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Class Information
Number: 118/730
Name: Coating apparatus > Gas or vapor deposition > Work support > Moving work support > Rotary
Description: Apparatus wherein the base holding means is capable of circular motion.
Sub-classes under this class:
Patents under this class:
| Patent Number |
Title Of Patent |
Date Issued |
| 7618516 |
Method and apparatus to confine plasma and to enhance flow conductance |
Nov. 17, 2009 |
| 7597762 |
Methods and apparatus for manufacturing components |
Oct. 6, 2009 |
| 7588640 |
Workpiece carrier device |
Sep. 15, 2009 |
| 7582186 |
Method and apparatus for an improved focus ring in a plasma processing system |
Sep. 1, 2009 |
| 7582167 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Sep. 1, 2009 |
| 7567421 |
Bipolar electrostatic chuck |
Jul. 28, 2009 |
| 7556695 |
Apparatus to make nanolaminate thermal barrier coatings |
Jul. 7, 2009 |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
Jun. 30, 2009 |
| 7527694 |
Substrate gripping apparatus |
May. 5, 2009 |
| 7513953 |
Continuous system for depositing films onto plastic bottles and method |
Apr. 7, 2009 |
| 7513954 |
Plasma processing apparatus and substrate mounting table employed therein |
Apr. 7, 2009 |
| 7494562 |
Vapor phase growth apparatus |
Feb. 24, 2009 |
| 7479210 |
Temperature control of pallet in sputtering system |
Jan. 20, 2009 |
| 7466907 |
Annealing process and device of semiconductor wafer |
Dec. 16, 2008 |
| 7459187 |
Surface-treatment method and equipment |
Dec. 2, 2008 |
| 7449071 |
Wafer holder with peripheral lift ring |
Nov. 11, 2008 |
| 7444955 |
Apparatus for directing plasma flow to coat internal passageways |
Nov. 4, 2008 |
| 7446284 |
Etch resistant wafer processing apparatus and method for producing the same |
Nov. 4, 2008 |
| 7422637 |
Processing chamber configured for uniform gas flow |
Sep. 9, 2008 |
| 7419551 |
Plasma reactor with apparatus for dynamically adjusting the plasma source power applicator and the workpiece relative to one another |
Sep. 2, 2008 |
| 7413628 |
Substrate treatment method and substrate treatment apparatus |
Aug. 19, 2008 |
| 7393433 |
Plasma processing apparatus, semiconductor manufacturing apparatus and electrostatic chucking unit used thereof |
Jul. 1, 2008 |
| 7393417 |
Semiconductor-manufacturing apparatus |
Jul. 1, 2008 |
| 7393418 |
Susceptor |
Jul. 1, 2008 |
| 7387687 |
Support system for a treatment apparatus |
Jun. 17, 2008 |
| 7368018 |
Chemical vapor deposition apparatus |
May. 6, 2008 |
| 7351293 |
Method and device for rotating a wafer |
Apr. 1, 2008 |
| 7351936 |
Method and apparatus for preventing baking chamber exhaust line clog |
Apr. 1, 2008 |
| 7351986 |
Method and apparatus for reducing cross contamination of species during ion implantation |
Apr. 1, 2008 |
| 7332055 |
Substrate processing apparatus |
Feb. 19, 2008 |
| 7331512 |
Monitoring and controlling of laser operation |
Feb. 19, 2008 |
| 7331307 |
Thermally sprayed member, electrode and plasma processing apparatus using the electrode |
Feb. 19, 2008 |
| 7314526 |
Reaction chamber for an epitaxial reactor |
Jan. 1, 2008 |
| 7311783 |
Multiple axis tumbler coating apparatus |
Dec. 25, 2007 |
| 7311939 |
Vacuum coating unit and a method for the differentiated coating of spectacle lenses |
Dec. 25, 2007 |
| 7284760 |
Holding device for disk-shaped objects |
Oct. 23, 2007 |
| 7279049 |
Apparatus for reducing entrapment of foreign matter along a moveable shaft of a substrate support |
Oct. 9, 2007 |
| 7276123 |
Semiconductor-processing apparatus provided with susceptor and placing block |
Oct. 2, 2007 |
| 7275553 |
Liquid processing apparatus and liquid processing method |
Oct. 2, 2007 |
| 7276125 |
Barrel type susceptor |
Oct. 2, 2007 |
| 7264699 |
Workpiece holder for processing apparatus, and processing apparatus using the same |
Sep. 4, 2007 |
| 7252737 |
Pedestal with integral shield |
Aug. 7, 2007 |
| 7241362 |
Substrate treatment method and substrate treatment apparatus |
Jul. 10, 2007 |
| 7226055 |
Substrate holding and spinning assembly and methods for making the same |
Jun. 5, 2007 |
| 7223308 |
Apparatus to improve wafer temperature uniformity for face-up wet processing |
May. 29, 2007 |
| 7204888 |
Lift pin assembly for substrate processing |
Apr. 17, 2007 |
| 7198276 |
Adaptive electrostatic pin chuck |
Apr. 3, 2007 |
| 7192624 |
Method for obtaining thermal diffusion coating |
Mar. 20, 2007 |
| 7186298 |
Wafer support system |
Mar. 6, 2007 |
| 7182814 |
Sample holder for physical vapor deposition equipment |
Feb. 27, 2007 |
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