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Class Information
Number: 134/1
Name: Cleaning and liquid contact with solids > Processes > Including application of electrical radiant or wave energy to work
Description: Processes which include applications of electric, wave, ray or radiant energy to the work, other than radiant heat energy broadly recited.

Sub-classes under this class:

Class Number Class Name Patents
134/1.1 Plasma cleaning 715
134/1.3 Semiconductor cleaning 1,164

Patents under this class:

Patent Number Title Of Patent Date Issued
8709338 Methods and apparatus for ultrasonic cleaning Apr. 29, 2014
8703400 Substrate treatment method, coating treatment apparatus, and substrate treatment system Apr. 22, 2014
8703050 Composition for photodynamic disinfection Apr. 22, 2014
8702870 Superimposition of rapid periodic and extensive post multiple substrate UV-ozone clean sequences for high throughput and stable substrate to substrate performance Apr. 22, 2014
8691022 Method and apparatus for processing wafer-shaped articles Apr. 8, 2014
8685168 Method for removing micro-debris and device of the same Apr. 1, 2014
8679732 Method for removing resist and for producing a magnetic recording medium, and systems thereof Mar. 25, 2014
8673084 Methods for varnish removal and prevention in an internal combustion engine Mar. 18, 2014
8673083 Method of cleaning showerhead Mar. 18, 2014
8662093 Method of and apparatus for measuring strength of ultrasonic waves Mar. 4, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8652262 Ultrasonic cleaning method for generating ultrasonic vibrations by a frequency modulated signal Feb. 18, 2014
8636018 Microbubble cleaning system for a large product such as a vehicle Jan. 28, 2014
8632637 Method and apparatus for plasma processing Jan. 21, 2014
8628624 Laser cleaning of components Jan. 14, 2014
8613803 Apparatus and method for indirect surface cleaning Dec. 24, 2013
8603207 Acoustic cleaning assembly for use in power generation systems and method of assembling same Dec. 10, 2013
8598550 Ex-situ removal of deposition on an optical element Dec. 3, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8591658 Laser probe tip fiber cap cleaning Nov. 26, 2013
8585917 Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods Nov. 19, 2013
8585824 Method of ablating a surface layer of a wall, and associated device Nov. 19, 2013
8580128 Method of manufacturing electromagnetic-wave shielding plate, electromagnetic-wave shielding plate manufactured thereby, and filter display using the same Nov. 12, 2013
8567417 Ultrasonic cleaning apparatus, ultrasonic cleaning method, and storage medium storing computer program for executing ultrasonic cleaning method Oct. 29, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8562749 Wafer fabrication process Oct. 22, 2013
8562748 Multiple cleaning processes in a single tank Oct. 22, 2013
8551253 Post polish disk cleaning process Oct. 8, 2013
8551251 Ultrasonic treatment method and apparatus Oct. 8, 2013
8545634 System and method for cleaning a conditioning device Oct. 1, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8529702 Casino chip cleaning method and equipment Sep. 10, 2013
8522802 Optical irradiation equipment and optical irradiation method Sep. 3, 2013
8519357 Cleaning apparatus for sanitizing furnishings Aug. 27, 2013
8518187 Transfer pick cleaning method Aug. 27, 2013
8516685 Method of manufacturing a disk drive device for reducing adhesive amount of particles Aug. 27, 2013
8512476 Ultrasonic cleaning method, and ultrasonic cleaning apparatus Aug. 20, 2013
8486199 Ultrasonic cleaning method and apparatus Jul. 16, 2013
8486198 Method of processing substrates Jul. 16, 2013
8481434 Method of manufacturing a semiconductor device and processing apparatus Jul. 9, 2013
8470095 Process and installation for surface preparation by dielectric barrier discharge Jun. 25, 2013
8454758 Electrostatic chuck cleaning method Jun. 4, 2013
8454752 Foreign substance removing apparatus, foreign substance removing method, and storage medium Jun. 4, 2013
8454751 Apparatus, systems and methods for removing debris from a surface Jun. 4, 2013
8448655 Ultrasonic cleaning device May. 28, 2013
8435356 Device and method for wet treating disc-like substrates May. 7, 2013
8425683 Method for tracking a scraper within a pipeline Apr. 23, 2013
8419858 Method and system for removing organic compouds in a closed loop system Apr. 16, 2013
8394203 In-situ cleaning of an imprint lithography tool Mar. 12, 2013
8388758 Apparatus and method for the rapid thermal control of a work piece in liquid or supercritical fluid Mar. 5, 2013

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