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Class Information
Number: 134/1
Name: Cleaning and liquid contact with solids > Processes > Including application of electrical radiant or wave energy to work
Description: Processes which include applications of electric, wave, ray or radiant energy to the work, other than radiant heat energy broadly recited.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7614407 |
Prime coat, indicia and clear coat removal process for a golf ball |
Nov. 10, 2009 |
| 7604702 |
Method, apparatus, and system for bi-solvent based cleaning of precision components |
Oct. 20, 2009 |
| 7598654 |
Megasonic processing apparatus with frequency sweeping of thickness mode transducers |
Oct. 6, 2009 |
| 7588036 |
Chamber clean method using remote and in situ plasma cleaning systems |
Sep. 15, 2009 |
| 7585372 |
Method and apparatus for generating gas pulses |
Sep. 8, 2009 |
| 7582168 |
Method and apparatus for cleaning semiconductor wafer |
Sep. 1, 2009 |
| 7578890 |
Method for removing contaminants from silicon wafer surface |
Aug. 25, 2009 |
| 7578889 |
Methodology for cleaning of surface metal contamination from electrode assemblies |
Aug. 25, 2009 |
| 7578302 |
Megasonic cleaning using supersaturated solution |
Aug. 25, 2009 |
| 7569112 |
Scanning probe apparatus with in-situ measurement probe tip cleaning capability |
Aug. 4, 2009 |
| 7569111 |
Method of cleaning deposition chamber |
Aug. 4, 2009 |
| 7566872 |
Scanning electron microscope |
Jul. 28, 2009 |
| 7566370 |
Wafer clamping apparatus and method for operating the same |
Jul. 28, 2009 |
| 7559993 |
Process for decoating a washcoat catalyst substrate |
Jul. 14, 2009 |
| 7556697 |
System and method for carrying out liquid and subsequent drying treatments on one or more wafers |
Jul. 7, 2009 |
| 7553378 |
Substrate cleaning apparatus and method |
Jun. 30, 2009 |
| 7552503 |
Apparatus and method for cleaning a surface with high pressure air |
Jun. 30, 2009 |
| 7542539 |
Apparatus and method for ultrasonically cleaning irradiated nuclear fuel assemblies |
Jun. 2, 2009 |
| 7531042 |
Methods for cleaning and maintaining membrane surface during filtration |
May. 12, 2009 |
| 7527695 |
Apparatus and method for cleaning substrate |
May. 5, 2009 |
| 7524771 |
Substrate processing method using alkaline solution and acid solution |
Apr. 28, 2009 |
| 7521374 |
Method and apparatus for cleaning semiconductor substrates |
Apr. 21, 2009 |
| 7520937 |
Thin film forming apparatus and method of cleaning the same |
Apr. 21, 2009 |
| 7513955 |
Process for the plasma cleaning of a component |
Apr. 7, 2009 |
| 7506654 |
Accelerated plasma clean |
Mar. 24, 2009 |
| 7494548 |
Method of cleaning contact lenses via sonication |
Feb. 24, 2009 |
| 7489858 |
Heater assembly |
Feb. 10, 2009 |
| 7479191 |
Method for endpointing CVD chamber cleans following ultra low-k film treatments |
Jan. 20, 2009 |
| 7470919 |
Substrate support assembly with thermal isolating plate |
Dec. 30, 2008 |
| 7462842 |
Device, EUV lithographic device and method for preventing and cleaning contamination on optical elements |
Dec. 9, 2008 |
| 7462249 |
Surface treatment process for metal articles |
Dec. 9, 2008 |
| 7459029 |
Cleaning method, cleaning apparatus and electro optical device |
Dec. 2, 2008 |
| 7452475 |
Cleaning process and apparatus for silicate materials |
Nov. 18, 2008 |
| 7451774 |
Method and apparatus for wafer cleaning |
Nov. 18, 2008 |
| 7449072 |
Ultrasonic removal of materials from containers |
Nov. 11, 2008 |
| 7435301 |
Cleaning solution of silicon germanium layer and cleaning method using the same |
Oct. 14, 2008 |
| 7421757 |
Pump valve mechanism |
Sep. 9, 2008 |
| 7416611 |
Process and apparatus for treating a workpiece with gases |
Aug. 26, 2008 |
| 7410909 |
Method of removing ion implanted photoresist |
Aug. 12, 2008 |
| 7410611 |
In-line method and apparatus to prevent fouling of heat exchangers |
Aug. 12, 2008 |
| 7402362 |
Method and system for reducing and monitoring precipitated defects on masking reticles |
Jul. 22, 2008 |
| 7396416 |
Substrate cleaning device |
Jul. 8, 2008 |
| 7384486 |
Chamber cleaning method |
Jun. 10, 2008 |
| 7381694 |
Composition and method for removing photoresist materials from electronic components |
Jun. 3, 2008 |
| 7381278 |
Using supercritical fluids to clean lenses and monitor defects |
Jun. 3, 2008 |
| 7372058 |
Ex-situ removal of deposition on an optical element |
May. 13, 2008 |
| 7372049 |
Lithographic apparatus including a cleaning device and method for cleaning an optical element |
May. 13, 2008 |
| 7368589 |
Purification of silicone containing compounds by supercritical fluid extraction |
May. 6, 2008 |
| 7368020 |
Reduced particle contamination manufacturing and packaging for reticles |
May. 6, 2008 |
| 7361231 |
System and method for mid-pressure dense phase gas and ultrasonic cleaning |
Apr. 22, 2008 |
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