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Class Information
Number: 134/1.1
Name: Cleaning and liquid contact with solids > Processes > Including application of electrical radiant or wave energy to work > Plasma cleaning
Description: Process which includes treating the work with a plasma.










Sub-classes under this class:

Class Number Class Name Patents
134/1.2 Semiconductor cleaning 545


Patents under this class:
1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

Patent Number Title Of Patent Date Issued
8673406 Method and device for the plasma treatment of surfaces containing alkali and alkaline-earth metals Mar. 18, 2014
8657961 Method for UV based silylation chamber clean Feb. 25, 2014
8642477 Method for clearing native oxide Feb. 4, 2014
8632637 Method and apparatus for plasma processing Jan. 21, 2014
8623148 NF.sub.3 chamber clean additive Jan. 7, 2014
8617417 Cleaning composition, method for producing semiconductor device, and cleaning method Dec. 31, 2013
8608901 Process chamber cleaning method in substrate processing apparatus, substrate processing apparatus, and substrate processing method Dec. 17, 2013
8603252 Cleaning of semiconductor processing systems Dec. 10, 2013
8591659 Plasma clean method for deposition chamber Nov. 26, 2013
8591661 Low damage photoresist strip method for low-K dielectrics Nov. 26, 2013
8591752 Plasma processing method Nov. 26, 2013
8591660 Method for the plasma cleaning of the surface of a material coated with an organic substance Nov. 26, 2013
8574448 Plasma generation method, cleaning method, and substrate processing method Nov. 5, 2013
8574369 Method of removing resist and apparatus therefor Nov. 5, 2013
8562751 Dry cleaning method of substrate processing apparatus Oct. 22, 2013
8536550 Method and apparatus for cleaning collector mirror in EUV light generator Sep. 17, 2013
8536060 Method for clearing native oxide Sep. 17, 2013
8528224 Systems and methods for at least partially converting films to silicon oxide and/or improving film quality using ultraviolet curing in steam and densification of films using UV curing in ammon Sep. 10, 2013
8530870 Extreme ultraviolet light source apparatus Sep. 10, 2013
8518209 Apparatus for determining the endpoint of a cleaning or conditioning process in a plasma processing system Aug. 27, 2013
8500912 Plasma processing method and plasma processing apparatus Aug. 6, 2013
8496756 Methods for processing substrates in process systems having shared resources Jul. 30, 2013
8486198 Method of processing substrates Jul. 16, 2013
8486291 Plasma processing method Jul. 16, 2013
8481434 Method of manufacturing a semiconductor device and processing apparatus Jul. 9, 2013
8480807 Method and an apparatus for cleaning and/or sterilization of an object provided in a sealed enclosure Jul. 9, 2013
8470095 Process and installation for surface preparation by dielectric barrier discharge Jun. 25, 2013
8471227 Extreme ultraviolet light source apparatus Jun. 25, 2013
8454758 Electrostatic chuck cleaning method Jun. 4, 2013
8454850 Method for the removal of surface oxides by electron attachment Jun. 4, 2013
8419859 Method of cleaning plasma-treating apparatus, plasma-treating apparatus where the cleaning method is practiced, and memory medium memorizing program executing the cleaning method Apr. 16, 2013
8404052 Method for cleaning the surface of a silicon substrate Mar. 26, 2013
8398812 Apparatus and method for treating substrates Mar. 19, 2013
8398778 Control of bevel etch film profile using plasma exclusion zone rings larger than the wafer diameter Mar. 19, 2013
8377216 Vacuum processing apparatus and vacuum processing method Feb. 19, 2013
8366868 Substrate processing apparatus Feb. 5, 2013
8349087 Semiconductor device manufacturing method, wafer treatment system, and recording medium Jan. 8, 2013
8349401 Film formation apparatus and method for using same Jan. 8, 2013
8337623 Methods for plasma cleaning an internal peripheral region of a plasma processing chamber Dec. 25, 2012
8333868 Apparatus, carrier and method for the plasma treatment of molds Dec. 18, 2012
8323414 Particle removal apparatus and method and plasma processing apparatus Dec. 4, 2012
8317929 Lithographic apparatus comprising an electrical discharge generator and method for cleaning an element of a lithographic apparatus Nov. 27, 2012
8303719 Deposit removing method and substrate processing method Nov. 6, 2012
8298957 Plasma etchimg method and plasma etching apparatus Oct. 30, 2012
8294115 Linear electron source, evaporator using linear electron source, and applications of electron sources Oct. 23, 2012
8277567 Method of cleaning turbo pump and chamber/turbo pump clean process Oct. 2, 2012
8278186 Wafer cleaning method and wafer bonding method using the same Oct. 2, 2012
8277564 Method for removing a hardened photoresist Oct. 2, 2012
8277563 Plasma processing method Oct. 2, 2012
8262801 Vacuum processing method Sep. 11, 2012

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