
7828001 Pad washing system with splash guard Nov. 9, 2010
7793671 Apparatus for and method of cleaning substrates Sep. 14, 2010
7726323 Device and process for liquid treatment of wafer-shaped articles Jun. 1, 2010
7694688 Wet clean system design Apr. 13, 2010
7682459 Drive chain cleaning device Mar. 23, 2010
7624744 Paint roller tool Dec. 1, 2009
7604001 Kitchen cooktop system Oct. 20, 2009
7597109 Spin scrubber apparatus Oct. 6, 2009
7581551 Cleaning apparatus Sep. 1, 2009
7549428 Substrate processing apparatus Jun. 23, 2009
7445015 Cluster tool process chamber having integrated high pressure and vacuum chambers Nov. 4, 2008
7422023 Tissue valve cleansing apparatus Sep. 9, 2008
7306002 System and method for wet cleaning a semiconductor wafer Dec. 11, 2007
7305998 Mobile flushing unit and process Dec. 11, 2007
7267129 Device and process for liquid treatment of wafer-shaped articles Sep. 11, 2007
7264008 Apparatus for cleaning a wafer Sep. 4, 2007
7252095 Mobile flushing unit and process Aug. 7, 2007
7201176 Wafer chucking apparatus for spin processor Apr. 10, 2007
7198052 Mobile flushing unit and process Apr. 3, 2007
7172674 Device for liquid treatment of wafer-shaped articles Feb. 6, 2007
7153388 Chamber for high-pressure wafer processing and method for making the same Dec. 26, 2006
7056392 Wafer chucking apparatus and method for spin processor Jun. 6, 2006
7024798 Low-pressure dryer and low-pressure drying method Apr. 11, 2006
7007702 Device and process for liquid treatment of wafer-shaped articles Mar. 7, 2006
6986214 Low-pressure dryer and low-pressure drying method Jan. 17, 2006
6983756 Substrate treatment process and apparatus Jan. 10, 2006
6883528 Apparatus for cleaning eggs by conveying thereof upon multiple conveyors through washers which are vertically tiered Apr. 26, 2005
6874515 Substrate dual-side processing apparatus Apr. 5, 2005
6866051 Megasonic substrate processing module Mar. 15, 2005
6843593 Staining apparatus for stacked electrophoresis slab gels Jan. 18, 2005
6843257 Wafer cleaning system Jan. 18, 2005
6823880 High pressure processing apparatus and high pressure processing method Nov. 30, 2004
6821356 Cleaning device and method for cleaning, using liquid and/or supercritical gases Nov. 23, 2004
6796054 Low-pressure dryer and low-pressure drying method Sep. 28, 2004
6776175 Liquid waste disposal and canister flushing system Aug. 17, 2004
6761178 Transferring apparatus and substrate processing apparatus Jul. 13, 2004
6755579 Developer having substrate oscillating system and method of developing process Jun. 29, 2004
6736906 Turbine part mount for supercritical fluid processor May. 18, 2004
6691718 Wafer container cleaning system Feb. 17, 2004
6619304 Pressure chamber assembly including non-mechanical drive means Sep. 16, 2003
6592680 Integrated circuit assembly cleaning apparatus and method Jul. 15, 2003
6588436 Liquid waste disposal with canister flushing system having removable lid and method therefor Jul. 8, 2003
6550489 Recirculating, low pressure hot water parts washing apparatus Apr. 22, 2003
6532975 Substrate processing apparatus and substrate processing method Mar. 18, 2003
6526999 Random high pressure water jetting nozzle for cleaning castings Mar. 4, 2003
6497239 Inverted pressure vessel with shielded closure mechanism Dec. 24, 2002
6491046 Vertical batch type wafer cleaning apparatus Dec. 10, 2002

1 2 3










 
 
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