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Class Information
Number: 134/102.3
Name: Cleaning and liquid contact with solids > Apparatus > With plural means for supplying or applying different fluids at the same workstation > Plural fluids applying conduits > With means for mixing or contacting fluids with each other before applying them > Having steam, air or gas applying conduit > With drying means
Description: Apparatus combined with means for drying the work.

Patents under this class:
1 2 3

Patent Number Title Of Patent Date Issued
8511324 Washing/drying machine Aug. 20, 2013
8469043 Drying system for a dishwasher Jun. 25, 2013
8240061 Surface treatment apparatus Aug. 14, 2012
8161985 Method and apparatus for cleaning articles used in the production of semiconductors Apr. 24, 2012
7997288 Single phase proximity head having a controlled meniscus for treating a substrate Aug. 16, 2011
7754076 Reactor for washing particulate matter Jul. 13, 2010
7735687 Beverage dispenser Jun. 15, 2010
7703462 Reduction of entrance and exit marks left by a substrate-processing meniscus Apr. 27, 2010
7520284 Apparatus for developing photoresist and method for operating the same Apr. 21, 2009
7506457 Substrate treating apparatus Mar. 24, 2009
7467634 No contact spray apparatus cleaning device Dec. 23, 2008
7464719 Multi-menisci processing apparatus Dec. 16, 2008
7422641 Substrate cleaning apparatus and substrate cleaning method Sep. 9, 2008
7386944 Method and apparatus for drying a wafer, and an apparatus for cleaning and drying a wafer Jun. 17, 2008
7383844 Meniscus, vacuum, IPA vapor, drying manifold Jun. 10, 2008
7343922 Wafer drying apparatus Mar. 18, 2008
7293571 Substrate proximity processing housing and insert for generating a fluid meniscus Nov. 13, 2007
7198055 Meniscus, vacuum, IPA vapor, drying manifold Apr. 3, 2007
7107701 Substrate drying method and apparatus Sep. 19, 2006
7103992 Industrial dishwasher Sep. 12, 2006
7040328 Fluid/air burst washing system May. 9, 2006
7021323 Dust-incompatible article transfer container cleaner Apr. 4, 2006
6901938 Substrate cleaning apparatus Jun. 7, 2005
6895981 Cross flow processor May. 24, 2005
6837252 Apparatus for treating a workpiece with steam and ozone Jan. 4, 2005
6817370 Method for processing the surface of a workpiece Nov. 16, 2004
6818178 Method for high vacuum sterilization of closures Nov. 16, 2004
6792693 Wafer dryer system for PRS wet bench Sep. 21, 2004
6790291 Method of and apparatus for processing substrate Sep. 14, 2004
6746543 Apparatus for and method of cleaning objects to be processed Jun. 8, 2004
6725868 Liquid processing apparatus Apr. 27, 2004
6705331 Substrate cleaning apparatus Mar. 16, 2004
6706243 Apparatus and method for cleaning particulate matter and chemical contaminants from a hand Mar. 16, 2004
6601594 Apparatus and method for delivering a treatment liquid and ozone to treat the surface of a workpiece Aug. 5, 2003
6591845 Apparatus and method for processing the surface of a workpiece with ozone Jul. 15, 2003
6575178 Cleaning and drying method and apparatus Jun. 10, 2003
6491045 Apparatus for and method of cleaning object to be processed Dec. 10, 2002
6484737 Process of and device for treating small parts with a liquid treatment medium Nov. 26, 2002
6446643 Micro-environment chamber and system for rinsing and drying a semiconductor workpiece Sep. 10, 2002
6368556 Apparatus for operational cleaning of dental handpieces Apr. 9, 2002
6342104 Method of cleaning objects to be processed Jan. 29, 2002
6338350 Portable eyeglass washing system Jan. 15, 2002
6336463 Cleaning/drying station and production line for semiconductor devices Jan. 8, 2002
6334902 Method and apparatus for removing a liquid from a surface Jan. 1, 2002
6319329 Method of cleaning objects to be processed Nov. 20, 2001
6286524 Wafer drying apparatus and method with residual particle removability enhancement Sep. 11, 2001
6283132 Anesthesia spirometer absorber circuit cleaner and method Sep. 4, 2001
6273109 Cleaning device for automobile bodies Aug. 14, 2001
6267125 Apparatus and method for processing the surface of a workpiece with ozone Jul. 31, 2001
6235122 Cleaning method and cleaning apparatus of silicon May. 22, 2001

1 2 3

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